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Brooks 4860 Installation And Operation Manual

4800 series
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Installation and Operation Manual
X -TMF-4800-MFC-eng
Part Number: 541B072AAG
June, 2009
®
Brooks
4800 Series
4850 Mass Flow Controller
4860 Mass Flow Meter
Model 4850/4860
with Compression Fittings
Model 4850/4860 with
Profibus Module
®
Brooks
4800 Series
Model 4850/4860 with
RS485 Module
Model 4850/4860 with
Local Operator Interface

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Summary of Contents for Brooks 4860

  • Page 1 Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 ® Brooks 4800 Series 4850 Mass Flow Controller 4860 Mass Flow Meter Model 4850/4860 with Compression Fittings Model 4850/4860 with RS485 Module Model 4850/4860 with Model 4850/4860 with Local Operator Interface Profibus Module...
  • Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
  • Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 4 Installation and Operation Manual X -TMF-4800-MFC-eng Part Number:541B072AAG ® Brooks 4800 Series June, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 5: Table Of Contents

    Contents Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG Brooks ® 4800 Series June, 2009 Paragraph Page Number Number Section 1 Introduction How to Use This Manual ......................1-1 Description ..........................1-1 Specifications ..........................1-1 Specifications for Local Operator Interface (LOI) ............... 1-6 Specifications for Profibus Digital Interface Module ..............
  • Page 6 Page Number Number Dimensions for Model 4850/4860 with Standard Process Connections ........1-4 Dimensions for Model 4850/4860 with Downport Connections ..........1-4 Dimensions for the 4800 Series Local Operator Interface (LOI) ..........1-6 Dimensions for the 4800 Series Profibus Digital Interface ............1-7 Dimensions for the 4800 Series RS-485 (S-Protocol) Digital Interface ........

  • Page 7: Section 1 Introduction

    This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM). 1-3 Specifications for Meter/Controller PERFORMANCE CHARACTERISTICS:* Flow Range FS ranges from 50 mln/min –...
  • Page 8 Typical Max. Typical Device (mA) (mA) (mA) (mA) 4860 (without valve) 4850 (with valve) Analog Input/Output Command/Setpoint Input Voltage: 0-5 Vdc, minimum impedance 990 Current: 4-20 mA, maximum impedance 220 Flow Signal Output Voltage: 0-5 Vdc, minimum load 2000 Current: 4-20 mA, maximum load 550 * All performance characteristics are at calibration conditions.
  • Page 9 Calibration Curve Selection Select one of nine gases via the LOI or RS232. Optional software tool for ease of RS232 connection is available on the brooks Instrument website. Contact your Brooks representative or the factory for details and cable options.

  • Page 10: Dimensions For Model 4850/4860 With Standard Process Connections

    Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections...
  • Page 11 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 Certifications: These certifications cover the 4800 Series mass flow devices as well as the local operator interface (LOI), Profibus digital interface module and the RS-485 digital interface module.

  • Page 12: Specifications For Local Operator Interface (Loi)

    Brooks 4800 Series June, 2009 1-4 Specifications for Local Operator Interface (LOI) For detailed instructions refer to the Brooks document X-SE-4800-LOI-eng. Figure 1-3 Dimensions for the 4800 Series Local Operator Interface (LOI) Local Operator Interface (LOI): Display Effective display area: 28 mm wide, 11 mm high...

  • Page 13: Specifications For Profibus Digital Interface Module

    Brooks 4800 Series June, 2009 1-5 Specifications for Profibus Digital Interface Module For detailed instructions refer to the Brooks document X-DPT-Profibus-4800-eng. Figure 1-4 Dimensions for the 4800 Series with Profibus Digital Interface Module Electrical Connections One(1) 15-Pin D-sub connector for connection to the 4800 Series device.

  • Page 14: Specifications For Rs-485 (Sprotocol) Digital Interface Module

    Brooks 4800 Series June, 2009 1-6 Specifications for RS-485 (SProtocol) Digital Interface Module For detailed instructions refer to the Brooks document X-DPT-S-Protocol-4800-eng. Figure 1-5 Dimensions for the 4800 Series with RS-485 (S-Protocol) Digital Interface Module Electrical Connections Two (2) 15-pin D-sub connectors, one for connection to the 4800 Series...

  • Page 15: Section 2 Installation

    If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to your nearest Product Service Department. Brooks Instrument 407 W. Vine Street P.O. Box 903...

  • Page 16: Return Shipment

    Brooks 4800 Series June, 2009 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W.

  • Page 17: Mechanical Connections

    40 microns be installed upstream from the device. Recommended installation procedures: a. The Brooks MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Install in such a manner that permits easy removal if the instrument requires servicing.

  • Page 18: Electrical Connections

    (LOI). When the LOI is used the setpoint signal is provided by the LOI. The Brooks electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply. These commons...

  • Page 19: Operation Check Procedure

    Refer to Table 1-1 for pin connections Local Operator Interface (LOI) Versions For description and specifications for the local operator interface refer to Section 1-4 in this manual and the Brooks document X-SE-4800-LOI-eng 2-9 Operation Check Procedure a. Mount the MFC/MFM in its final orientation.
  • Page 20 Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 h. Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1 of this document.

  • Page 21: Section 3 Operation

    Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 3-1 Operating Procedure After the MFC/MFM has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge.

  • Page 22: Features

    Not all features are available on all instruments. The Brooks 4800 Series device is a full-featured digital MFC. The device performs much like a traditional analog MFC, but with improved step response and valve control.
  • Page 23 +5 Vdc (>4.8 V), the valve will be forced to its open state. The valve override function can also be accessed via RS232. An optional software tool for ease of RS232 connection is available on the Brooks Instrument website. See Section 3, PC-based Support Tools for instructions on how to access this software.

  • Page 24: Pc-Based Support Tools

    3-5 PC-Based Support Tools A basic PC-based service tool for re-zeroing, gas selection, valve override and monitoring of the 4800 Series instruments is available on the Brooks Instrument website. To access this software, type in the following link into a web browser: www.BrooksInstrument.com/4800software.html.

  • Page 25: Section 4 Maintenance And Troubleshooting

    Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 4-1 Overview No routine maintenance is required on the 4800 Series devices. However, if an in-line filter is used, the filtering elements should be periodically replaced.
  • Page 26 Controller oscillates (applicable to MFC) Pressure drop or inlet pressure deviates Adjust pressures to original specifications from calibrated values PID out of adjustment Adjust PID settings or contact Brooks Instrument Valve out of adjustment Contact Brooks Instrument Unstable inlet pressure Check external pressure regulator...
  • Page 27 CO under 10 bar (150 psig). Most other Brooks mass flow controllers are capable of operating at much higher pressures. This is why Brooks typically specifies Buna for CO Q: Does the 4800 device have a low flow setpoint cut off? A: Yes.
  • Page 28 Bench Troubleshooting 1. Establish a proper connection between the Brooks 4800 Series Mass Flow Meter or Controller (using Figure 4-1 as a reference). Switch on the power and allow the instrument to warm-up for 15 minutes. In case of a Controller model, adjust the Setpoint to zero.

  • Page 29: Calibration Procedure

    June, 2009 Figure 4-1 Bench Troubleshooting Circuit 4-2-4 Calibration Procedure The calibration of Brooks 4800 Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment. To re-calibrate a device contact the Brooks factory.
  • Page 30 Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 31 CE mærkning af Masse Flow udstyr Dato Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
  • Page 32 Date January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
  • Page 33 Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
  • Page 34 CE. Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%. I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo.
  • Page 35 Januar 1996 Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
  • Page 36 Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
  • Page 37 Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 4800 Series June, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 38 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.

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4850

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