Brooks SLA7810 Series Installation And Operation Manual
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Brooks SLA7810 Series Installation And Operation Manual

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Brooks SLA7810 Series Installation And Operation Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 ® Brooks Metal Sealed Pressure Controllers Model SLA7810D/SLA7820D Digital I/O DeviceNet Pressure Controller Model SLA7810A/SLA7820A Analog I/O, Pressure Controller Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
  • Page 4 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 5 Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 6: Table Of Contents

    Contents Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 Paragraph Page Number Number Section 1 Introduction Scope ............................. 1-1 Description ............................. 1-1 Principle of Operation ........................1-2 Specifications ..........................1-8 Controller Specifications ......................... 1-9 Section 2 Installation General ............................
  • Page 7 Contents Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 8: Section 1 Introduction

    Broad Array of Communication Options Brooks offers the SLA7800 Series pressure controllers with a traditional 0- 5 volt analog option. Brooks also offers control interface with DeviceNet a high-speed (up to 500k baud) digital communication network. Brooks’...

  • Page 9: Principle Of Operation

    Section 1 Introduction Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 Reduced Cost of Ownership The Models SLA7810 and SLA7820 allow multi-gas and multi-range capabilities to reduce customer inventory. Storage and pre-programming of up to 10 pressure applications easily permits users to switch between different gases and ranges on a single device.
  • Page 10 Installation and Operation Manual Section 1 Introduction X-PR-SLA7800-PC-eng Part Number: 541B047AAG December, 2008 Model SLA7810 & SLA7820 Figure 1-2 Model SLA7810/SLA7820 Silicon Chip Configuration Figure 1-3 Model SLA7810/SLA7820 System Block Diagram. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 11 Section 1 Introduction Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 Figure 1-4 Model SLA7810A/SLA7820A Analog I/O Controller with 1/4" VCR Connections Figure 1-5 Model SLA7810D/SLA7820D Digital I/O DeviceNet Controller with 1/4" VCR Connections Artisan Technology Group - Quality Instrumentation ...
  • Page 12 The reset or integral control is combined with the proportional control action (normally referred to as P.I. control). Both proportional band and integration time are customer adjustable with a Brooks service tool. Pressure Controller Vessel Figure 1-6 Model SLA7820 Controller Upstream...
  • Page 13 Section 1 Introduction Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 Note: The Controller Mode and valve type are determined at the time of order. Mechanical parts must be changed to convert modes or valve types. Upstream Controller Mode - The controller is set to maintain the upstream process pressure constant, independent of downstream pressure or flow variations (ref.

  • Page 14: Specifications

    Installation and Operation Manual Section 1 Introduction X-PR-SLA7800-PC-eng Part Number: 541B047AAG December, 2008 Model SLA7810 & SLA7820 1-4 Specifications Pressure Ranges 7.25 psia to 290 psia full scale (Metal Seals) Flow Rates 0-30,000 sccm* (Nitrogen Equivalent). *Standard pressure and temperature in accordance with SEMI (Semiconductor Equipment and Materials Institute) standard: 32°F (0°C) and 101 kPa (760 Torr).

  • Page 15: Controller Specifications

    Section 1 Introduction Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 Maximum Fluid Operating Temperature 0°C to 65°C (32°F to 149°F) Leak Integrity Inboard to Outboard: 1x10-10 atm scc/sec Helium max. 1-5 Controller Specifications Digital software Can store 10 selectable P and I settings.
  • Page 16 Installation and Operation Manual Section 1 Introduction X-PR-SLA7800-PC-eng Part Number: 541B047AAG December, 2008 Model SLA7810 & SLA7820 Electrical Connections Analog I/O option: 15-pin, male Digital I/O DeviceNet option: 5-pin Micro-Connector, male Power Supply Voltage Electrical Connections (continued) Analog option: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored) Digital I/O DeviceNet option: 11-25 Vdc nominal = +24 Vdc Power Requirements...
  • Page 17 Section 1 Introduction Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-10 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 18: Section 2 Installation

    Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 2-1 General This section provides installation instructions for the Brooks Model SLA7810/20 PC. Figure 1-2 through Figure 1-8 show the Model SLA7810/ 20 dimensions, gas connections and electrical connection locations for an MFC.

  • Page 19: Return Shipment

    Instrument must have been purged in accordance with the following: Completion of form RPR003-1, Brooks Instrument Decontamination Statement. A copy of this form can be downloaded from the Brooks website www.brooksinstrument.com or is available from any Brooks Instrument location listed above. This is required before any Brooks Personnel can begin processing.

  • Page 20: Gas Process Connections

    Section 2 Installation Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 With the pressure controller upstream of the vessel (downstream pressure controller), the most likely application is controlling a subatmospheric pressure in the vessel. The inlet of the pressure controller can be at atmospheric gas pressure or at vapor pressure of a liquid source.

  • Page 21: In-Line Filter

    December, 2008 2-9 In-Line Filter It is recommended that an in-line filter, such as the Brooks Model 5848, be installed upstream from the controller to prevent the possibility of any foreign material entering the meter. The filter porosity should be...

  • Page 22: Remote Setpoint (Command) Input Analog Mode

    2. Tie cable shields should connect to ground at one end only. Figure 2-1 Common Electrical Connections, Analog I/O Electrical Interface DeviceNet Mode Electrical Interface in DeviceNet mode is covered in the DeviceNet Supplemental Instruction Manual for Brooks Models SLA7810 and SLA7820 (X-DeviceNet-PC-eng) 2-11 Remote Setpoint (Command) Input Analog Mode If the pressure controller will be commanded by an external voltage or current signal, the command potentiometer is not used.
  • Page 23 Section 2 Installation Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7800 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 24: Section 3 Operation

    P.I. control. Both proportional band and integration time are user adjustable by using special commands over a DeviceNet connection or using Brooks Service Software. The dynamic behavior of the control system is influenced by flow range, pressure range, fluid type, orifice size and system volume.
  • Page 25 Tuning the P.I. control Using the Brooks Service tool, read the current values of P. and I. It is highly recommended that the P. and I. values be recorded before adjustment. This will allow easy return to the factory settings. The Brooks Service tool is covered in another document.

  • Page 26: Section 4 Maintenance

    Section 4 Maintenance Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 4-1 Overview Routine maintenance is required on the Models SLA7810 and SLA7820. If an in-line filter is used, the filtering element should be periodically replaced.
  • Page 27 Section 4 Maintenance Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 This section contains suggestions to help diagnose pressure controller related problems in the gas distribution system and answers commonly asked questions. A. System Checks The Model SLA7810/SLA7820 is generally used as a component in gas handling systems, which can be quite complex.
  • Page 28 The actual output of the pressure controller is within 5% of the calculated value. If the pressure controller output is within limits, the problem is in the control valve or the system itself. Please contact Brooks Instrument for further recommendations. C. Disassembly It is not practical to disassemble the controller in the field.
  • Page 29 Section 4 Maintenance Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 30: Section A Ce Certification

    CE mærkning af Masse Flow udstyr Dato Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

  • Page 31: Ce Certification Of Mass Flow Equipment

    Date January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
  • Page 32 Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
  • Page 33 E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%.
  • Page 34 Januar 1996 Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
  • Page 35 Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
  • Page 36 Installation and Operation Manual X-PR-SLA7800-PC-eng Part Number: 541B047AAG Model SLA7810 & SLA7820 December, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 37 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.
  • Page 38 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

This manual is also suitable for:

Sla7820 seriesSla7820aSla7810aSla7820dSla7810d

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