Related Manuals for Brooks Instrument GF100 Series
Summary of Contents for Brooks Instrument GF100 Series
- Page 1 Installation & Operation Manual GF100 Series Metal Sealed, Thermal Mass Flow Controllers & Meters...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
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Page 3: Table Of Contents
Perform a Leak Test ........................26 Zeroing Setup Process ........................26 Zeroing the GF100 Series ......................26 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel ......27 Zeroing GF100 Series Flow from LCD Display Panel ..............28 Performance Checks ........................28 Introduction to the MultiFlo Configurator ................... - Page 4 GF101, GF121 & GF126 Series Product Description Code ............53 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ..54 GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ............56 A-1A GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 ..........57 A-1B GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ..........
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Page 5: Introduction
Optional model variations including—pressure transient insensitivity (PTI) and Safe Delivery System (SDS) Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital How to Use This Manual This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. -
Page 6: Product Support References
Section 1 Introduction Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include: Brooks MultiFlo Configurator Quick Start Manual: X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG Brooks GF100 Series data sheets:... -
Page 7: Industry Standard References
Section 1 Introduction Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18... -
Page 8: Terms And Acronyms
A process technology where a pure silicon crystalline structure is deposited or “grown” on a bare wafer, enabling a high-purity starting point for building the semiconductor device. Horizontal Base Down GF100 Series Integrated Flow Controller F.S. Full Scale Light Emitting Diode... -
Page 9: Description
Adapter Cables *Software, MultiFlo Configurator A331710003 Cable Assembly 2.5mm 214F027AAA USB-RS485 Converter with DB-9 female A332295001 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo www.BrooksInstrument.com/Documentation&Downloads... - Page 10 Section 1 Introduction Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions.
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Page 11: Lcd Display
Section 1 Introduction High Purity Flow Path The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. The GF120, GF125 & GF135 devices are constructed with a 4μ... -
Page 12: Specifications For Gf100 Series Devices
Section 1 Introduction Communication Interfaces The GF100 Series supports analog 0-5 Vdc, RS485, DeviceNet™ and EtherCAT communication protocols. Analog connections can be accessed ® via the DeviceNet or RS485 or Analog only connector options. DeviceNet and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. -
Page 13: Specifications For Standard Gf100/Gf120/Gf125 Series
Section 1 Introduction Table 1-3 Specifications for Standard GF100/GF120/GF125 Series GF100 GF100 GF120 GF120 GF125 GF125 GF100 GF100 GF100 GF120 GF120 GF120 GF125 GF125 GF125 Performance Performance Performance Performance Performance Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.) Full Scale Flow Range (N... -
Page 14: Specifications For Safe Delivery System (Sds) Gf120 Series
Section 1 Introduction Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series Performance Performance Performance Performance Performance GF120XSL GF120XSL GF120XSD GF120XSD GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.) Eq.) -
Page 15: Specifications For Gf100/Gf120/Gf125 Series With Ethercat Communications
Section 1 Introduction Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications Performance Performance Performance Performance Performance GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120 GF125 GF125 GF125 GF125 GF125 GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD Full Scale Flow Range... -
Page 16: Specifications For Gf135 Series
Section 1 Introduction Table 1-6 Specifications for GF135 Series P P P P P erformance erformance erformance erformance erformance Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.) Gasses Supported: Gasses Supported: Gasses Supported:... -
Page 17: Specifications For Gf101/Gf121/Gf126 Series
Section 1 Introduction Table 1-7 Specifications for GF101/GF121/GF126 Series GF101 GF101 GF101 GF101 GF101 GF121 GF121 GF121 GF121 GF121 GF126 GF126 GF126 GF126 GF126 Performance Performance Performance Performance Performance Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.) Eq.) -
Page 18: Specifications For Gf101/Gf121/Gf126 Series With Ethercat Communications
Section 1 Introduction Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications Performance Performance Performance Performance Performance GF101 GF101 GF101 GF101 GF101 GF121 GF121 GF121 GF121 GF121 GF126 GF126 GF126 GF126 GF126 Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range... -
Page 19: Dimensions - Gf100/Gf120/Gf125 Series
Section 1 Introduction Downport Configurations Electrical Connector Electrical Connector Electrical Connector G1/GX/TX Specific Dimensions SX Specific Dimensions DX/BB Specific Dimensions 3.29in 3.67in 84mm 93mm .98in 25mm 5.09in 4.45in 129mm 113mm 3.75in 95mm Fitting Option Code Seal Type Dim A Dim B Dim C Dim D Dim E... -
Page 20: Dimensions - Gf135, Devicenet
Section 1 Introduction Model GF135, DeviceNet, C-Seal Connections Model GF135, DeviceNet, VCR Connections Figure 1-4 Dimensions - GF135, DeviceNet... -
Page 21: Dimensions - Gf135, Rs485
Section 1 Introduction Model GF135, RS485, C-Seal Connections Model GF135, RS485, VCR Connections Figure 1-5 Dimensions - GF135 Series, RS485... -
Page 22: Dimensions - Gf101/Gf121/Gf126
Section 1 Introduction C-Seal Configurations VCR Configurations Figure 1-6 Dimensions - GF101/GF121/GF126... - Page 23 Section 1 Introduction EtherCAT, Downport Configurations EtherCAT, VCR Configurations Figure 1-7 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications...
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Page 24: Section 2 Installation
Section 2 Installation General This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks. -
Page 25: Transit Precautions
Section 2 Installation Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit. Removal from Storage Upon removal of the device from storage, a visual inspection should be conducted to verify its "as-received"... -
Page 26: Flow Controller Installation Arrangement
Section 2 Installation The GF100 Series is equipped with PTI technology, which reduces the effect of pressure fluctuations on gas flow. In PTI technology, a signal from an integrated pressure transducer is combined with the standard thermal sensor output. The combined signals allow precise and stable flow, even when the line pressure is fluctuating. -
Page 27: Purge The Gas Supply Line Before Gf100 Series Installation
If check valves are present in the gas line, both pumping down and purging are required. Pumping down without purging is inadequate. If a good vacuum source is not available, the GF100 Series can be de- contaminated by purge only. -
Page 28: Position And Mount The Gf100 Series
Figure 2-3 GF100 Series Mounting Attitude Positions Position and Mount the GF100 Series Position the GF100 Series so that the gas flow is pointed in the direction of the flow arrow on the GF100 Series rear S/N label. The various mounting positions are described in Figure 2-3 The standard orientation for the GF100 Series is Horizontal Base Down (HBD). -
Page 29: Gf100 Series Mounted To K1 Series Substrate Blocks
4. Using a torque wrench and a metric hex key, tighten the screws to the torque value as described in Table 2-2 and Torque Pattern Figure 2-5. 5. If your GF100 Series is configured with ¼" VCR fittings, secure the GF100 Series block to the gas panel with two, 8-32-UNC-2B" screws. -
Page 30: Perform A Leak Test
Perform a Leak Test WARNING It is critical to leak test the gas supply lines and GF100 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method. -
Page 31: Zeroing The Gf100 Series Pressure Transducer From The Lcd Display Panel
Section 2 Installation Shut-off valves, whether upstream or downstream from the GF100 Series, should be programmed to turn on before the GF100 Series is turned on and turned off after the GF100 Series is turned off. Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel 1. -
Page 32: Zeroing Gf100 Series Flow From Lcd Display Panel
1. Place the GF100 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow. 2. Looking at the top of the GF100 Series, press the "Display" button until the LCD display label is "%FS" as shown in Figure 2-8. Three button depressions from the MACID label display. -
Page 33: Introduction To The Multiflo Tm Configurator
Section 2 Installation Introduction to the MultiFlo Configurator The MutliFlo Configurator application is used to configure the gas and range of the GF Series devices. The following section describes the MultiFlo Configurator and its uses. Using the MultiFlo Configurator The MultiFlo Configurator application allows communication to GF Series devices through personal computer with serial COM Port and a Windows 10, Windows 7 or Windows XP operating system. -
Page 34: Multiflo Cable Adapter
Section 2 Installation Figure 2-10 MultiFlo Cable Adapter Figure 2-11 USB-RS485 Converter (214F027AAA) Connect the USB end of the converter to a laptop or PC. For GF1xx devices with EtherCAT communication, the diagnostic port must be used to interface with the MultiFlo Configurator. •... -
Page 35: Electrical Connections
Section 2 Installation The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for installation and operation details. Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www.BrooksInstrument.com/MultiFlo. -
Page 36: Analog/Rs485 Connections
Section 2 Installation Analog/RS485 Connections The GF100 Series devices are available with Analog 9-Pin D-Connectors shown in Figure 2-14. Analog 9-Pin Connector (Refer to Figure 2-15 for Pin-Out Details) Figure 2-14 GF100 Series with 9-Pin Analog Connector Connection Valve Control... -
Page 37: Ethercat Connections
Section 2 Installation EtherCAT Connections Power needs to be supplied via the standard male M8 5-pin connector. The M8 connector is located on the upper inlet side of the device. Refer to Figures 2-16 and 2-17 below. M8 Connector (Refer to Figure 2-17 for Pin-Out Details) Figure 2-16 GF100 with EtherCAT Communications, M8 Power Connector Location. -
Page 38: Gf100 Series Electrical Interface Options
Customer Service for mor Customer Service for mor e in e in formation. formation. Customer Service for mor Customer Service for mor Customer Service for more in e in e information. formation. formation. Figure 2-18 GF100 Series Electrical Interface Options... -
Page 39: Gf135 Inlet Valve Installation
Section 2 Installation GF135 Inlet Valve Installation When installing the GF135 – 1. Connect the MFC tubing labeled "IN" to a CDA or N2 supply of 90 ±3 psi. 2. Next, the MFC tubing labeled "OUT" should be connected to the customer upstream pneumatic isolation valve. -
Page 40: Gf135 Commissioning
Section 2 Installation GF135 Commissioning Download the GF135 commissioning software, part number 805-C-026, from the Brooks Instrument website. The software will need to be downloaded onto a computer with a Windows ® based operating system. Necessary equipment: • Computer that runs a Windows operating system •... - Page 41 Section 2 Installation 2. Select the single device that you want to perform the commissioning and click on "Connect to Device". The Commissioning button becomes enabled. 3. Click on the "Commission" button to begin the process. Some intermediate messages will appear on the bottom mesage bar. You will then be presented the option to override the current inlet gas pressure.
- Page 42 Section 2 Installation 4. The user will be presented the option to override a few of the parameters being tested prior to actual commissioning. Selecting "Yes" will continue the process. By selecting "No" the commissioning process will end. 5. After numerous checks are performed, the auto-volume will start. This will take approximately 5 minutes to complete.
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Page 43: Section 3 Operation General
Section 2 Installation 6. Once the auto-volume and the K1 set points are complete, the program will go back to the initial screen. In addition, the overall run time will be displayed. From here, another device (or the same one again) may be selected for commissioning. - Page 44 Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor. The temperature difference, T2 – T1, is directly proportional to the gas mass flow. GF100 Series operating principles are described in Figure 3-1.
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Page 45: Gf100 Series Operating Principles
2. The signal from the pressure transducer is inverted and then summed in with the original sensor signal. 3. The two summed signals cancel each other out. 4. The sensor signal that is applied to the microprocessor is undisturbed. 5. The flow of process gas is undisturbed by incoming pressure fluctuations. Figure 3-1 GF100 Series Operating Principles... -
Page 46: Section 4 Maintenance & Troubleshooting Overview
Section 4 Maintenance & Troubleshooting Overview No routine maintenance is required on the Brooks GF100 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. - Page 47 Section 4 Maintenance & Troubleshooting...
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Page 48: Troubleshooting
Electrical interference 2. Check supply voltage and check for a consistent ground. 3. Insure OEM tool setpoint matches the setpoint at the GF100 Series. Observe for consistency. 4. Verify isolations valves are open and the gas supply is turned on. Then verify operating pressures are within operating ranges. -
Page 49: Gf100 Series Troubleshooting Guide
Is the MOD LED light on the GF100 Series Observe the LED display panel on top of to lit solid green? verify. If the LED light is not lit, cycle power the to reboot. - Page 50 Is the GF100 Series calibrated for the Check GF100 Series side label. Run a flow check to verify. gas flow? If flow is incorrect, replace the GF100 Series with a unit that is calibrated properly. 5. No gas flow below some set-point.
- Page 51 Equalize the pressure across the GF100 Series by opening it briefly. Set up the GF100 Series for zeroing. Then perform the zeroing procedure in Section 2-14. Is the GF100 Series configured properly Use the tool software to verify.
- Page 52 The tool is commanding a setpoint before the pneumatic valves are opened. GF100 Series and pneumatic timing may be offset. GF100 Series overshoots. 14. Tool display output doesn’t match GF100 Series flow output.
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Page 53: Section 5 Product Description Code Overview
Section 5 Product Description Code Overview Reference Tables 5-1 through 5-5 for specific Product Description Codes. Table 5-1 GF100, GF120 & GF125 Series Product Description Code Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option... -
Page 54: Gf100, Gf120 & Gf125 Series Product Description Code
Section 5 Product Description Code Table 5-1 GF100, GF120 & GF125 Series Product Description Code (Continued) Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description... -
Page 55: Gf100, Gf120 & Gf125 Series With Ethercat Communications Product Description Code
Section 5 Product Description Code Table 5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description Code Option Code Option Code Option Option Description Option Description... -
Page 56: Model Gf135 Product Description Code
Section 5 Product Description Code Table 5-3 Model GF135 Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description Code Option Code Option Code Option Option Description Option Description Option Description I. -
Page 57: Gf101, Gf121 & Gf126 Series Product Description Code
Section 5 Product Description Code Table 5-4 GF101, GF121 & GF126 Series Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description Code Option Code Option Code Option Option Description Option Description Option Description I. -
Page 58: Gf101, Gf121 & Gf126 Series With Ethercat Communications Product Description Code
Section 5 Product Description Code Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description... - Page 59 Section 5 Product Description Code GF100 Series Ordering Instructions Refer to the Product Description Codes on the previous pages. Starting from the left, choose the product code options as follows: 1. Required performance model. a. Standard Performance, non-PTI: GF100 b. High Performance, non-PTI: GF120 c.
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Page 60: Gf100 Series Gas Table - Codes 1-108, Bins Sh40 To Sh50
Appendix A: GF100 Series Gas Table GF100 Series Gas Table Table A-1 GF100 Series Gas Table (Reference the following pages, A-1 and A-2). Table A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 Min inlet pressure for vac. exhaust (PSIA) SH40... -
Page 61: Appendix A: Gf100 Series Gas Table Overview
Appendix A: GF100 Series Gas Table Table A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 Min inlet pressure for vac. exhaust (PSIA) SH40 SH41 SH42 SH43 SH44 SH45 SH46 SH47 SH48 SH49 SH50 High High Code Gas Symbol... -
Page 62: Appendix B: Gf100 Series Patents Overview
Appendix B: GF100 Series Patents GF100 Series Patents The GF100 Series may be protected by the following US patents and their international filings. Table B-1 GF100 Series Patents Patent/Pub. No. Title System and method of operation of a digital mass flow controller... - Page 63 Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.