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User Manuals: Brooks GF1 Series Mass Flow Controller
Manuals and User Guides for Brooks GF1 Series Mass Flow Controller. We have
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Brooks GF1 Series Mass Flow Controller manual available for free PDF download: Installation And Operation Manual
Brooks GF1 Series Installation And Operation Manual (62 pages)
High Performance Gas Flow Controllers
Brand:
Brooks
| Category:
Controller
| Size: 2 MB
Table of Contents
Table of Contents
5
Section 1 General Information
9
GF1XX Series High Performance Gas Flow Controller Analog and Digital
9
Notice and Caution Statements
10
Product Warranty
10
How to Order an Gf1Xx Device
10
Industry Standard References
10
GF1XX Gas Table
10
Glossary of Terms and Acronyms
11
Patents
12
Introduction
12
General Description
13
Intended Use
9
Introduction
9
Product Support References
9
Section 2 Product Description
12
GF1XX General Description
13
LED Display
13
Operating Principles
14
Specifications for GF Series Controller
15
Specifications for GF120XSD Series Controller
16
Specifications for GF120XSL Series Controller
16
Product Labeling
16
Mode Code Description
17
Standard Features
18
Mounting Attitude
18
Factory Setup Conditions
18
Calibration Traceability
18
Materials
18
Auto Shut-Off
19
LED Display
19
Optional Features
20
Control Valve Options
20
Flow Direction Option
20
Fittings Option
20
I/O Communication
20
Cable Connector Options
20
Section 3 Installation Instructions
21
Introduction
21
Flow Controller Installation Arrangement
21
Typical Gas Supply Arrangement with Non-PTI MFC
21
Typical Gas Supply Arrangement with PTI MFC
21
Purge the Gas Supply Line before GF1XX Installation
22
Unpack and Inspect the GF1XX Device
23
Position and Mount the GF1XX Device
23
GF1XX Mounting Attitude Positions
23
GF1XX Mounted to K1 Series Substrate Blocks
24
Perform a Leak Test
25
Mounting Screws Torque Pattern
25
Section 4 Multiflo Configurator
27
Introduction
27
Multiflo Configurator
27
Configure the Gas and Flow Range
28
Multiflo Cable Adapter
28
Diagnostic Port
28
Section 5 Performance Checks
29
Introduction
29
Zeroing Setup Process
29
Zeroing the GF1XX
30
Zeroing the GF1XX Pressure Transdcer from the LCD Display Panel
30
Display with PSI Reading
30
Zeroing the GF1XX Flow from LCD Display Panel
31
Display Reading Zero PSI
31
Display Set to %FS
31
Flow Display Set to Zero
31
Section 6 Maintenance Requirements
33
Introduction
33
Routine Maintenance
33
Factory Calibration and Service
34
On-Site Service
34
Section 7 System Troubleshooting
35
Introduction
35
OEM Tool Troubleshooting Checklist
35
Environmental Factors
35
GF1XX Troubleshooting Guide
36
Section 8 GF Series Device Removal and Return Instructions
41
Introduction
41
Purge Gas Lines before Removing the GF1XX
41
Remove and Replace the GF1XX
41
Package the GF1XX
42
Return Shipment of the GF1XX
42
Appendix A: Product Description Code
43
GF125 Product Description Code Table
43
GF100 Product Description Code Table
44
GF120 Product Description Code Table
45
Appendix B: Industry Standard References
49
Industry Standard References
50
Appendix C: GF Series Gas Table
51
GF1XX Gas Table
51
Appendix D: Misc. Drawings
55
Electrical Connections
55
D-1-1 Devicenet Connector
55
Dimensional Drawings
59
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