Brooks 5866 Installation And Operation Manual
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Brooks 5866 Installation And Operation Manual

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Installation and Operation Manual
X-PR-5866E-5866M-eng
PN 541-C-005-AAA
April, 2008
Brooks
Compact Pressure Controller
®
Model 5866
Model 5866

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Summary of Contents for Brooks 5866

  • Page 1 Installation and Operation Manual X-PR-5866E-5866M-eng PN 541-C-005-AAA April, 2008 Brooks Compact Pressure Controller ® Model 5866 Model 5866...

  • Page 2: Table Of Contents

    Contents Contents Section 1 Introduction Page Purpose ..................1-1 Description .................. 1-1 Principle of Operation ..............1-1 Specifications ................1-6 Controller Specifications .............. 1-7 Section 2 Installation Receipt of Equipment ..............2-1 Recommended Storage Practice ..........2-1 General ..................2-1 Gas Connections .................
  • Page 3 Brooks Instrument Model 5866 Mass Flow Controller Section 6 Calibration Page Calibration Procedure ..............6-1 Gas Conversion Factors .............. 6-2 Section 7 Parts List General ..................7-1 Appendix A CE Certification CE Certification for Mass Flow Equipment ........ A-1 Figures Model 5866 Pressure Transducer .........

  • Page 4: Purpose

    An amplifier provides output to the control circuit as well as the electrical output signal. In addition to the pressure transducer the Model 5866 has an integral control valve and control circuitry. A difference between the pressure and setpoint signals will cause the electronics to modulate the control valve to maintain the desired pressure.

  • Page 5: Model 5866 Pressure Transducer

    Brooks Instrument Model 5866 Pressure Controller Figure 1-1. Model 5866 Pressure Transducer. Figure 1-2. Model 5866 Silicon Chip Configuration. Figure 1-3. Model 5866 System Block Diagram (Downstream version). ® REMOTE PRESSURE TRANSDUCER TRANSDUCER Model 5866 INPUT COMMAND VALVE CONTROL COMPARISON...

  • Page 6: Model 5866 Dimensions

    Introduction Figure 1-4. Model 5866 Model 5866E Dimensions. 15 Pin Male D-Connector Proportional Adjustment Valve Height w/ Downstream Adapter Integral Adjustment 5.23 (133.0) Upstream/Downstream Flow Indicator Label 9/16 - 18 UNF Upstream Outlet (Both Ends) (Downstream Inlet) Upstream Inlet (Downstream Outlet) 1.50...

  • Page 7: Model 5866 Upstream Controller

    The Model 5866 Pressure Controller has proportional and integral control action. The reset or integral control is combined with the proportional control action (normally referred to as P .I. control). Both proportional band (0.5% to 100%) and integration time (0.05 to 5 seconds) are customer...

  • Page 8: Typical Application Of Downstream Controller

    0-5 V, 0-10 V, 0-20 mA or 4-20 mA input/output. 0-5 V input/ output is the standard configuration. For maximum accuracy, the Model 5866 should be calibrated with the input/output configuration it will ultimately use. Controllers will be configured at the factory if requested at the time of ordering.

  • Page 9: Specifications

    Brooks Instrument Model 5866 Pressure Controller Valve Override permits the user to fully open and close the valve independent of the command setting (refer to Section 2-9). Precision +5 Volt Reference is provided to be used in conjunction with a user supplied command potentiometer to generate a 0-5 V command signal.

  • Page 10: Controller Specifications

    Integration Time Adjustable, 0.05 to 5 seconds Control Action Upstream or downstream pressure control Valve Type Standard: Normally Closed Optional: Normally Open Materials of Construction Model 5866 Model 5866M Wetted Parts 316 SS 316L Var SS Seals/Valve Seats Viton ®...
  • Page 11 Brooks Instrument Model 5866 Pressure Controller Power Requirements N.C. 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA N.O. 10.5 watts, ±15 Vdc (±5%) @ 350 mA Class III Equipment: The dc Mains input shall be supplied from a SELV (Separated Extra-Low Voltage) source.

  • Page 12: Receipt Of Equipment

    The flow in this situation is usually determined by the characteristics of a vacuum pump. 2-4 Gas Connections Standard inlet and outlet connections on the Model 5866 and 1/4" compression fittings. Optional VCO and VCR connections are available...

  • Page 13: Installation

    EMC Directive (89/336/EEC). Refer to Appendix A. Recommended Installation Procedures a. The Model 5866 should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components.

  • Page 14: In-Line Filter

    2-6 In-Line Filter It is recommended that an in-line filter, such as the Brooks Model 5848, be installed upstream from the controller to prevent the possibility of any foreign material entering the meter. The filter porosity should be...

  • Page 15: Customer Connections And Settings

    Brooks Instrument Model 5866 Pressure Controller Figure 2-1. Customer Connections and Settings.

  • Page 16: Valve Override

    Terminal 11 (refer to Figure 2-1 and Table 2-1). 2-11 Remote Transducer Input To allow the Model 5866 control circuitry and valve to be used with an external transducer signal such as a capacitance manometer, Jumper J2 “C” or “D” must be moved to the Position B. Jumper J2, "A" can be in either Position a or b depending on valve/controller type.

  • Page 17: Optional Valve Return

    Brooks Instrument Model 5866 Pressure Controller 2-13 Optional Valve Return Units manufactured after January, 1992 with a Normally Closed valve can be configured so the valve current can be returned to the power supply on a separate line. This is recommended if the power supply lines are longer than 10 feet.

  • Page 18: Operation

    I adjustment potentiometer locations. The dynamic behavior of the control system is influenced by flow range, pressure range, fluid type, orifice size and system volume. Therefore, Model 5866 may have to be adjusted in the field to achieve the best dynamic response.

  • Page 19: P .I. Control

    Brooks Instrument Model 5866 Pressure Controller Proportional Control Proportional control is a basic continuous control mode in which the controller output is proportional to the error input signal to the controller. Refer to Figure 3-2. It provides very rapid response and is relatively stable.

  • Page 20: Proportional Control

    Operation Figure 3-2. Proportional Control. Figure 3-3. Integral Control.
  • Page 21 Brooks Instrument Model 5866 Pressure Controller Figure 3-4. P .I. Control.

  • Page 22: General

    Maintenance Maintenance Section 4-1 General No routine external maintenance is required for Brooks thermal mass flow controller. If an in-line filter is used for the Model 5866, the filtering element should periodically be replaced or cleaned.
  • Page 23 Brooks Instrument Model 5866 Pressure Controller...

  • Page 24: General

    A. System Checks The Model 5866 is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary down time.

  • Page 25: Disassembly

    Note: Do not attempt to disassemble the transducer. 5-3 Disassembly The Model 5866 pressure controller may be disassembled in the field by the user for cleaning, re-ranging or servicing. The disassembly procedures below detail the upstream control version of the Model 5866 with a Normally Closed control valve.
  • Page 26 Troubleshooting Table 5-1. Bench Troubleshooting. Trouble Possible Cause Check/Corrective Action Output stays at zero Volts regardless of com- Defective Sensor Replace sensor. Refer to Section 5-3 and Table 5-2. mand and there is pressure on the controller. Output stays at zero Volts regardless of Clogged Control Valve Check Pin 7 if the voltage is more than +11 V.
  • Page 27 Note: Steps 10, 11, 12 and 13 may be eliminated if the transducer is not to be removed. B. Cleaning Procedures Should the Model 5866 Pressure Controller require cleaning due to contamination with foreign material, use the following procedures:...

  • Page 28: Assembly

    5-4 Assembly The assembly procedures below detail the downstream control version of the Model 5866 with a Normally Closed control valve. The procedures for the upstream control version and the Normally Open control valve are substantially the same. CAUTION Do not get halocarbon grease on the hands.

  • Page 29: Adjusting The Control Valve

    (refer to Section 4-1). 5-5 Adjusting the Control Valve [numbers in ( ) refer to Figure 7-1] The Model 5866 control valve has been factory adjusted to insure proper operation. Adjustment is not normally required during the life of the instrument.
  • Page 30 Screw type adjustments are not used in Brooks control valve since they can change with pressure and vibration. Screw type adjustments also introduce a dynamic seal that is a potential leak site and source for contamination.
  • Page 31 (9) preload spacer or by adding a .005" large (10) preload spacer. 4. Reassemble the control valve following the assembly procedure in Section 5-4, above. 5. Apply 5 psig to the inlet of the Model 5866 if equipped with 0-1 bar transducer. Apply 10 psig for instruments equipped with other transducers.

  • Page 32: Valve Adjusting Spacer Locations

    Troubleshooting Figure 5-3. Valve Adjusting Spacer Locations.

  • Page 33: Minimum Flow Values

    3. Reassemble the valve and set the variable voltage power supply to zero Volts. 4. Apply 5 psig to the inlet of the Model 5866 if equipped with 0-1 bar transducer. Apply 10 psig for instruments equipped with other transducers.

  • Page 34: Valve Adjusting Spacer Locations, Normally Open (N.o.) Valve

    Troubleshooting Figure 5-4. Valve Adjusting Spacer Locations, Normally Open (N.O.) Valve. 5-11...

  • Page 35: Orifice Sizing

    100% output signal. The calibration pressure is the maximum sensed pressure. The above definitions are shown in Figure 5-5. To properly size the control valve orifice in the Model 5866 the following information must be known: · Calibration Pressure, psia ·...
  • Page 36 This situation can be corrected by reducing the pressure drop to the allowable level, or, reducing the maximum flow so a smaller orifice will be selected. An example Model 5866 application is shown in Figure 5-6 to illustrate the orifice sizing procedure. Given:...

  • Page 37: Example Application Of Orifice Sizing Procedure

    Brooks Instrument Model 5866 Pressure Controller Since the C calculated is the same as listed for the .014" orifice the .020" orifice should be selected. The last step is to check the maximum pressure drop for the application. The maximum pressure drop for the .020 orifice is 300 psi, this is greater than the 100 psi pressure drop required for the application so the .020"...

  • Page 38: Calibration Procedure

    Sections 5-5 and 5-6 respectively. The adjustment of the control electronics is best done in the actual system the Model 5866 will be installed in and this procedure is covered in Section 3-2. This section of the manual will cover the calibration of the pressure transducer.

  • Page 39: Gas Conversion Factors

    (J1). 5. Apply a vacuum to the transducer side of the Model 5866 and check zero pressure output. If the zero pressure output is correct, the calibration is complete.
  • Page 40 Calibration Where, = percentage (%) of gas 1 (by volume) = percentage (%) of gas 2 (by volume) = percentage (%) of gas n (by volume) Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor conversion factor for the mixture is: Mixture Factor = = 0.945...

  • Page 41: Conversion Factors

    Brooks Instrument Model 5866 Pressure Controller Table 6-1. Conversion Factors (Nitrogen Base). GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Acetylene 0.615 0.970 1.173 Mixture 0.998 1.018 1.293 Allene 0.478 1.199 1.787 Ammonia 0.786 0.781 0.771 Argon 1.395 1.195 1.784...
  • Page 42 Calibration Table 6-1. Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Hydrogen 1.008 0.269 0.090 Hydrogen Bromide 0.987 1.695 3.645 Hydrogen Chloride 0.983 1.141 1.639 Hydrogen Cyanide 0.744 0.973 1.179 Hydrogen Fluoride 0.998 0.845 0.893 Hydrogen Iodide 0.953...
  • Page 43 Brooks Instrument Model 5866 Pressure Controller...
  • Page 44 Parts List Section 7-1 General Replacement parts for the Model 5866 are readily available worldwide through the factories and customer service facilities listed on the back cover of this manual. Parts can also be ordered through authorized repair stations and sales agents. When ordering replacement parts please specify: Brooks serial number, model number, part description, part number and quantity.

  • Page 45: Model 5866E Parts Drawing

    Brooks Instrument Model 5866 Pressure Controller Figure 7-1. Model 5866E Parts Drawing.

  • Page 46: Model 5866E Parts List

    PC Board Mounting Bracket 079-Z-135-EAA Section ID 0.014" 577-Z-385-BMT 577-Z-414-CVA ID 0.020" 577-Z-387-BMT 577-Z-416-CVA Screw, PC Board, Cover 753-L-056-AWZ PC Board Assembly, 5866 097-B-190-ZZZ ID 0.032" 577-Z-391-BMT 577-Z-420-CVA Electronics Cover Can 219-Z-256-EAD Sizing) ID 0.048" 577-Z-393-BMT 577-Z-422-CVA Pot Hole Plug 620-Z-434-SXA ID 0.062"...

  • Page 47: Model 5866M Parts Drawing

    Brooks Instrument Model 5866 Pressure Controller Figure 7-2. Model 5866M Parts Drawing.

  • Page 48: Model 5866M Parts List

    Parts List Table 7-3. Model 5866M Parts List.
  • Page 49 Brooks Instrument Model 5866 Pressure Controller...
  • Page 50 трябва да се обръща особено внимание. Качество на сигналните кабели, кабелните салници и присъединителните елементи: Brooks осигурява кабелна инсталация с отлично качество, която отговаря на изискванията на директивите на СЕ. Ако обаче искате да използвате свой сигнален кабел, изберете сигнален кабел с поне 100%- во...
  • Page 51 Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
  • Page 52 Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
  • Page 53 : Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
  • Page 54 Installation and Operation Manual Section A, CE Certification of 541-C-005-AAA Rev D/ DRAFT Mass Flow Equipment April, 2007 Model 5866 Greek Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands...
  • Page 55 CE. Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%. I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo.
  • Page 56 Azonban a CE jellel ellátott berendezésekhez használandó jelkábelek kiválasztására különös figyelmet kell szentelni. A jelkábelek, kábel tömszelencék és csatlakozók minősége: A Brooks kitűnő minőségű kábelezést biztosít, ami eleget tesz a CE irányelvek követelményeinek. Ha azonban saját jelkábelét szeretné használni, egy legalább 100 %-ban burkolt, teljesen árnyékolt jelkábelt válasszon.
  • Page 57 Datum : Januari 1996 Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC). Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
  • Page 58 Data : Janeiro de 1996. O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética (directiva CEM 89/336/EEC). Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.
  • Page 59 Neonstraat 3 6718 WX Ede The Netherlands Fiecare aparat Brooks (electric/electronic), pevăzut cu inscripţia CE a fost testat cu succes potrivit cerinţelor compatibilităţii electromagnetice (standardul EMC 89/366/EEC). Însă o atenţie deosebită trebuie acordată la alegerea cablurilor de semnal pentru aparatura prevăzută...
  • Page 60 Neonstraat 3 6718 WX Ede The Netherlands Všetky zariadenia (elektrické/elektronické) Brooks vybavené so značením CE boli úspešne testované podľa požiadaviek elektromagnetickej zhody (EMC predpis 89/336/EEC). Avšak pri voľbe signálových káblov k prístrojom vybaveným značkou CE sa musí zaobchádzať s veľkou opatrnosťou.
  • Page 61 Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
  • Page 62 The latest revision VCR body fitting configurations offer a modified mounting configuration adding the SEMI standard mounting hole configuration and only one (1) of the legacy Brooks mounting holes. When specifying any of the models listed below, please refer to the attached Figures A-1 thru A-2 for mounting...
  • Page 63 X-5964, dated April 1996, Issue 2 X-5866, dated April 1998, Issue 2 X-5866RT, dated May 1998, Issue 2 ® Brooks TMF Common Body Dimensions Figure A-1 Typical MFC/MFM Dimensional Drawing with VCR Fittings for Models 5850EMF, 5964D, 5866 and 5866RT.
  • Page 64 X-5850EM, December 1998, Issue 3 X-5964, dated April 1996, Issue 2 X-5866, dated April 1998, Issue 2 X-5866RT, dated May 1998, Issue 2 ® Brooks TMF Common Body Dimensions Figure A-2 Typical Downport MFC/MFM Dimensional Drawing Fittings for Models 5850EMF, 5964D, 5866 and 5866RT.
  • Page 66 Seller. BROOKS LOCAL AND WORLDWIDE SUPPORT Brooks Instrument provides sales and service facilities around the world, ensuring quick delivery from local stock, timely repairs and local based sales and service facilities.

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