Table of Contents
Advertisement
1-12. Cleaning the Optical Filter Block and the ND Unit
The following parts of this unit can be cleaned.
•
Both the front and back surfaces of the optical filter block.
•
The surface of the ND unit facing toward the optical filter.
The surface of the ND unit
facing toward the optical filter
Note
•
When replacing the optical filter block, removing the protective film of a new optical filter, dew
condensation may be generated or dust in the air may adhere depending on the ambient temperature
and humidity. If dew condensation or dust is found, clean the optical filter using the following
procedure.
•
Perform the cleaning in the simple cleaning bench. Wear rubber gloves during the cleaning.
•
The thin ND filter is low in strength. Do not apply a strong force to it when removing the dust or dirt
to clean it.
Fixtures
•
Simple cleaning bench (recommended product)
ISO CLASS 5 (CLASS 100) or equivalent
Example: Filter unit SS-MAC-11FR (Airtech Japan, Ltd.)
•
Rubber gloves (for clean room)
Example 1: Glove (Part number: 3-855-854-01)
Example 2: Type CG-N220G (Midori Anzen Co., Ltd.)
•
Blower
•
Cleaning stick
Example 1: Part number: J-6082-726-A
Example 2: Part number: J-6082-712-A
Front surface of the optical filter block
Back surface of the optical filter block
37
Advertisement
Table of Contents
