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Summary of Contents for MKS Mass-Flo 1159B
- Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
- Page 2 111155-P1 Rev K, 10/96 Instruction Manual ® MKS Mass-Flo Controller Types 1159B/2159B, 1160B/2160B, 1162B/2162B, 1163B/2163B Six Shattuck Road Fax: (508) 975-0093 Andover, MA 01810-2449 E-mail:mks@mksinst.com (800) 227-8766 or (508) 975-2350 Web site: http://www.mksinst.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 3 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 4 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
- Page 5 111155-P1 Rev K, 10/96 ® MKS Mass-Flo Controller Types 1159B/2159B, 1160B/2160B, 1162B/2162B, 1163B/2163B Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 6 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 7: Table Of Contents
Table of Contents Table of Contents Safety Procedures and Precautions..................1 Chapter One: General Information..................5 Introduction ....................... 5 How This Manual is Organized.................. 6 Customer Support ...................... 7 Chapter Two: Installation ...................... 9 How To Unpack the 1100 Series Unit ................ 9 Unpacking Checklist .................. - Page 8 Table of Contents Valve Override......................27 Adjusting the Speed to Set Point ................27 NUPRO BN Shutoff Valve..................27 Chapter Five: Theory of Operation..................29 Flow Path........................29 Measurement Technique.....................29 Control Circuitry ......................29 Gas Correction Factor....................31 How To Determine the Flow Controller Range............32 How To Read the Flow Output Directly ..............33 Chapter Six: Maintenance ......................35 Valve Adjustment.......................35 Repair ........................36...
- Page 9 List of Figures and Tables List of Figures and Tables Figures Figure 1: Preferred Method To Connect a Shielded Cable............12 Figure 2: Alternate Method To Connect a Shielded Cable ............. 12 Figure 3: Location of the Mounting Holes ................14 Figure 4: Aluminum Mounting Plate Holes ................
- Page 10 List of Figures and Tables Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 11: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 12 Safety Procedures and Precautions DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion, do not operate this product in an explosive atmosphere unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the instrument.
- Page 13 Safety Procedures and Precautions Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
- Page 14 Safety Procedures and Precautions This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 15: Chapter One: General Information
Refer to the corresponding manuals for requirements and instructions. The MKS MFC instruments are modular in concept and are available in a variety of types and configurations to suit specific needs. -
Page 16: How This Manual Is Organized
How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide instructions on how to set up and install an 1100 Series MFC unit. Before installing your Type 1100 Series unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. -
Page 17: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. - Page 18 Customer Support Chapter One: General Information This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 19: Chapter Two: Installation
Chapter Two: Installation How To Unpack the 1100 Series Unit MKS has carefully packed the Type 1100 Series unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. -
Page 20: Environmental Requirements
Environmental Requirements Chapter Two: Installation Environmental Requirements Follow the requirements listed below when installing and using an 1100 Series MFC: 1. The normal operating temperature should remain between 15° and 40° C (59° and 104° F). 2. The maximum gas inlet pressure is 150 psig. 3. -
Page 21: Interface Cables
Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;... -
Page 22: Figure 1: Preferred Method To Connect A Shielded Cable
Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Making Firm Contact To Braid Transducer Housing Braid Here Is Desirable Optional Plastic or Metal Cable... -
Page 23: Setup
Chapter Two: Installation Setup Setup Follow the guidelines listed below when setting up an 1100 Series MFC: 1. Place the 1100 Series MFC where it will be connected to a gas supply and process chamber. 2. Mount the MFC into position. Mounting of flow components in other than the position in which they are calibrated (typically horizontal) will cause a small zero shift. -
Page 24: Mounting An Mfc
Mounting an MFC Chapter Two: Installation Mounting an MFC Tapped holes are provided in the base of each unit (Types 1159, 1160, 1162, and 1163) for mounting. Refer to Figure 3 for the location of the mounting holes. 8-32 UNC-2B X 0.25 MIN DP 0.2 PL 0.750"... -
Page 25: Gas Line Connections
Chapter Two: Installation Gas Line Connections Gas Line Connections ® ® ® The 1100 Series is equipped with ¼ inch Swagelok fittings. Cajon 4-VCR (male) ® ® compatible, and Cajon 4-VCO (male) compatible fittings are available as options. Refer to the manufacturers’... - Page 26 Gas Line Connections Chapter Two: Installation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 27: Chapter Three: Overview
Chapter Three: Overview General Chapter Three: Overview General An MFC 1100 Series instrument measures the mass flow rate of a gas and controls the flow rate according to a given set point. The control range can be from 1.0 to 100% of Full Scale (F.S.) with an accuracy rate of ±... -
Page 28: Figure 6: Dimensions
General Chapter Three: Overview Controller Gain Zero Adjust 5.43" (137.9 mm) w\Type "D" Connector 5.30" (134.6 mm) w\Recessed P.C. Edge Connector 0.50" (12.7 mm) 3.00" (76.2 mm) Swagelok 4.44" (112.8 mm) Cajon 4-VCO type 4.56" (115.8 mm) Cajon 4-VCR type 4.88"... -
Page 29: Nupro Positive Shut-Off Valve
A NUPRO 4BN series pneumatically operated valve may be used in series with an MFC when a no-leakage condition is required. Since the spring force is very low in an MKS Mass-Flo controller, leak tightness cannot be guaranteed using this valve alone. The NUPRO valve is an ®... -
Page 30: Interface Connectors And Cables
Interface Connectors and Cables Chapter Three: Overview Interface Connectors and Cables MKS can supply interface cables, or you can make cables according to the following specifications: A. Shielded cable assemblies, in a nominal 10’ (3 m) length, with Type “D” connector on one end and terminated in flying leads (pigtail) fashion on the other end. -
Page 31: Electrical Connections
Electrical Connections Electrical Connections To use an MFC 1100 Series instrument with any equipment other than complimenting MKS modules, consult the manufacturers' specifications for connection, and for proper electrical and power characteristics. Refer to Appendix A, Product Specifications, beginning on page 39, for electrical requirements of the 1100 Series instruments. -
Page 32: P. C. Edge Card Connector
± 15 VDC Valve Open Optional Input No Connection No Connection -15 VDC No Connection MKS Test Point No Connection No Connection Signal Ground Valve Close Table 2: P. C. Edge Card Connector Pinout Note 1. Pins 1 through 10 are located on one side of the gold finger connection and pins A through L are located on the opposite side of the gold finger connection. -
Page 33: Control Valve
Chapter Three: Overview Control Valve Control Valve The Control Valve is a specially constructed solenoid valve in which the armature (moving valve mechanism) is suspended by two springs. This arrangement assures that no friction is present and makes precise control possible. In MFCs with normally closed valves (1159, 1160, 2159, and 2160), the control current is used to lift the armature from the seat allowing a controlled flow of gas. - Page 34 Control Valve Chapter Three: Overview This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 35: Chapter Four: Operation
(either a 15-pin Type “D” or a P. C. Edge Card connector) located at the top of the flow controller. Plug the other end of the cable into an MKS or MKS-compatible power supply/readout unit. 3. Apply power to the MFC instrument. -
Page 36: How To Zero The Flow Controller
Refer to Figure 6, page 18, for the location of the Zero pot. If you are using an MKS power supply/readout unit, the flow controller can also be zeroed at the front panel of the readout unit. 3. Open the positive shut-off valve. -
Page 37: Valve Override
Chapter Four: Operation Valve Override Valve Override Valve override enables the control valve to be fully opened (purged) or closed independent of the set point command signal. For 1100 Series Controllers with a Type “D” Connector: To open the valve, apply a TTL low to pin 4, or connect pin 4 to pin 11 (signal common). To close the valve, apply a TTL low to pin 3, or connect pin 3 to pin 11. - Page 38 NUPRO BN Shutoff Valve Chapter Four: Operation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 39: Chapter Five: Theory Of Operation
Chapter Five: Theory of Operation Flow Path The MKS MFC Series 1100 instruments are laminar flow devices whose precise indication of mass flow is achieved through the use of a range controlling changeable bypass and a parallel sensor tube. Upon entering the MFC, the gas stream is divided into two parallel paths; the first is directed through the sensor tube, the second goes through the changeable bypass. - Page 40 (negative in relation to the flow signal), the valve closes. Most controllers use an integral mode which means that the longer the error endures, the more the valve opens. MKS Types 147/647, 246, and 247 are designed to power, provide set point, and display the output of the MFC 1100 Series instruments.
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Page 41: Gas Correction Factor
1. When using the GCF, the accuracy of the flow reading may vary by ±5%, however, the repeatability will remain ±0.2% of F.S. 2. All MKS readouts have Gas Correction Adjustment controls to provide direct readout. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 42: How To Determine The Flow Controller Range
When using a gas with a density higher than nitrogen, be sure that the control valve Full Scale range can accommodate the desired flow rate. Please call the MKS Applications group if you have any questions. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 43: How To Read The Flow Output Directly
Use 1% RN60C resistors, or better 10 K Figure 8: Wiring Diagram for an Input Divider Note MKS Types 246, 247, and 260 provide gas correction factor adjustment. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 44 How To Read the Flow Output Directly Chapter Five: Theory of Operation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 45: Chapter Six: Maintenance
OSHA or NIOSH, or experts familiar with your process gas. MKS assumes no liability for safe handling of toxic or hazardous gases. Valve Adjustment All valves are 100% leak-checked at the factory prior to shipment using a Helium Mass Spectrometer to assure a leak integrity of 10 scc/sec He. -
Page 46: Repair
Note If you must return the instrument to MKS for repair, please contact any of the MKS service and calibration centers listed on the inside back cover of this manual, for an ERA (Equipment Return Authorization) number to expedite handling and ensure proper servicing of your instrument. -
Page 47: Chapter Seven: Troubleshooting
Chapter Seven: Troubleshooting Chapter Seven: Troubleshooting Troubleshooting Chart Symptoms Possible Cause Remedy Over-range at zero (after Flow is on and above meter Isolate MFC warm-up) range Sensor winding open Return for service No output or over-range at Improper cable Check cable for type zero (after warm-up) Electronics malfunctioning Return for service... - Page 48 Chapter Seven: Troubleshooting This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 49: Appendix A: Product Specifications
Appendix A: Product Specifications General Specifications Appendix A: Product Specifications General Specifications ± 1.0% of F.S. Accuracy 2, 3 EMC Directive 89/336/EEC CE Mark Compliance Control Range (controllers only) 1.0 to 100% of F. S. Controller Settling Time <2 sec. (to within 2% of set point) Full Scale Ranges (nitrogen equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000,... -
Page 50: Electrical Specifications
Electrical Specifications Appendix A: Product Specifications Electrical Specifications Connector Type 1159/1162 15-pin Type “D” 1160/1163 Recessed P. C. Edge Card Input Voltage/Current Required Max. at start up ± 15 VDC (±5%) @ 300 mA Typical at steady state ± 15 VDC @ 180 mA Output Impedance <1 ohm Output Signal/Minimum Load... -
Page 51: Appendix B: Gas Correction Factors
Appendix B: Gas Correction Factors Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR - - - 0.240 1.293 1.00 Ammonia 0.492 0.760 0.73 1.39 1 Argon 0.1244 1.782 Arsine 0.1167 3.478... - Page 52 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorosilane 0.150 4.506 0.40 1,2-Dichlorotetrafluoroethane 0.160 7.626 0.22 (Freon - 114) 1,1-Difluoroethylene 0.224 2.857 0.43 (Freon - 1132A) 2,2-Dimethylpropane 0.3914 3.219 0.22 Ethane...
- Page 53 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Hydrogen Chloride 0.1912 1.627 1.00 Hydrogen Fluoride 0.3479 0.893 1.00 Isobutylene 0.3701 2.503 0.29 Krypton 0.0593 3.739 1.543 Methane 0.5328 0.715 0.72 Methyl Fluoride...
- Page 54 5.858 1.32 Empirically defined Consult MKS Instruments, Inc. for special applications. NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia). Standard Temperature is defined as 0 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 55: Index
Index Index Messages, definitions of, 3 Mounting, 14 Cabling, 20 Connections, 15 Connector Normally closed valves, 5, 17 Edge Card, 22 Normally open valves, 5, 17 Type "D", 21 NUPRO valve, 5, 17, 19, 27 Control circuitry, 29 Control valve, 23 Operation, 25 Controller error, 30 Customer support, 7... - Page 56 Index Valve override, 27 Zero, 18, 26 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 57 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
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