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Summary of Contents for MKS MKS 153F
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- Page 2 MKS Type 153F Throttle Valve Controller Instruction Manual Six Shattuck Road Andover MA 01810-2449 123057-P1 Rev. A, 06/04 Main: 978.975.2350 Instruction Manual Fax: 978.975.0093 www.mksinst.com...
- Page 3 W ARR ANTY Types 153F Throttle Valve Controller MKS Instrum ents, Inc. (M KS) warrants that for two years from the date of shipm ent the equipm ent described above (the “equipm ent”) manufactured by M KS shall be free from defects in m aterials and workm anship and will correctly perform all date-...
- Page 4 123057-P1 Rev A, 6/04 Throttle Valve Controller OPEN CL O SE TYPE 153 CONTROL VALVE Input Power J2 Power...
- Page 6 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 8: Table Of Contents
Table of Contents Table of Contents Valve Safety Information......................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ....................2 Safety Procedures and Precautions .................3 Sicherheitshinweise für das Ventil....................5 In dieser Betriebsanleitung vorkommende Symbole ............5 Erklärung der am Gerät angebrachten Symbole .............6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............7 Informations relatives à... - Page 9 Table of Contents Grounding ......................29 Mounting Instructions..................31 Connectors ........................33 Power Connector (J2) ..................33 Input Connector (J1) ..................34 How To Connect to a PT-1 Portable RS-232 Terminal ..........37 How To Connect to a Computer ..................38 How To Connect to a Type 146 Cluster Gauge™ ............39 Chapter Three: Overview......................41 Control Mode........................41 Lead and Gain....................41...
- Page 10 Table of Contents Message Format....................56 Message Syntax ....................57 RS-232 Communication Commands ................58 Operating Value Messages .....................59 How To Set the Lead and Gain................60 How To Set the Set Point...................60 Valve Position Messages ....................61 How To Control the Valve.................62 How To Set the Valve Position................62 How To Return to Normal Operation ..............63 Calibration Messages ......................64 How To Learn the System Characteristics............64...
- Page 11 Table of Contents Valve Slipped Signal ..................86 Appendix A: Product Specifications...................87 Valve Specifications .......................87 ASA Flange Specifications .....................89 KF Style ISO Flange Specifications ................91 NW Style ISO Flange Specifications................93 CF Flange Specifications ....................94 JIS Flange Specifications....................96 Appendix B: Model Code Explanation..................97 Model Code........................97 Type 153 Controller Model Codes .................99 Type 153 Units with ASA Flanges ..............99...
- Page 12 List of Figures List of Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable ....22 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ....23 Figure 3: Type 153 Controller Dimensions ................24 Figure 4: Outline Dimensions of an ASA Flange ...............25 Figure 5: Outline Dimensions of a KF Style ISO Flange ............26 Figure 6: Outline Dimensions of a NW Style ISO Flange............27 Figure 7: Outline Dimensions of a CF Flange ................27...
- Page 14 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit ................ 2 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole............6 Tableau 3: Définition des symboles apparaissant sur l'unité ............10 Tabla 4: Definición de los símbolos hallados en la unidad............14 Table 5: Interface Cables ......................
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Page 16: Valve Safety Information
Valve Safety Information Symbols Used in This Instruction Manual Valve Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 17: Symbols Found On The Unit
Symbols Found on the Unit Valve Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) On (Supply) Off (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5007... -
Page 18: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 19 Safety Procedures and Precautions Valve Safety Information USE PROPER FITTINGS AND TIGHTENING PROCEDURES All valve fittings must be consistent with valve specifications, and compatible with the intended use of the valve. Assemble and tighten fittings according to manufacturer’s directions. CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation.
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Page 20: Sicherheitshinweise Für Das Ventil
Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Page 21: Erklärung Der Am Gerät Angebrachten Symbole
Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für das Ventil Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß... -
Page 22: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. - Page 23 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für das Ventil Nicht zusammmen mit explosiven Stoffen, Gasen oder Dämpfen benutzen! Um der Gefahr einer Explosion vorzubeugen, darf dieses Produkt niemals zusammen mit explosiven Stoffe aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
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Page 24: Informations Relatives À La Sécurité Pour La Valve
Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. -
Page 25: Symboles Apparaissant Sur L'unité
Symboles apparaissant sur l'unité Informations relatives à la sécurité pour la valve Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007... -
Page 26: Mesures De Sécurité Et Précautions
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. - Page 27 Mesures de sécurité et précautions Informations relatives à la sécurité pour la valve PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation. UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE Tous les équipements de la valve doivent être cohérents avec ses spécifications, et compatibles avec l'utilisation prévue de la valve.
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Page 28: Medidas De Seguridad De La Válvula
Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Page 29: Símbolos Hallados En La Unidad
Símbolos hallados en la unidad Medidas de seguridad de la válvula Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra... -
Page 30: Procedimientos Y Precauciones De Seguridad
No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento. - Page 31 Procedimientos y precauciones de seguridad Medidas de seguridad de la válvula USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DE EXPLOSIONES Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal...
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Page 32: Chapter One: General Information
Introduction The Type 153F “Smart” Throttle Valve Controller is designed for use in downstream pressure control applications. The 153 unit includes a “built-in” MKS Type 253 Throttle Valve, a microprocessor, RS-232 communication connections, and driver circuits. The driver circuits eliminate the need for a separate controller box. -
Page 33: How This Manual Is Organized
Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. -
Page 34: Chapter Two: Installation
Chapter Two: Installation How To Unpack the Type 153 Unit MKS has carefully packed the Type 153 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. -
Page 35: Interface Cables
153 unit to a 627 transducer, use part number CB153-7-10; for a metal braided shielded cable, use part number CB153S-7-10. You can purchase interface cables to all MKS companion products from MKS (refer to Table 5), or optionally, you can make cables that meet the appropriate cable specifications. -
Page 36: Generic Shielded Cables
Chapter Two: Installation Interface Cables Generic Shielded Cables Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Page 37: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable
Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary) -
Page 38: Figure 2: Alternate Method To Connect An Overall Metal Braided Shielded Cable
Chapter Two: Installation Interface Cables Screw Braid Strands Twisted Transducer Split Lock Washer Under Washer Flat Washers Overall Insulation External Tooth Lock Washer (if present) Transducer Housing Optional Plastic or Metal Cable Clamp (For Physical Strain Relief) Keep Wires Flat Against Case Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable Use this method when cable clamp is not available... -
Page 39: Setup
Setup Chapter Two: Installation Setup Dimensions Note 1. All dimensions are listed in inches with millimeters referenced in parentheses. The tolerances for the dimensions are ±0.1 (X.X) and ±0.01 (X.XX). 2. The 153 unit is available with five flange types: ASA, NW Style ISO, KF Style ISO, CF, and JIS. -
Page 40: Figure 4: Outline Dimensions Of An Asa Flange
Chapter Two: Installation Setup 0.39 (9.91) B DIA A DIA Groove "J" O-Ring Supplied with Valve E = Bolt Hole Diameter F = # Bolt Holes, Equally Spaced G = Bolt Circle Diameter (diameter from hole to hole) Type 153E-3-3-2 Shown Figure 4: Outline Dimensions of an ASA Flange Refer to Appendix A... -
Page 41: Figure 5: Outline Dimensions Of A Kf Style Iso Flange
Setup Chapter Two: Installation 1.44 (36.6) B DIA KF Flange F Mounts to KF Flange F Type 153E-1-40-2 Shown Type 153E-2-50-2 Shown Figure 5: Outline Dimensions of a KF Style ISO Flange Refer to Appendix A... -
Page 42: Figure 6: Outline Dimensions Of A Nw Style Iso Flange
Chapter Two: Installation Setup 0.39 Accepts K (9.91) Centering Seal Assy Both Faces B DIA A DIA E = Bolt Hole Diameter F = # Bolt Holes, Equally Spaced G = Bolt Circle Diameter Type 153E-3-80-2 Shown (diameter from hole to hole) Figure 6: Outline Dimensions of a NW Style ISO Flange Refer to Appendix A Mates with CF Style... -
Page 43: Figure 8: Outline Dimensions Of A Jis Flange
Setup Chapter Two: Installation 1.44 (36.6) B DIA A DIA O-Ring J Supplied by Customer E = Bolt Hole Diameter F = # Bolt Holes, Equally Spaced G = Bolt Circle Diameter (diameter from hole to hole) Mates with K JIS Flange Figure 8: Outline Dimensions of a JIS Flange Refer to Appendix A... -
Page 44: Power Requirements
Chapter Two: Installation Setup O-Ring Material Valves that have an O-ring sealed flapper are called sealing butterfly valves. This design ensures closed leak rates less than 1.3 x 10 scc/sec when new. Ensure that the O-ring material is compatible with the gases it will be exposed to in the system. Power Requirements The 253 valve, enclosed in the 153 unit, requires +15 to +30 Volts. -
Page 45: Figure 9: Returned Leads Tied To System Ground
Setup Chapter Two: Installation Set Point Output SET POINT Set Point SOURCE Return POWER + 15/30 V POWER SUPPLY POWER GND ANALOG GND PRESSURE SIGNAL PRESSURE TRANSDUCER Figure 9: Returned Leads Tied to System Ground... -
Page 46: Mounting Instructions
The 153 unit is not designed to operate with a heated valve unless certain modifications are made. Some installations require that the exhaust line and throttle valve be heated to prevent exhaust vapors from precipitating out in the exhaust line. For these types of applications, contact MKS Instruments. -
Page 47: Figure 10: Typical System Configuration
Setup Chapter Two: Installation EXTERNAL SET POINT POWER SUPPLY PRESSURE CHAMBER TRANSDUCER PT-1 COMPUTER Input Power CONTROLLER PUMP Figure 10: Typical System Configuration... -
Page 48: Connectors
Chapter Two: Installation Connectors Connectors There are two connectors on the top panel of the 153 controller (refer to Figure 16, page 42): a Power connector and an Input connector. The interface cables are listed in Table 5, page 20. Power Connector (J2) The 9-pin male Type “D”... -
Page 49: Input Connector (J1)
Connectors Chapter Two: Installation Input Connector (J1) The 25-pin female Type “D” connector contains the pins for the pressure input, set point input, RS-232 communications, power supply input, limit-switch outputs, pressure output, and valve position output. Input Connector (J1) Pinout Assignment Also connects to... - Page 50 Chapter Two: Installation Connectors Input Connector (J1) Pinout (Continued) Assignment Also connects to J2 Pin Pressure Signal Input (Hi side) -15 V (External supply to transducer) Open Limit-Switch Output Close Limit-Switch Output Limit-Switch Common Chassis Ground * When pin 14 is pulled low to digital ground, the valve is held in its current position. The “valve learn”...
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Page 51: Table 8: Example Pressure Outputs For Input Connector Pin 4
Connectors Chapter Two: Installation Output Range for Pressure (Pin 4) and Valve Position (Pin 6) The voltage range for the output on pin 4 and pin 6 on the Input connector is either 0 to +10 V (default), or 0 to +5 V. The voltage range is set with dipswitch 9 on the CPU board (refer to Dipswitch Bank, page 44, for more information). -
Page 52: How To Connect To A Pt-1 Portable Rs-232 Terminal
Chapter Two: Installation How To Connect to a PT-1 Portable RS-232 Terminal How To Connect to a PT-1 Portable RS-232 Terminal Note The 153 controller’s default communication parameters configure it to communicate with the PT-1 portable RS-232 terminal, rather than with a computer. -
Page 53: How To Connect To A Computer
How To Connect to a Computer Chapter Two: Installation How To Connect to a Computer Note The default communication parameters configure the 153 unit to communicate with the portable RS-232 terminal, rather than with a computer. To configure the 153 unit so that it can communicate with a computer, you must change the setting of dipswitch 6 on the CPU board to the OFF (open) position. -
Page 54: How To Connect To A Type 146 Cluster Gauge
How To Connect to a Type 146 Cluster Gauge™ The MKS Type 146 Cluster Gauge can be used to control the 153 unit. To configure the 153 unit to communicate with the 146 instrument, leave the dipswitches at the default settings (refer to Table 10, page 45) except for switch 8. -
Page 56: Chapter Three: Overview
Chapter Three: Overview Control Mode Chapter Three: Overview Control Mode The 153 controller controls a vacuum system using either Pressure or Position control. In either the Pressure Control or Position Control mode, the 153 controller accepts the following types of set points: •... -
Page 57: Figure 12: Lead Set Too High
Control Mode Chapter Three: Overview Lead The lead provides a control signal that is proportional to the change in the error signal. The error signal is the difference between the actual pressure and the set point. The lead is responsible for controlling how quickly the pressure responds to a change in set point. -
Page 58: Figure 14: Gain Set Too High
Chapter Three: Overview Control Mode Gain The gain provides a control signal that is proportional to the error signal. The gain is responsible for allowing the controller to track the set point with zero steady state error. The highest possible gain setting produces the best pressure control. -
Page 59: External Connectors And Controls
External Connectors and Controls Chapter Three: Overview External Connectors and Controls Figure 16 shows the location of the controls on the top panel of the 153 controller. Manual Valve Switch OPEN CL O SE Valve Close LED Valve Open LED TYPE 153 CONTROL VALVE Input... -
Page 60: Hold/Normal Switch
Chapter Three: Overview External Connectors and Controls Hold/Normal Switch This switch allows you to manually hold the valve in a constant position. When the switch is in the NORMAL position, the valve operates in the standard way. When the switch is placed in the HOLD position, the valve is held in a constant position, and does not respond to the pressure or set point signals. -
Page 61: Internal Controls
Internal Controls Chapter Three: Overview Internal Controls Dipswitch Bank The dipswitch bank, located on the CPU board inside of the 153 controller, provides the connections for all of the internal controls. Refer to Figure 17 for the location of the dipswitch bank on the CPU board. -
Page 62: Table 10: Dipswitch Functions And Settings
Chapter Three: Overview Internal Controls Dipswitch Functions and Settings Dipswitch Function Switch Position OFF (Open) ON (Closed) External Switch Lockout Lockout Disabled* Switches Disabled Voltage Output Range 0 to 5 V output (High) 0 to 10 V output (Low*) Set Point Control Type Position Control Pressure Control* Set Point Signal Type... - Page 63 “S1 xxx.x.” The extra “1” makes this entry downwardly compatible with other MKS products such as the Type 152, 153A, and 112 units. Switch 1: Selects the valve action. The valve can be set to use either normal or reverse valve action;...
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Page 64: How To Change The Dipswitch Settings
Chapter Three: Overview Internal Controls How To Change the Dipswitch Settings The dipswitches, located on the CPU board (refer to Figure 17, page 44), control the operating and communication parameters for the 153 controller. To set or change any of these parameters, you must change the position of the appropriate dipswitch. -
Page 65: Power-Down Constants
Power-Down Constants Chapter Three: Overview Power-Down Constants The 153 unit saves the several constants in non-volatile memory (RAM) when the power is turned off. When the power is restored, the 153 unit “remembers” these settings. The parameters saved in non-volatile memory are: •... -
Page 66: Labels
Serial #: 0123456789 Model #: 153FXYZ MKS Instruments, Inc. Made in the USA Figure 19: Serial Number Label The options for the 153 controller are identified in the model code when you order the unit. Refer to Appendix B: Model Code Explanation, page 95, for more information. - Page 67 Labels Chapter Three: Overview This page intentionally left blank.
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Page 68: Chapter Four: Operation
General Information Chapter Four: Operation General Information MKS products are designed and tested to provide the highest degree of safety attainable. To use your MKS valve safely, you must always conform to the following instructions: Warning The moving parts in the valve create a risk of personal injury until the valve is securely incorporated into a system. -
Page 69: Rs-232 Communication Parameters
RS-232 Communication Parameters Chapter Four: Operation RS-232 Communication Parameters The 153 controller can communicate with an external computer or a PT-1 portable terminal through the RS-232 interface. Using digital commands you can read the pressure, valve position, and the tuning parameters. You can also change the set point, open and close the valve, and adjust the tuning parameters. -
Page 70: How To Change The Communication Parameters
Chapter Four: Operation RS-232 Communication Parameters How To Change the Communication Parameters To change any of the user-adjustable communication parameters, you must change the dipswitch settings on the CPU board. Refer to How To Change the Dipswitch Settings, page 47, for instructions on how to access the CPU board and change the dipswitch settings. -
Page 71: Rs-232 Protocol
RS-232 Protocol Chapter Four: Operation RS-232 Protocol All RS-232 messages used by the 153 unit are composed of variable length ASCII strings. Messages sent to the unit from a remote computer or portable terminal are either commands that instruct the instrument to change an operating parameter, or requests that prompt the instrument to report information. -
Page 72: Message Syntax
Chapter Four: Operation RS-232 Protocol Message Syntax RS-232 message syntax uses the following conventions: Note 1. Commands and requests are not case sensitive. 2. Spaces are included in the syntax for clarity only. Do not include spaces in actual commands. bold Commands that you must enter exactly as shown in the manual. -
Page 73: Rs-232 Communication Commands
RS-232 Communication Commands Chapter Four: Operation RS-232 Communication Commands The RS-232 communication commands are separated into 3 functional groups: Operating Value, Valve Position, and Calibration. The communication commands are the same regardless of whether you are using a computer or the PT-1 portable terminal. Note Ensure that all of the dipswitch settings are properly configured (refer to Table 10, page 45) for your application. -
Page 74: Operating Value Messages
2 (refer to Table 10, page 45). The extra “1” makes this entry downwardly compatible with other MKS products such as the Type 152, 153A, and 112 units. Refer to How To Change the Dipswitch Settings, page 47, for more information. -
Page 75: How To Set The Lead And Gain
2 (refer to Table 10, page 45). The extra “1” makes this entry downwardly compatible with other MKS products such as the Type 152, 153A, and 112 units. Refer to How To Change the Dipswitch Settings, page 47, for more information. -
Page 76: Valve Position Messages
Chapter Four: Operation Valve Position Messages Valve Position Messages The Valve Position messages control the position and function of the throttle valve, allowing you to override normal operation. Note The Valve Position commands override the settings for dipswitch 8 (position versus pressure control) and dipswitch 7 (analog versus digital set point). -
Page 77: How To Control The Valve
Valve Position Messages Chapter Four: Operation How To Control the Valve The 153 unit can drive the throttle valve to full open or full close, or stop it at its current position. There are no requests associated with these functions. Note The RS-232 commands to open, close, or stop the valve override the active set point control of the valve. -
Page 78: How To Return To Normal Operation
Chapter Four: Operation Valve Position Messages How To Return to Normal Operation The O, C, H, and P value commands override the normal operation of the valve. To return the controller to normal operation (as defined by the dipswitch settings listed in Table 10, page 45) after issuing a valve control command, send either of the following commands: The controller exits from override mode and returns to the normal operating mode. -
Page 79: Calibration Messages
Calibration Messages Chapter Four: Operation Calibration Messages The 153 unit performs two types of calibrations: • Learning System Characteristics (refer to Table 15) • Calibrating for Output Errors (refer to Table 16, page 68) How To Learn the System Characteristics Learning the system characteristics sets the zero and full scale voltage levels for both the pressure and set point inputs, and sets the number of steps required for the throttle valve to move from its fully closed to fully open position. - Page 80 Chapter Four: Operation Calibration Messages How To Learn the Analog Set Point Zero The command [Z1] instructs the controller to take the current value of the external analog set point for its zero value. Zeroing the analog set point allows you to correct any controller zero offsets.
- Page 81 Calibration Messages Chapter Four: Operation How To Learn the Analog Set Point Full Scale The analog set point can be configured for 5 Volt or 10 Volt (default) full scale input. The voltage range is set with dipswitch 9 on the CPU board (refer to Table 10, page 45). You can, however, operate the 153 controller at a different full scale input, for example, 9.5 V, by recalibrating the full scale of the analog set point.
- Page 82 Chapter Four: Operation Calibration Messages How To Learn the Analog Pressure Zero The command [Z2] zeros the base pressure in systems where the known base pressure is not at, but near zero (as measured by another transducer in the system). There is no request associated with this function.
- Page 83 Calibration Messages Chapter Four: Operation How To Learn the Analog Pressure Full Scale 1. Warm-up the transducer and set up the pressure system for full scale pressure. 2. Send the command: The controller raises the pressure to the full scale value of the transducer and learns the pressure input that corresponds to the analog pressure full scale value.
- Page 84 Chapter Four: Operation Calibration Messages How To Learn the Number of Valve Steps Caution The procedure for learning the valve steps involves opening and closing the valve. Be certain that the system can withstand valve cycling before proceeding. The [V] command sets or learns the number of steps required for the throttle valve to move from its fully closed (0) to fully open (100) position.
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Page 85: How To Calibrate The System For Output Errors
Calibration Messages Chapter Four: Operation How To Calibrate the System for Output Errors The Calibration for Output Error commands adjust the digital signal outputs from the 153 controller. The unit produces the pressure output on pin 4 and the position output on pin 6 of the Input connector (refer to Table 7, page 33). - Page 86 Chapter Four: Operation Calibration Messages Description Command Request Response Factory Saved in Default Non- Setting Volatile Memory Set Pressure Output to none none none Zero Calibrate Pressure Zero none none none Z4voltage Analog Output Set Pressure Output to none none none Full Scale Calibrate Pressure Full...
- Page 87 Calibration Messages Chapter Four: Operation How To Calibrate the Zero and Full Scale Output for Position Control 1. Set the position output to zero by sending the command: 2. Read the position output voltage on pin 6 on the Input connector using a digital voltmeter.
- Page 88 Chapter Four: Operation Calibration Messages How To Calibrate the Zero and Full Scale Output for Pressure Control 1. Set the pressure output to zero by sending the command: 2. Read the pressure output voltage on pin 4 on the Input connector using a digital voltmeter.
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Page 89: Informational Messages
Informational Messages Chapter Four: Operation Informational Messages Informational messages report data on the 153 controller. There are no commands associated with these functions. RS-232 Informational Messages Description Request Response P value Pressure Reading • reports system pressure as % FS value: 0 to100.0% FS A value Analog Set Point Input Voltage... -
Page 90: How To Report The Analog Set Point Input Voltage
Chapter Four: Operation Informational Messages How To Report the Analog Set Point Input Voltage To report the actual input voltage as a percent of the analog set point full scale voltage range, enter: The controller responds with the message [A value], where: value: % of the analog set point FS voltage range Note The request [R 4] reports the analog set point value as a percentage of... -
Page 91: How To Use The Pressure Control Mode
How To Use the Pressure Control Mode Chapter Four: Operation How To Use the Pressure Control Mode How To Select the Pressure Control Mode To select the pressure control mode: 1. Place switch 8 in the dipswitch bank to the ON (Closed) position. This is the default setting for switch 8. -
Page 92: How To Use A Digital Set Point For Pressure Control
Chapter Four: Operation How To Use the Pressure Control Mode How To Use a Digital Set Point for Pressure Control To use a digital set point: 1. Place switch 7 in the dipswitch bank to the OFF (Open) position. This is not the default setting for switch 7. 2. -
Page 93: How To Use The Position Control Mode
How To Use the Position Control Mode Chapter Four: Operation How To Use the Position Control Mode How To Select the Position Control Mode To select the position control mode: 1. Place switch 8 in the dipswitch bank to the OFF (Open) position. This is not the default setting for switch 8. -
Page 94: How To Use A Digital Set Point For Position Control
Chapter Four: Operation How To Use the Position Control Mode How To Use a Digital Set Point for Position Control To use a digital set point: 1. Connect the controller to a computer or the PT-1 portable terminal. Refer to Chapter Two: Installation, page 19, for more information. 2. -
Page 95: How To Tune The Controller
How To Tune the Controller Chapter Four: Operation How To Tune the Controller The 153 controller is tuned by adjusting the lead and gain parameters with the RS-232 commands listed in Table 13, page 57. Note The “optimal” lead and gain settings result in the best response when the pressure is near the set point. - Page 96 Chapter Four: Operation How To Tune the Controller 6. Reduce the gain setting. Only adjust the gain setting if the pressure continues to oscillate around the set point, and it cannot be corrected by adjusting the lead. Note The highest possible gain setting produces the best pressure control, therefore, reduce the gain setting in very small increments.
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Page 97: How To Reset The Controller
How To Reset the Controller Chapter Four: Operation How To Reset the Controller The reset function enables the 153 controller to identify important characteristics for system control. Use the learn function whenever the 153 unit is used in a new vacuum system or when processing conditions are changed (such as changed flow rate, new or refurbished pump, or piping modifications). - Page 98 Chapter Four: Operation How To Reset the Controller To reset the controller: 1. Initiate the proper gas flow into the system. The gas flow rate should be close to that used for the actual process (use the maximum flow rate if several flow rates are used in the process). Do not vary the gas flow rate during learning.
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Page 100: Chapter Five: Maintenance And Troubleshooting
If your controller fails to operate properly upon receipt, check for shipping damage, and check the power/signal cable for proper continuity. Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an RMA Number (Return Material Authorization Number) before returning the unit to MKS Instruments for service. -
Page 101: Troubleshooting
Troubleshooting Chapter Five: Maintenance and Troubleshooting Troubleshooting Valve Slipped Signal The 153 unit has a “valve slipped” signal that can be useful when diagnosing exhaust valve or system problems. The valve slipped signal is only available through the RS-232 interface. When the 153 unit contacts either of the limit switches, the internal position signal should equal the appropriate valve position (0 for close, 100% for open). -
Page 102: Appendix A: Product Specifications
Appendix A: Product Specifications Valve Specifications Appendix A: Product Specifications Valve Specifications Ambient Operating Temperature 15° to 50° C (59° to 122° F) CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Machinery Directive 89/392/EEC Machinery Connectors 25-Pin Female Type “D” Input (J1) Power (J2) 9-Pin Male Type “D”... - Page 103 Valve Specifications Appendix A: Product Specifications Position Output Signal 0 to +10 VDC (normally), switchable to 0 to +5 VDC Can be calibrated to adjust for output error (refer to How To Calibrate the System for Output Errors , page 68) Power Loss Unit saves calibration constants and valve position (refer to Power-Down Constants, page...
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Page 104: Asa Flange Specifications
Appendix A: Product Specifications ASA Flange Specifications ASA Flange Specifications Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 153F- 153F- 2-2-1 2-2-2 60-2-2 3-2-1 3-2-2 3-3-1 3-3-2 4-3-1 Inside Diameter (A)* 1.88 1.950 2.362 2.888 3.025 2.888 3.025 3.888 Inches (mm) (47.8) - Page 105 ASA Flange Specifications Appendix A: Product Specifications ASA Flange Specifications (Continued) Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 153F- 153F- 4-3-2 4-4-1 4-4-2 6-4-2 6-6-2 8-6-2 8-8-2 10-10-2 Inside Diameter (A)* 3.965 3.888 3.965 5.781 5.781 7.501 7.501 10.000 Inches (mm)
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Page 106: Kf Style Iso Flange Specifications
Appendix A: Product Specifications KF Style ISO Flange Specifications KF Style ISO Flange Specifications Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 20-40-1 20-40-2 1-40-1 1-40-2 2-50-1 2-50-2 Inside Diameter (A 0.870 0.870 1.385 1.385 2.000 Inches (mm) (22.1) (22.1) (35.2) (35.2) - Page 107 KF Style ISO Flange Specifications Appendix A: Product Specifications KF Style ISO Flange Specifications (Continued) Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 20-40-1 20-40-2 1-40-1 1-40-2 2-50-1 2-50-2 Overall Height Unheated Inches 10.57 10.57 10.57 10.57 11.07 11.07 (mm) (268.5) (268.5)
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Page 108: Nw Style Iso Flange Specifications
Appendix A: Product Specifications NW Style ISO Flange Specifications NW Style ISO Flange Specifications Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 153F- 153F- 60-63-2 3-80-1 3-80-2 4-100-1 4-100-2 6-160-2 8-200-2 10-250-2 Inside Diameter (A)* 2.362 2.888 3.000 3.888 3.875 5.750 7.650... -
Page 109: Cf Flange Specifications
CF Flange Specifications Appendix A: Product Specifications CF Flange Specifications Valve Type Number 153F- 153F- 153F- 153F- 153F- 153F- 153F 20-2CF-1 20-2CF-2 1-2CF-1 1-2CF-2 2-3CF-1 2-3CF-2 2-4CF-1 Inside Diameter (A)* 0.779 0.779 1.270 1.270 1.888 2.000 1.888 Inches (mm) (19.79) (19.79) (32.3) (32.3) - Page 110 Appendix A: Product Specifications CF Flange Specifications CF Flange Specifications (Continued) Valve Type Number 153F 153F 153F 153F 153F 153F 153F 2-4CF-2 3-6CF-1 3-6CF-2 4-6CF-1 4-6CF-2 6-8CF-1 8-10CF-2 Inside Diameter (A)* 2.000 2.888 3.000 3.888 3.875 5.750 7.650 Inches (mm) (50.8) (73.4) (76.2)
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Page 111: Jis Flange Specifications
JIS Flange Specifications Appendix A: Product Specifications JIS Flange Specifications Valve Type Number 153F- 153F 153F 2-50J-1 2-50J-2 4-100J-2 Inside Diameter (A)* 1.888 2.000 3.875 Inches (mm) (48.0) (50.8) (98.4) Mounting Flange JIS 50 mm JIS 50 mm JIS 100 mm Outside Diameter (B)* Inches 4.47... -
Page 112: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options for your 153 controller are identified in the model code when you order the unit. The model code is identified as follows: 153F X Y Z where: 153F Type Number... - Page 113 Model Code Appendix B: Model Code Explanation Valve Type (Z) The type of valve (sealing or non-sealing) is designated by a single number code. The valve type is listed in column 4 in Tables 19 to 22, pages 97 to 100. Valve Type Ordering Code Sealing...
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Page 114: Type 153 Controller Model Codes
Appendix B: Model Code Explanation Type 153 Controller Model Codes Type 153 Controller Model Codes Type 153 Units with ASA Flanges Model Codes for Type 153 Units with ASA Flanges Model Code Valve Bore ASA Flange Flapper (Nominal Inside Size O-Ring Diameter) inches (mm) -
Page 115: Type 153 Controller With Kf Or Nw Iso Flanges
Type 153 Controller Model Codes Appendix B: Model Code Explanation Type 153 Controller with KF or NW ISO Flanges Model Codes for Type 153 Units with KF or NW ISO Flanges Model Codes Valve Bore ISO Flange Flapper (Nominal Inside Size O-Ring Diameter) -
Page 116: Type 153 Controller With Cf Flanges
Appendix B: Model Code Explanation Type 153 Controller Model Codes Type 153 Controller with CF Flanges Model Codes for Type 153 Units with CF Flanges Model Code Valve Bore CF Flange Size Flapper (Nominal Inside O-Ring Diameter) inches (mm) 153F-20-2CF-1 0.779 (19.79) 2¾”... -
Page 117: Type 153 Controller With Jis Flanges
Portable RS-232 Terminal Model Code Appendix B: Model Code Explanation Type 153 Controller with JIS Flanges Model Codes for Type 153 Units with JIS Flanges Model Code Valve Bore JIS Flange Size Flapper (Nominal Inside O-Ring Diameter) inches (mm) 153F-2-50J-1 1.888 (48.0) JIS-50 153F-2-50J-2... -
Page 118: Index
Index Index Absolute pressure, calculating, 72 Dimensions, 23–27 Analog set point Dipswitch bank full scale, 64, 73 changing settings, 47, 51 zero, 63 description of, 44 ASA flanges, 24, 87–88, 97 functions and settings, 45 Baud rate, 46 End-of-line delimiter, 46 Cables Full scale generic shielded, 21... - Page 119 Index JIS flanges, 27, 94, 100 Output signals, adjusting, 35 KF ISO flanges, 25, 89–90, 98 Parity, 46 Portable terminal cable, 36 Labels, 49 dipswitch settings, 53 Lead Position control adjusting, 78 calibrating zero and FS outputs, 70 command, 58 description of, 39 description of, 40 Power connector J2, 32, 42...
- Page 120 Index commands, 56–73 flange, 95 communication parameters, 53 position command, 60 message protocol, 54 steps, 67 operating protocol, selection of, 46 type, 96 operating value messages, 57–58 Valve safety, 51 valve position messages, 59–61 Valve slipped signal, 73, 84 Safety information, 1–16, 51 Zero Sealing/non-sealing valves, 28, 96 analog set point, 63...
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