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Mass-Flo 1159B
MKS Mass-Flo 1159B Manuals
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MKS Mass-Flo 1159B manual available for free PDF download: Manual
MKS
Mass-Flo 1159B
Manual
MKS Mass-Flo 1159B Manual (57 pages)
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
Table of Contents
7
Safety Procedures and Precautions
11
Chapter One: General Information
15
Introduction
15
How this Manual Is Organized
16
Customer Support
17
Chapter Two: Installation
19
How to Unpack the 1100 Series Unit
19
Unpacking Checklist
19
Environmental Requirements
20
Interface Cables
21
Generic Shielded Cable Description
21
Figure 1: Preferred Method to Connect a Shielded Cable
22
Figure 2: Alternate Method to Connect a Shielded Cable
22
Setup
23
Mounting an MFC
24
Mounting an MFC Configured with a NUPRO Valve
24
Figure 3: Location of the Mounting Holes
24
Figure 4: Aluminum Mounting Plate Holes
24
Gas Line Connections
25
How to Install a Swagelok Fitting
25
Figure 5: Standard Compression Fitting
25
Chapter Three: Overview
27
General
27
Figure 6: Dimensions
28
Figure 7: NUPRO Valve Dimensions
28
NUPRO Positive Shut-Off Valve
29
Interface Connectors and Cables
30
Electrical Connections
31
Type "D" Connector
31
Table 1: Type "D" Connector Pinout
31
P. C. Edge Card Connector
32
Table 2: P. C. Edge Card Connector Pinout
32
Control Valve
33
Chapter Four: Operation
35
Warm up and Start up
35
How to Start up the Flow Controller
35
How to Zero the Flow Controller
36
Valve Override
37
Adjusting the Speed to Set Point
37
NUPRO BN Shutoff Valve
37
Chapter Five: Theory of Operation
39
Flow Path
39
Measurement Technique
39
Control Circuitry
39
Gas Correction Factor
41
How to Determine the Flow Controller Range
42
How to Read the Flow Output Directly
43
Figure 8: Wiring Diagram for an Input Divider
43
Chapter Six: Maintenance
45
Valve Adjustment
45
Repair
46
Table 3: Troubleshooting Chart
47
Chapter Seven: Troubleshooting
47
Appendix A: Product Specifications
49
General Specifications
49
Electrical Specifications
50
Mechanical Specifications
50
Appendix B: Gas Correction Factors
51
Index
55
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