MKS G Series Instruction Manual
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MKS G Series Instruction Manual

Digital mass flow controller
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1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual

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  • Page 1 1046210-001, Rev A January, 2013 MKS G-Series Digital Mass Flow Controllers Instruction Manual...
  • Page 2 (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
  • Page 3 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America ...

  • Page 5: Table Of Contents

    Table of Contents Table of Contents List of References ............................... v  Mass Flow Device Safety Information ......................1  Symbols Used in This Instruction Manual ........................1   Symbols Found on the Unit ............................1   Safety Procedures and Precautions ..........................1  ...
  • Page 6 Table of Contents Mounting Hardware ..............................26   Installation Procedure ..............................26   Chapter Four: Analog and Digital Interfaces ....................29  Analog I/O Interface Cables ............................29   Analog Interface Input and Output Options......................... 30   Digital Interface Input and Output Options ......................... 33  ...
  • Page 7 List of References List of Figures Figure 1: Serial Number Label (sample) ......................26  Figure 2: DeviceNet Connector Pin Diagram ....................33  Figure 3: Devicenet Top View .......................... 34  Figure 4: Devicenet Baud Rate Switch ......................35  Figure 5: Devicenet MAC ID Switches ......................35  Figure 6: Profibus Top View ..........................
  • Page 8 表 5: 本機器に使⽤されているマークについて ................... 9  표 6: 장치에 표시된 기호들의 정의 ......................13  Table 7: MKS Interface Cables ........................29  Table 8: Analog Interface Voltage I/O (0 to 5 VDC) – 9 Pin D Male Pinouts – Model Code A ....30 ...

  • Page 9: List Of References

    List of References List of References The documents listed below are referenced throughout this manual. “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open DeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0 “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet Vendors Association, Inc.
  • Page 10 List of References This page intentionally left blank.

  • Page 11: Mass Flow Device Safety Information

    Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements.
  • Page 12 Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers.

  • Page 13: Sicherheitshinweise Für Das Massenflussgerät

    Sicherheitshinweise für das Massenflussgerät Sicherheitshinweise für das Massenflussgerät In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
  • Page 14 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.

  • Page 15: Informations De Sécurité Pour Appareils De Mesure/Contrôle De Débit Massique

    Informations de sécurité pour appareils de mesure/contrôle de débit massique Informations de sécurité pour appareils de mesure/contrôle de débit massique Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non-respect des consignes.
  • Page 16 Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.

  • Page 17: Medidas De Seguridad Del Dispositivo De Flujo De Masa

    Si el cliente no cumple dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal alguna.
  • Page 18 No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.

  • Page 19: マスフロー機器の安全に関する情報

    マスフロー機器の安全に関する情報 マスフロー機器の安全に関する情報 本取扱説明書のマーク 本マニュアルでは警告、注意、ポイントのマークを⽤いて重要な事項を記載しています。 警告 この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法、条件など) をすると、⼈が重傷 を負う可能性が想定される内容を⽰しています。必ずお読みください。 注意 この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法など) をすると、 製品が損傷する 可能性が想定される内容を⽰しています。必ずお読みください。 ポイント この表⽰は⼿順や使⽤⽅法、条件などに関する重要な情報が記載されていることを⽰ しています。必ずお読みください。 本機器のマーク 以下の表では、本機器に使⽤されているマークについて説明いたします。 表 5: 本機器に使⽤されているマークについて オン (電源) オフ (電源) 接地 (アース) 保護接地 (アース) IEC 417, No. 5007 IEC 417, No. 5008 IEC 417, No. 5017 IEC 417, No.

  • Page 20: 安全対策について

    マスフロー機器の安全に関する情報 安全対策について 本機器を使⽤する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの 警告を無視すると、機器本来の⽤途の安全基準を侵害することになり、機器が提供する保護機能が 損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履⾏に対して は⼀切責任を負いかねます。 勝⼿に部品を変えたり、本体を改造しないこと 本機器に代⽤部品を使⽤したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。 修理は必ず専⾨の修理サービスを利⽤すること オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専⾨の修理サービスを利 ⽤してください。 電流が通じている回路から切断すること 電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態 でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切 断し、放電してください。 危険な材料を使⽤する場合は慎重に機器を使⽤すること 危険な材料を使⽤する場合は、使⽤者は各⾃の責任の元で適切な安全対策を講じてください。必要に応じて 本機器を浄化してください。また、使⽤する材料に対するシーリング材の耐久性を確認してください。 機器を浄化すること 本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使⽤した材料を完 全に取り除いてください。 浄化する場合は適切な⼿順で⾏うこと 本機器の浄化は換気フードの下で⾏う必要があります。また、浄化作業を⾏う⼈は必ず⼿袋を着⽤してください。 爆発の危険性のある環境で機器を使⽤しないこと 爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使⽤しないでください。ただし、そのような環境 での使⽤が特別に保証されている場合は除きます。 適切な⾦具類を使⽤し、⼿順に従って⾦具の締めを⾏うこと ⾦具類は本機器の仕様と⼀致し、機器本来の⽤途に適合したものである必要があります。⾦具類の取り付け や締めは、製造業者の指⽰に従ってください。 液体の漏れがないよう接続箇所を確認すること...
  • Page 21 マスフロー機器の安全に関する情報 安全なインレット圧⼒で使⽤すること 定格の最⼤圧⼒を超える圧⼒の下で本機器を絶対に使⽤しないでください (最⼤許容圧⼒については仕様書 を参照)。 適切なバーストディスクを取り付けること 圧⼒のかかったガスを使⽤する場合は、万⼀システムが爆発した場合にシステムの圧⼒が上昇するのを防ぐため、 真空システムに適切なバーストディスクを取り付けてください。 本機器に異物やゴミが混⼊しないようにすること 本機器の使⽤前または使⽤中に、ほこりやゴミ、繊維、ガラスの破⽚、⾦属⽚などの異物やゴミが混⼊しないよ うにしてください。本機器が損傷する可能性があります。 温度調整された機器を⼗分に温めてから使⽤すること 温度調整された機器が適切な作動温度にならないうちに使⽤すると、仕様通りの動作をしないことがあります。 本機器が⼗分に温まるまでは⽬盛りをゼロに合わせたり、較正しないでください。...

  • Page 23: 질량 유량 장치 안전 정보

    질량 유량 장치 안전 정보 질량 유량 장치 안전 정보 본 지침 매뉴얼에 사용되는 기호들 매뉴얼 전체에 사용되는 경고, 주의 및 참고 메시지의 정의. 경고 경고 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을 경우, 사람에게 상해를 입힐 수 있는 절차, 수행지침, 상태 또는 이와 유사한 상황들에...

  • Page 24: 안전 절차 및 예방조치

    어떠한 책임도 지지 않습니다. 부품을 교체하거나 기계를 개조하지 마십시오 교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가 필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and Service Center)로 보내주십시오. 자격이 있는 사람에게만 서비스를 받으십시오...
  • Page 25 질량 유량 장치 안전 정보 기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지 확인하십시오. 안전한 흡입 압력에서 작동하십시오 이 장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에 대해서는 제품 사양을 참조하십시오). 적합한 안전 파열판을 설치하십시오 가압...

  • Page 27: Chapter One: General Information

    These devices integrate thermal sensor technology together with a MKS real-time feedback control system providing typical flow control response times of 600 to 800 milliseconds with a normally closed valve. There are three device types in the G-Series MFC product line.

  • Page 28: How This Manual Is Organized

    Chapter One: General Information How This Manual is Organized Analog I/O is available via either a 9-pin D or 15-pin D. The 9-pin D option provides for setpoint I/O along with a valve override function. The 15-pin D option provides for setpoint I/O, valve override and the ability to control to an optional input.

  • Page 29: Customer Support

    A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is free of harmful materials. The Health and Safety form can be obtained on the last page of this manual or through the MKS website at: http://www.mksinst.com/service/servicehowtoorder.aspx.

  • Page 31: Chapter Two: Overview

    Flow system (whose flow is being controlled by the MFC.) The MFC provides the first three components. The mass flow transducer is a patented MKS thermal sensor design. The MFC instrument contains the electronics necessary for flow control and communications to the flow system host controller.

  • Page 32: How The Mfc Works

    Operation of the MFC with Gases other than Nitrogen The G-Series MFCs are unique in MKS flow control technology in that it they have pre-stored gas parameters that allow the user to easily configure the device for gases other than Nitrogen simply using a computer with a standard web-browser without the need for special software.
  • Page 33 Operation of the MFC with Gases other than Nitrogen Chapter Two: Overview When a gas other than the calibration gas is selected by the user, the MFC automatically pulls up the correct gas correction factor (GCF) to determine the flow of that gas with respect to the original N calibration.

  • Page 34: Chapter Three: Installation And Configuration

    If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.

  • Page 35: Product Location And Requirements

    10000 to 20000 sccm 15 to 40 psid  30000 to 50000 sccm 25 to 40 psid Valve configurations for low pressure drop applications are available. Please consult MKS for these situations. For additional information, refer to Appendix A, Product Specifications, page 79 Product Dimensions GE50A and GM50A –...

  • Page 36: Mounting Hardware

    Chapter Three: Installation and Configuration Mounting Hardware Serial Label Each MFC has one serial number label. Each label shows the serial number, the model code, the full scale flow range, and the calibration gas. The label is located on the MFC’s body below the pinout label on the device’s enclosure.
  • Page 37 Installation Procedure Chapter Three: Installation and Configuration 1. The MFC is prepared for cleanroom installation. Follow standard cleanroom practices to ensure a clean installation: - discard outer material outside of the cleanroom - remove the outer packaging in the gray area carry the MFC into the clean area then remove the inner bag and any protective fitting covers just prior to installation.
  • Page 38 Chapter Three: Installation and Configuration Installation Procedure When using Ethernet interface for setup, a crossover cable (similar to null modem) is required Note when the MFC is connected directly to a PC. When the MFC is on a network with a hub interface, a standard Ethernet cable should be used.

  • Page 39: Chapter Four: Analog And Digital Interfaces

    CB259S-5. Generic Shielded Cable Description MKS offers a full line of cables for most MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 40: Analog Interface Input And Output Options

    Chapter Four: Analog and Digital Interfaces Analog Interface Input and Output Options 5. In selecting the appropriate type and wire size for cables, consider:  Voltage ratings.  Cumulative I R heating of all the conductors (keep them safely cool). ...

  • Page 41: Table 9: Analog Interface Voltage I/O (0 To 5 Vdc) - 15 Pin D Male Pinouts - Model Code B

    The standard 15-pin MFC can control flow based on a 0 to 5 Volt signal from an external sensing device using the optional input feature (for a 0 to 10 Volt input range, contact the MKS Applications Department). A common application of this feature is for pressure control using input from a pressure transducer.
  • Page 42 Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.

  • Page 43: Digital Interface Input And Output Options

    Digital Interface Input and Output Options Chapter Four: Analog and Digital Interfaces Normal Setpoint operation occurs when Pin 1 is allowed to float. If the MFC is equipped with a 15-pin Type D connector:  To Open the valve by applying a +5 to +15 VDC to pin 4. ...

  • Page 44: Figure 3: Devicenet Top View

    Specification Volume I and Volume II [1, 2], and the SEMI Standards Common and Specific Device Models [3, 4]. Refer to those documents for a complete functional description of the MFC Mass Flow device along with the MKS G-Series MFC DeviceNet Supplement, 1046412-001. Please contact MKS for this document. Power Requirements The MFC requires an input voltage of 11 to 25 VDC with 500 mA max @ 11 VDC (230 mA @ 24 VDC,...

  • Page 45: Figure 4: Devicenet Baud Rate Switch

    Digital Interface Input and Output Options Chapter Four: Analog and Digital Interfaces DeviceNet Baud Rate and MAC ID Switches The baud rate and MAC ID (node address) for your device can be set through software commands using standard DeviceNet protocol over the network, or manually using the rotary switches located on the top panel of the device.
  • Page 46 5. When the device establishes communication with other devices on the network, the Network Status LED illuminates GREEN. If the power up LED sequence does not function properly, contact MKS for assistance. Note See Table 7: Network Status LED Indicators for more information on the operation of the Network Status LED and the Module Status LED.

  • Page 47: Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 4

    Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.

  • Page 48: Figure 6: Profibus Top View

    No Connection Profibus Controls and Indicators The MKS G-Series Profibus mass flow device contains several Profibus controls and indicators located on the top of the device enclosure. There are two switches which are used to set the Station Address and two standard bi-color (green/red) Profibus status LEDs, (Module Status LED and Network Status LED).

  • Page 49: Figure 7: Profibus Station Address Switches

    Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.

  • Page 50: Table 13: Digital Interface - Rs485 Using 9 Pin D - Model Code 5

    The MFC controller acts as a slave device on an RS485 multi-drop bus. It continually listens for transaction requests from the host controller, processes requests addressed to it, and sends replies as needed. For a complete description of this multi-drop protocol see the MKS Document MKS G-Series MFC, RS485 Supplement, 1046411-001. Please contact MKS for this document.

  • Page 51: Figure 8: Rs485 Top View

    Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.
  • Page 52 Chapter Four: Analog and Digital Interfaces Digital Interface Input and Output Options beginning the procedure.  Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up, etc.).  Device is powered at operating temperature, preferably for 30 or more minutes. ...
  • Page 53 Digital Interface Input and Output Options Chapter Four: Analog and Digital Interfaces...

  • Page 54: Chapter Five: Ethernet Interface Setup And Configuration

    OTHERWISE perform the following steps: 1. Download the (2) files listed below from the MKS website (www.mksinst.com/MDsw.html) by clicking on the link “MFC java plugin file for web access.” The MKS download includes an installation script to properly load the plug-in.

  • Page 55: Step 2: Setup Network For Communication Through Ethernet

    Step 2: Setup Network for Communication Chapter Five: Ethernet Interface through Ethernet Setup and Configuration 4. Read the license agreement, select “I accept...”, click “Next” to continue installation. 5. Select the “Typical” installation option and follow the prompts to install the Java plug-in. 6.
  • Page 56 Host IP address (x) is sent with the command, the script assigns its own subnet mask (255.0.0.0) and gateway (10.0.0.0). The MKS IP Address format is 192.168.2.X, so the Host IP Address must be of the same format. Note A recommended Host IP address is 192.168.1.Y with a Subnet Mask of 255.255.252.0, where Y is some number between 5 and 254.
  • Page 57 Step 2: Setup Network for Communication Chapter Five: Ethernet Interface through Ethernet Setup and Configuration To restore to a dynamic IP address, run the HostIP script with an argument of “auto” as shown below: These commands may also be entered directly in the “Run…” window. Instead of typing “command” simply type “c:/HostIP x y z”...
  • Page 58 Chapter Five: Ethernet Interface Step 2: Setup Network for Communication Setup and Configuration through Ethernet Option 2.2: From your computer’s “Start” menu, select “Settings” Network and Dialup Connections  Local Area Connections 3. Select Properties. 4. Select Internet Protocol (TCP/IP), then select Properties. 5.
  • Page 59 Step 2: Setup Network for Communication Chapter Five: Ethernet Interface through Ethernet Setup and Configuration Additional IP Addresses In the case that you need to be able to connect to more than one IP Address, simply click on the “Advanced” button at the bottom of the current window. Once the “Advanced TCP/IP Settings” window pops up, verify that you’re on the “IP Settings”...
  • Page 60 Chapter Five: Ethernet Interface Step 2: Setup Network for Communication Setup and Configuration through Ethernet 4. At the command prompt, enter the command “ipconfig /all” (as shown below) then press Enter. The data inside the highlighted area (lower section, between IP Address and Primary WINS Server) are what is needed for the steps below.
  • Page 61 Step 2: Setup Network for Communication Chapter Five: Ethernet Interface through Ethernet Setup and Configuration 7. Select Use the following IP address. Now do the following to configure your computer so that it can still connect to the Internet: o Type in the “IP address”, the “Subnet mask” and the “Default gateway” fields with values returned from the “ipconfig /all”...
  • Page 62 Chapter Five: Ethernet Interface Step 2: Setup Network for Communication Setup and Configuration through Ethernet 10. Verify you’re on the “IP Settings” tab and then do the following to configure your computer to talk to the MFC and any other devices with an IP address: o Click “Add…”...
  • Page 63 Step 2: Setup Network for Communication Chapter Five: Ethernet Interface through Ethernet Setup and Configuration 14. In the “WINS addresses, in order of use” section, click “Add…” Enter in the Primary WINS server address that was returned from the “ipconfig /all” query in the DOS command window, and click “Add.” If there were any alternate WINS servers listed in the DOS window, now enter them.

  • Page 64: Chapter Six: Embedded Web-Based Gui And Diagnostics

    Chapter Six: Embedded Web-Based GUI and Diagnostics Logging On to Your MFC Chapter Six: Embedded Web-Based GUI and Diagnostics Logging On to Your MFC Before trying to logon to your MFC you must have your network setup correctly. To do this, complete the steps listed in Chapter Three, Ethernet Interface Setup and Configuration, starting on page 44.

  • Page 65: Figure 9: Embedded Gui, Mfc Device Page In Monitor Mode

    Monitor Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Figure 9: Embedded GUI, MFC Device Page in Monitor Mode Plot Page – Monitor Mode This page, shown in Figure 10, enables you to plot and see real-time performance of the device. In Monitor Mode you are able to select variables to plot, the rate at which to display them, and save the data that has been plotted.

  • Page 66: Figure 10: Embedded Gui, Plot Page In Monitor Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Monitor Mode Figure 10: Embedded GUI, Plot Page in Monitor Mode Starting and Stopping the Plot program Below the Rate selection is the Start/Stop button for the plot program. You must click on this button to start the plot program and click on it a second time to stop the program.

  • Page 67: Figure 11: Embedded Gui, Configuration Page In Monitor Mode

    Monitor Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Rescaling X-Axis  entering a value next to where it says “X scale (seconds):” adjusts the number of seconds spanned across the X-Axis, e.g. entering a value of ten seconds sets the X-Axis so that it will show ten second segments at a time.

  • Page 68: Figure 12: Embedded Gui, Rs485 Comm Page In Monitor Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Monitor Mode RS485 Comm Page – Monitor Mode This page displays the Baud Rate and MacID settings for the RS485 MFC. In “Monitor Mode” you are able to view this information as well as change it. Figure 12, below, shows a screen capture of the Configuration Page in “Monitor Mode.”...

  • Page 69: Setup Mode

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode In “Setup Mode” the user is able to configure the MFC, i.e. zero the device, change the IP address, configure the operating pressure, etc. To enter this mode, while in “Monitor Mode”, go to the “Configuration Page” and enter the Factory-shipped password “config”...

  • Page 70: Figure 14: Embedded Gui, Device Page In Setup Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode Device Page – Setup Mode In “Setup Mode” this page gives you the ability to modify the gas settings. Figure 14: Embedded GUI, Device Page in Setup Mode Gas Settings: The Device Page enables the user to change the MFC’s gas settings. To change the gas settings review the following possible operations and go to the appropriate page.

  • Page 71: Figure 15: Embedded Gui, Creating A New Gas Instance

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics 4. This process typically takes under two minutes to complete. When the process is completed, the browser will display a green banner across the top of the Device Page that says, “Gas Selection Update SUCCEEDED.”...

  • Page 72: Figure 17: Embedded Gui, Plot Page In Setup Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode Plot Page – Setup Mode In “Setup Mode” this page enables the user to adjust the Operating Pressure setting to optimize control performance and plot and collect data. To learn more about how to tune the MFC to your system see page XX in the xxx section.

  • Page 73: Figure 18: Embedded Gui, Configuration Page In Setup Mode

    If you are unfamiliar with setting TCP/IP settings for the MFC, please contact your company’s IT personnel or local MKS representative for help. If settings are done incorrectly, you may no longer be able to connect to the MFC over Ethernet.
  • Page 74 Setup Mode Updating Firmware Updating firmware is the responsibility of your local MKS representative. If any updates are “necessary”, then your local representative will be in contact to set up a time to complete the upgrade. Please note that a “necessary”...

  • Page 75: Figure 19: Embedded Gui, Rs485 Comm Page In Setup Mode

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics RS485 Comm Page – Monitor Mode This page displays the Baud Rate and MacID settings for the RS485 MFC. In “Monitor Mode” you are able to view this information as well as change it. Figure 19, below, shows a screen capture of the Configuration Page in “Setup Mode.”...

  • Page 76: Figure 20: Embedded Gui, Diagnostics Page In Setup Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode Diagnostics Page – Setup Mode The Diagnostics Page consists of a few basic diagnostic tests. In this section the user is given the ability to run basic diagnostic tests on the flow and temperature. These tests can be run individually or all at once. These tests are explained in more detail below.
  • Page 77 Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics...

  • Page 78: Chapter Seven: Maintenance

    Any damage should be reported to the freight carrier and MKS Instruments immediately. If there is no obvious damage, and the unit fails to operate properly, obtain an RMA Number (Return Materials Authorization Number) before returning the unit to MKS Instruments for service to expedite handling and ensure proper servicing of your instrument.
  • Page 79  Via the protocol Zero Service.  For DeviceNet – Refer to “MKS G-Series MFC, Devicenet Supplement” 1046412-001.  For Profibus – Refer to “MKS G-Series MFC Profibus Supplement”, 1046413-001  For RS485 – Refer to “MKS G-Series MFC, RS485 Supplement”, 1046411-001.
  • Page 80 Chapter Seven: Maintenance Flow Zero Adjustment in executing. Service 0xE, Class 0x30, Instance 1, Service Data (attribute) 0x0B You should get response data of 0x04 3. Send the Zero Adjust Service using S-Analog Sensor Object Instance 1 ( Flow ) The following DeviceNet Command Starts the Pressure zero.
  • Page 81 Flow Zero Adjustment Chapter Seven: Maintenance This page intentionally left blank.

  • Page 83: Chapter Eight: Troubleshooting

    Troubleshooting Chart Chapter Eight: Troubleshooting Chapter Eight: Troubleshooting Troubleshooting Chart Table 15: Troubleshooting Chart Symptom Possible Cause Check/Corrective Action MFC LED does not light No power Check power source Low power Check supply voltage Wrong cable Check cable Bad cable connection Check pin(s) continuity MFC does not respond to Bad DNet connection...
  • Page 84 MFC. If flow present, possible clogged sensor MFC control circuit failure Run MFC diagnostics. If error results, contact MKS service center. MFC shows output flow > MFC valve full open Check valve current for maximum FS (overrange)
  • Page 85 MFC valve partial contamination Cycle-purge device, check valve setpoint @ higher flows, current but will not go to 0 Faulty control valve, adjustment Run MFC diagnostics, call MKS or electronics service center Inlet pressure too high Decrease inlet pressure Device zero offset...
  • Page 86 Check MFC active gas using digital correct gas - actual gas used interface or Ethernet GUI different MFC control parameters set Contact MKS service center incorrectly MFC output slow to Inlet pressure too low Increase inlet pressure respond to setpoint...
  • Page 87 Troubleshooting Chart Chapter Eight: Troubleshooting Critical Link Failure Failed communication device. The device has detected an error that has rendered it incapable of communicating on the network (Duplicate MAC ID, or Bus-off) Flashing Red Connection Time-Out One or more I/O Connections are in the Timed-Out state.
  • Page 88 Chapter Eight: Troubleshooting Troubleshooting Chart This page intentionally left blank.

  • Page 89: Appendix A: Product Specifications

    Appendix A: Product Specifications Performance Specifications – GE50A/GV50A/GM50A Appendix A: Product Specifications Performance Specifications – GE50A/GV50A/GM50A GE50A, GV50A – Elastomer Sealed GM50A – Metal Sealed Full Scale Flow (N2 equivalent) 10-50000 sccm 10-50000 sccm Maximum Inlet Pressure 150 psig, limited to maximum differential 150 psig, limited to maximum differential pressure across MFC.

  • Page 90: Electrical Specifications For Ge50A, Gm50A And Gv50A

    Specifications are subject to change without notice. Appendix A: Product Specifications Mechanical Specifications - GE50A/GV50A/GM50A Mechanical Specifications - GE50A/GV50A/GM50A GE50A, GV50A – Elastomer Sealed GM50A – Metal Sealed Fittings (compatible with) ¼” Swagelok, 4 VCR, 4 VCO ¼” Swagelok, 4 VCR, 1-1/2” surface mount (C-seal, W-seal) Leak Integrity External (scc/sec He)
  • Page 91 Appendix A: Product Specifications Electrical Specifications for GE50A, GM50A and GV50A Set/read flow rate Flow totalizer and run hours Valve soft start Monitor MFC status – valve drive level and trip points (alarm for high flow, alarm for low flow, warning for high flow, warning for low flow) Reset factory defaults Report run time hours Change user tags and device address...
  • Page 92 Electrical Specifications for GE50A, GM50A and Appendix A: Product Specifications GV50A reading from a MFC controller. Valve Drive Current - Host controller will use this message to get the valve drive current. Calibration Instance (Process Gas) Selection - Host controller will use this message to select which calibration instance is to be used for flow metering.
  • Page 93 Appendix A: Product Specifications Electrical Specifications for GE50A, GM50A and GV50A...

  • Page 94: Appendix B : Model Code Explanation For Ge50A & Gv50A

    Flow Range Full Scale Fittings Connector Type Seal Type Reserved For MKS Future Use Firmware Version Configuration Code (CCCCC) Type GE50A Elastomer Sealed Mass Flow Controller: CCCCC = GE50A Type GV50A Elastomer Sealed Mass Flow Controller with Integral Shut-off Valve: CCCCC = GV50A...
  • Page 95 Appendix B : Model Code Explanation for GE50A & Model Code Description – Elastomer Sealed Products GV50A Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride CCl4 Carbon Tetrafluoride (R-14) Carbonyl Sulfide Chlorine Chlorine Trifluoride ClF3 Chlorodifluoromethane (R-22) CHClF2 Chloroform (Trichloromethane) CHCl3 Chloropentafluoroethane (R-115) C2ClF5...
  • Page 96 Model Code Description – Elastomer Sealed Products Appendix B : Model Code Explanation for GE50A & GV50A Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide H2Se Hydrogen Sulfide Iodine Pentafluoride Isobutane C4H10 Isobutylene C4H8 Krypton Methane Methanol CH4O Methyl Acetylene C3H4 Methyl Bromide...
  • Page 97 Appendix B : Model Code Explanation for GE50A & Model Code Description – Elastomer Sealed Products GV50A Silicon Tetrachloride SiCl4 Silicon Tetrafluoride SiF4 Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfuryl Fluoride SO2F2 Tetrafluoroethane (R-134a) C2H2F4 Titanium Tetrachloride TiCl4 Toluene C7H8 Trans-Butene C4H8 Trichloroethane...
  • Page 98 Model Code Description – Elastomer Sealed Products Appendix B : Model Code Explanation for GE50A & GV50A Flow Range Full Range (FFF) The MFC’s mass flow full scale range is indicated by a three digit code. G-SERIES Ordering Mass Flow Rate Code(FFF) 10 sccm 20 sccm...
  • Page 99 Ordering Code Viton Buna-N Neoprene Reserved For MKS Future Use (S) Standard = 0 Firmware Version (VV) The firmware version options are designated by a two digit number code for all product I/O types. The versions specified below are the released firmware versions at the time of this manuals release.

  • Page 100: Appendix C: Model Code Explanation For Gm50A

    Fittings Connector Type Valve Type (Closed “M” for MFC; None “3” for MFM) Reserved For MKS Future Use Firmware Version Configuration Code (CCCCC) Type GM50A Metal Sealed Mass Flow Controller and Mass Flow Meter: CCCCC = GM50A Gas Code (GGG) Gas codes are in accordance with SEMI Guideline E52, Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers.
  • Page 101 Appendix C: Model Code Explanation for GM50A Model Code Description – GM50A – Metal Sealed Products Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride CCl4 Carbon Tetrafluoride (R-14) Carbonyl Sulfide Chlorine Chlorine Trifluoride ClF3 Chlorodifluoromethane (R-22) CHClF2 Chloroform (Trichloromethane) CHCl3 Chloropentafluoroethane (R-115) C2ClF5 Chlorotrifluoromethane (R-13)
  • Page 102 Model Code Description – GM50A – Metal Sealed Appendix C: Model Code Explanation for GM50A Products Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide H2Se Hydrogen Sulfide Iodine Pentafluoride Isobutane C4H10 Isobutylene C4H8 Krypton Methane Methanol CH4O Methyl Acetylene C3H4 Methyl Bromide CH3Br Methyl Chloride...
  • Page 103 Appendix C: Model Code Explanation for GM50A Model Code Description – GM50A – Metal Sealed Products Silicon Tetrachloride SiCl4 Silicon Tetrafluoride SiF4 Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfuryl Fluoride SO2F2 Tetrafluoroethane (R-134a) C2H2F4 Titanium Tetrachloride TiCl4 Toluene C7H8 Trans-Butene C4H8 Trichloroethane C2H3Cl3...
  • Page 104 Model Code Description – GM50A – Metal Sealed Appendix C: Model Code Explanation for GM50A Products Flow Range Full Range (FFF) The MFC’s mass flow full scale range is indicated by a three digit code. G-SERIES Ordering Mass Flow Rate Code(FFF) 10 sccm 20 sccm...
  • Page 105 Ordering Code Normally closed valve - MFC No valve - MFM Reserved For MKS Future Use (S) Standard = 0 Firmware Version (VV) The firmware version options are designated by a two digit number code for all product I/O types. The versions specified below are the released firmware versions at the time of this manuals release.

  • Page 106: Appendix D : Outline Drawings

    GE50A MFC and GM50A MFC/MFM Appendix D : Outline Drawings Appendix D : Outline Drawings GE50A MFC and GM50A MFC/MFM...
  • Page 107 Appendix D : Outline Drawings GE50A MFC and GM50A MFC/MFM...
  • Page 108 GE50A MFC and GM50A MFC/MFM Appendix D : Outline Drawings...

  • Page 109: Gv50A Mfc W/ Integral Shut-Off Valve

    Appendix D : Outline Drawings GV50A MFC w/ Integral Shut-off Valve GV50A MFC w/ Integral Shut-off Valve...
  • Page 110 Appendix D : Outline Drawings...
  • Page 111 Appendix D : Outline Drawings...

  • Page 112: Appendix D: Health And Safety Form

    Appendix D: Health and Safety Form Appendix D: Health and Safety Form...

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