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G Series
Instruction manual
MKS G Series Instruction Manual
Digital mass flow controller
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Table of Contents
List of References
Mass Flow Device Safety Information
Symbols Used in this Instruction Manual
Symbols Found on the Unit
Safety Procedures and Precautions
Table 1: Definition of Symbols Found on the Unit
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung Vorkommende Symbole
Erklärung der am Gerät Angebrachten Symbole
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique
Symboles Utilisés Dans Ce Manuel D'utilisation
Symboles Figurant Sur L'unité
Mesures de Sécurité Et Précautions
Tableau 3: Définition des Symboles Sur L'unité
Medidas de Seguridad del Dispositivo de Flujo de Masa
Símbolos Usados en Este Manual de Instrucciones
Símbolos Hallados en la Unidad
Procedimientos y Precauciones de Seguridad
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本機器のマーク
表 5: 本機器に使⽤されているマークについて
安全対策について
질량 유량 장치 안전 정보
본 지침 매뉴얼에 사용되는 기호들
장치에 표시된 기호들
표 6: 장치에 표시된 기호들의 정의
안전 절차 및 예방조치
Chapter One: General Information
Introduction
How this Manual Is Organized
Customer Support
Chapter Two: Overview
General Information
How the MFC Works
Operation of the MFC with Gases Other than Nitrogen
Chapter Three: Installation and Configuration
Unpacking
Product Location and Requirements
Product Dimensions
GE50A and GM50A - See Appendix C
GV50A - See Appendix D
Mounting Hardware
Installation Procedure
Figure 1: Serial Number Label (Sample)
Chapter Four: Analog and Digital Interfaces
Analog I/O Interface Cables
Table 7: MKS Interface Cables
Analog Interface Input and Output Options
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) - 9 Pin D Male Pinouts - Model Code a
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) - 15 Pin D Male Pinouts - Model Code B
Digital Interface Input and Output Options
Figure 2: Devicenet Connector Pin Diagram
Table 10: Digital Interface - Devicenet Connector Pinout - Model Code 6
Figure 3: Devicenet Top View
Table 11: Network (NET) Status LED Indicators
Figure 4: Devicenet Baud Rate Switch
Figure 5: Devicenet MAC ID Switches
Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 4
Figure 6: Profibus Top View
Table 12B: Profibus 9 Pin D Female Communications Connector - Model Code 4
Figure 7: Profibus Station Address Switches
Table 13: Digital Interface - RS485 Using 9 Pin D - Model Code 5
Table 14: RS485 Module Status LED Indicators
Figure 8: RS485 Top View
Chapter Five: Ethernet Interface Setup and Configuration
Step 1: Install the Java™ Plug-In (for Single IP Address)
Step 2: Setup Network for Communication through Ethernet
Chapter Six: Embedded Web-Based GUI and Diagnostics
Logging on to Your MFC
Monitor Mode
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode
Figure 10: Embedded GUI, Plot Page in Monitor Mode
Figure 11: Embedded GUI, Configuration Page in Monitor Mode
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode
Setup Mode
Figure 13: Setup Mode (Configuration Page)
Figure 14: Embedded GUI, Device Page in Setup Mode
Figure 15: Embedded GUI, Creating a New Gas Instance
Figure 16: Changing the Full Scale Flow Range
Figure 17: Embedded GUI, Plot Page in Setup Mode
Figure 18: Embedded GUI, Configuration Page in Setup Mode
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode
Chapter Seven: Maintenance
General Information
Recalibration
Flow Zero Adjustment
Chapter Eight: Troubleshooting
Troubleshooting Chart
Table 15: Troubleshooting Chart
Appendix A: Product Specifications
Performance Specifications - GE50A/GV50A/GM50A
Specifications Are Subject to Change Without Notice.mechanical Specifications - GE50A/GV50A/GM50A
Electrical Specifications for GE50A, GM50A and GV50A
Appendix B : Model Code Explanation for GE50A & GV50A
Model Code Description - Elastomer Sealed Products
Appendix C: Model Code Explanation for GM50A
Model Code Description - GM50A - Metal Sealed Products
Appendix D : Outline Drawings
GE50A MFC and GM50A MFC/MFM
GV50A MFC W/ Integral Shut-Off Valve
Appendix D: Health and Safety Form
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Chapter Three: Installation and Configuration
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1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual
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Ge50a
Gm50a
Gv50a
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