Related Manuals for MKS Mass-Flo 1500 Series
Summary of Contents for MKS Mass-Flo 1500 Series
- Page 1 114173-P1 Rev D, 9/96 Instruction Manual MKS Type 1500 Series ® Mass-Flo Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Page 2 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
- Page 3 114173-P1 Rev D, 9/96 MKS Type 1500 Series ® Mass-Flo Controller...
- Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents Safety Procedures and Precautions..................1 Chapter One: General Information..................5 Introduction ....................... 5 How This Manual is Organized.................. 6 Customer Support ...................... 7 Chapter Two: Installation ....................... 9 How To Unpack the 1500 Series Unit ................ 9 Environmental Requirements .................. - Page 6 Table of Contents Flow Path........................23 Measurement Technique.....................23 Control Circuitry ......................24 The Gas Correction Factor (GCF)................25 Chapter Six: Maintenance .......................27 Valve Adjustment.......................27 1559 Flow Controller..................29 1562 Flow Controller..................30 Repair ........................31 Chapter Seven: Troubleshooting .....................33 Troubleshooting Chart....................33 Appendix A: Product Specifications..................35 General Specifications....................35 Electrical Specifications .....................36 Mechanical Specifications ..................36 Appendix B: Type 558 Dimensions ..................37...
- Page 7 List of Figures and Tables List of Figures and Tables Figures Figure 1: 1500 Series Flow Controller Dimensions..............11 Figure 2: 1500 Series Flow Controller Mounting Holes............11 Figure 3: Standard Compression Fittings................12 Figure 4: Side View of the 1500 Series Flow Controller ............28 Figure 5: Type 558 Dimensions.....................
- Page 8 List of Figures and Tables...
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Page 9: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 10 Safety Procedures and Precautions PURGE THE INSTRUMENT After installing the unit, or before its removal from a system, be sure to purge the unit completely with a clean dry gas to eliminate all traces of the previously used flow material. DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion, do not operate this product in an explosive atmosphere unless it has been specifically certified for such operation.
- Page 11 Safety Procedures and Precautions Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
- Page 12 Safety Procedures and Precautions This page intentionally left blank.
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Page 13: Chapter One: General Information
The MKS 1500 Series Flow Meter/Controllers are designed for general, industrial, and process applications within a range of 20 to 200 slm (400 scfh). The flow meter/controllers offer excellent RFI protection, digital open/close valve commands, and a safety shutoff feature for set points under 0.2% of Full Scale. -
Page 14: How This Manual Is Organized
How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide instructions on how to set up and install 1500 Series Flow Meter/Controller instrument. Before installing your 1500 Series Flow Meter/Controller in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. -
Page 15: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and assures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, radioactive, corrosive, or toxic materials. - Page 16 Customer Support Chapter One: General Information This page intentionally left blank.
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Page 17: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. -
Page 18: Setup
Setup Chapter Two: Installation Setup Follow these guidelines when setting up a 1500 Series Flow instrument. 1. Place the Flow Meter/Controller where it will be connected to a gas supply and process chamber. 2. Mount the flow component into position. Mounting of flow components in other than the position in which they are calibrated (typically horizontal) will cause a small zero shift. -
Page 19: Figure 1: 1500 Series Flow Controller Dimensions
Chapter Two: Installation Setup 15-pin Type "D" Connector Controller Gain Zero Adjust Swagelok ® Fittings 5.31 in. (without nuts or ferrules) 0.750 in. 6.00 in. where x = 8.25 in. with ½ " Swagelok 8.62 in. with 8-VCR ® 8.31 in. with 8-VCO ® Figure 1: 1500 Series Flow Controller Dimensions 0.25 in. -
Page 20: Gas Line Connections
Gas Line Connections Chapter Two: Installation Gas Line Connections Standard Fittings ® Swagelok compression fittings (½ inch) are standard. To connect the fittings, follow the steps below. 1. Be sure the tubing is clean and free of axial scratches. 2. Insert the tubing through the compression nut and ferrules all the way to the shoulder. Refer to Figure 3. -
Page 21: Optional Fittings
Chapter Two: Installation Gas Line Connections Optional Fittings ® ® ® Cajon 8-VCR (male) and Cajon 8-VCO (male) fittings are available as options, when specified. Refer to the manufacturers’ specifications for installation information. Standard Materials ® Standard wetted materials are 316L SST and nickel with Viton seals. - Page 22 Gas Line Connections Chapter Two: Installation This page intentionally left blank.
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Page 23: Chapter Three: Overview
Chapter Three: Overview 1500 Series Mass-Flo Meter/Controllers Chapter Three: Overview 1500 Series Mass-Flo Meter/Controllers The Mass-Flo Meter and Controller 1500 Series of instruments are designed to provide accurate and repeatable control of gas flow. These Flow Meters and Controllers measure flow by measuring the power required to maintain a pre-established temperature profile along a laminar flow sensor tube. -
Page 24: Electrical Connections
Electrical Connections Chapter Three: Overview Electrical Connections For use of the Flow Meter/Controller Series instruments with other equipment (for example, a power supply/readout unit), consult the manufacturers' specifications for connection, and for proper electrical and power characteristics. Refer to Appendix A: Product Specifications, page 35, for electrical requirements of the 1500 Series Flow instruments. -
Page 25: Valve Drive/Test Point
Chapter Three: Overview Interface Cables Note The 0 to 5 VDC flow signal output comes from pin 2 and is referenced to pin 12 which is signal common. Any appropriate 0 to 5 VDC input signal of less than 20K ohm source impedance referenced to pin 12 can be used to supply a set point signal to pin 8. - Page 26 Interface Cables Chapter Three: Overview This page intentionally left blank.
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Page 27: Chapter Four: Operation
Chapter Four: Operation Warm Up and Start Up Chapter Four: Operation Warm Up and Start Up To put the Flow Controller Series instrument into operation, follow the steps below. 1. Leak test the fittings on the Flow Meter/Controller instrument using standard leak test procedures. - Page 28 A. If the output reading does not return to zero within a minute or so, a leak is indicated. Check all connections. If the leak is in the Flow Meter/Controller instrument, contact MKS for service. Refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.
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Page 29: Set Point Command
Chapter Four: Operation Set Point Command Set Point Command The 1500 Series of Flow instruments use an analog set point input to provide smart features that otherwise would require separate signal lines and associated output control devices. A set point command signal greater than 10 mV is required for the flow controller to generate an output. - Page 30 Valve Override Chapter Four: Operation This page intentionally left blank.
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Page 31: Chapter Five: Theory Of Operation
The amount of energy required to maintain a fixed temperature profile along a tube through which laminar flow is occurring is a function of mass-flow rate. In the MKS Flow Meter/Controller, resistance heaters are wound on the sensor tube and form the active legs of bridge circuits. -
Page 32: Control Circuitry
Control Circuitry Chapter Five: Theory of Operation Control Circuitry The 1500 Series flow controllers use the above measurement technique and include a control circuit which provides a drive current for the proportioning control valve. The flow controllers accept a 0 to 5 VDC set point signal, compare it to their own flow signal, and generate an error voltage. -
Page 33: The Gas Correction Factor (Gcf)
Refer to Appendix C: Gas Correction Factors, page 39, for commonly used gases. Note 1. When using the GCF, the accuracy of the flow reading may vary by ± 5%, however, the repeatability will remain ± 0.2% of F.S. 2. All MKS readouts have Gas Correction Controls to provide direct readout. - Page 34 The Gas Correction Factor (GCF) Chapter Five: Theory of Operation This page intentionally left blank.
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Page 35: Chapter Six: Maintenance
OSHA or NIOSH, or experts familiar with your process gas. MKS assumes no liability for safe handling of toxic or hazardous gases. All valves are 100% leak-checked at the factory prior to shipment. Should unacceptable leakage occur as a result of different operating conditions or normal wear, follow the instructions in the next two sections (depending on the controller type) to adjust the valve. -
Page 36: Figure 4: Side View Of The 1500 Series Flow Controller
Valve Adjustment Chapter Six: Maintenance Unit Span (Factory Adjust Only) Coil Nut Valve Connector Inner Shaft Assembly Socket Head Screw (4 places) Control Valve Serial Number Fitting 1.50 in. Figure 4: Side View of the 1500 Series Flow Controller... -
Page 37: 1559 Flow Controller
8. Following the warm up period, test the flow controller to ensure that full scale can be reached. A. If full scale flow cannot be reached, repeat steps 1 through 7. B. If leakage cannot be corrected with this adjustment procedure, return the unit to MKS for servicing. -
Page 38: 1562 Flow Controller
8. Following the warm up period, test the Flow Controller to ensure that full scale can be reached. A. If full scale flow cannot be reached, repeat steps 1 through 7. B. If leakage cannot be corrected with this adjustment procedure, return the unit to MKS for servicing. -
Page 39: Repair
Repair Should any difficulties be encountered in the use of your instrument, it is recommended that you contact any authorized MKS Sales Office or Calibration and Service Center for repair. Note If it is necessary to return the instrument to MKS for repair, please... - Page 40 Repair Chapter Six: Maintenance This page intentionally left blank.
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Page 41: Chapter Seven: Troubleshooting
Chapter Seven: Troubleshooting Troubleshooting Chart Chapter Seven: Troubleshooting Troubleshooting Chart Troubleshooting Chart Symptoms Possible Cause Remedy Over-range at zero (after Flow is on and above meter Isolate Flow instrument warm-up) range Electronics malfunctioning Return for service No output, or over-range at Improper cable Check cable for type zero (after warm-up) - Page 42 Troubleshooting Chart Chapter Seven: Troubleshooting Troubleshooting Chart (Continued) Symptoms Possible Cause Remedy Oscillation Too high a controller gain Reduce (turn counter- setting clockwise) Incorrect upstream pressure Check manufacturers' regulator specifications Upstream pressure too high Reduce upstream pressure Amplifier not handling Install 150 to 1000 ohm capacitance loads resistor in series with set...
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Page 43: Appendix A: Product Specifications
Appendix A: Product Specifications General Specifications Appendix A: Product Specifications General Specifications CE Mark Compliance EMC Directive 89/336/EEC Full Scale Ranges (nitrogen equivalent) 20, 50, 100, 200 slm Control Range (controllers only) 1.0 to 100% of F.S. Accuracy ±1.0% of F.S. Repeatability ±0.2% of Rdg. -
Page 44: Electrical Specifications
Electrical Specifications Appendix A: Product Specifications Electrical Specifications Input Voltage/Current Required Max. at start up (first 5 sec) ±15 VDC (±5%) @ 300 mA (558 meter) ±15 VDC (±5%) @ 450 mA (1559/1562 controllers) ±15 VDC @ 200 mA (558 meter) Typical at steady state ±15 VDC @ 350 mA (1559/1562 controllers) Set point Command Signal (controllers only) -
Page 45: Appendix B: Type 558 Dimensions
Appendix B: Type 558 Dimensions Dimensions Appendix B: Type 558 Dimensions Dimensions 15-pin Type "D" Connector Zero Adjust Swagelok Fittings (without nuts or ferrules) 5.31 in. 0.750 in. 4.50 in. where x = 6.75 in. with Swagelok 7.12 in. with 8-VCR 6.81 in. - Page 46 Dimensions Appendix B: Type 558 Dimensions This page intentionally left blank.
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Page 47: Appendix C: Gas Correction Factors
Appendix C: Gas Correction Factors Gas Correction Factor Table Appendix C: Gas Correction Factors Gas Correction Factor Table SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR - - - 0.240 1.293 1.00 Ammonia 0.492 0.760 0.73... - Page 48 Gas Correction Factor Table Appendix C: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorosilane 0.150 4.506 0.40 1,2-Dichlorotetrafluoroethane 0.160 7.626 0.22 (Freon - 114) 1,1-Difluoroethylene 0.224 2.857 0.43 (Freon - 1132A) 2,2-Dimethylpropane 0.3914 3.219...
- Page 49 Appendix C: Gas Correction Factors Gas Correction Factor Table SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Hydrogen Chloride 0.1912 1.627 1.00 Hydrogen Fluoride 0.3479 0.893 1.00 Isobutylene 0.3701 2.503 0.29 Krypton 0.0593 3.739 1.543 Methane...
- Page 50 0.161 8.360 0.20 (Freon - 113) Tungsten Hexafluoride 0.0810 13.28 0.25 Xenon 0.0378 5.858 1.32 Empirically defined Consult MKS Instruments, Inc. for special applications. NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia). Standard Temperature is defined as 0...
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Page 51: Index
Index Index Accuracy, 5, 35 Optional input, 17 Cables, 17 Pinout, 16 CE Mark, 17, 35 Power, 9, 19, 36 Connector, 16, 36 Control circuitry, 24 Repair, 31 Control valve, 15, 29–30 Returning the product, 7 Customer support, 7 Safety procedures and precautions, 1–2 Dimensions, 11 Seals, 13, 36 Set point, 17, 21, 24... - Page 52 Index Warm-up, 9, 19 Zero, 19...
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