MKS PDR 2000 Instruction Manual
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MKS PDR 2000 Instruction Manual

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Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
MKS Type PDR 2000
Dual Capacitance Diaphragm
Gauge Controller
129097-P1
Rev A, 04/01
Instruction Manual
Fax: (978) 975-0093
mks@mksinst.com
E-mail:
http://www.mksinst.com
Web site:

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  • Page 1 129097-P1 Rev A, 04/01 Instruction Manual MKS Type PDR 2000 Dual Capacitance Diaphragm Gauge Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 mks@mksinst.com E-mail: (800) 227-8766 or (978) 975-2350 http://www.mksinst.com Web site:...
  • Page 2 W ARR ANTY Type PDR 2000 Equipment MKS Instrum ents, Inc. (M KS) warrants that for two years from the date of shipm ent the equipm ent described above (the “equipm ent”) m anuf actured by M KS shall be...
  • Page 3 MKS Type PDR 2000 Dual Capacitance Diaphragm Gauge Controller...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 5: Table Of Contents

    Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit.................... 2 Safety Procedures and Precautions ................3 Sicherheitshinweise für den Druckmeßumformer ..............5 In dieser Betriebsanleitung vorkommende Symbole............5 Erklärung der am Gerät angebrachten Symbole ............
  • Page 7 Table of Contents Chapter Two: Installation......................25 How To Unpack the PDR 2000 Controller ..............25 Unpacking Checklist ..................25 Mounting the Controller....................26 Selecting the CDG......................26 Connecting the CDG ...................... 26 Attaching the CDG Cable ....................26 Making Accessory Connections................ 29 Checking Supply Voltage .................
  • Page 8 Chapter Four: Maintenance and Troubleshooting ..............42 Changing Fuses ......................42 Schematic Diagrams....................... 42 Trouble Shooting......................42 Index............................44...
  • Page 9 Figure 1: Model PDR 2000 Front View..................22 Figure 2: Model PDR 2000 Rear View..................23 Figure 3: Model PDR 2000 Dimensions ..................23 Figure 4: Model PDR 2000 Sensor Connector – 9 Pin Female D-Sub Connector ......28 Figure 5: RS-232 I/O; Analog Out; Relays ..................30 Tables Table 1: Definition of Symbols Found on the Unit .................1...

  • Page 10: Safety Information

    Safety information Symbols used in This Instructions manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 11: Symbols Found On The Unit

    Safety information Symbols used in This Instructions manual Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008...

  • Page 12: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 14 USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual USE THE PROPER FUSE Use only a fuse of the correct type, voltage rating, and current rating, as specified for your product DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES...

  • Page 15: In Dieser Betriebsanleitung Vorkommende Symbole

    Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahrenquelle hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
  • Page 16 Sicherheitsinweise Am Gerät angebrachte Symbole Erkärung der Am Gerät angebrachte Symbole Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät angebracht sind. Definitionen der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzleiter IEC 417, Nr. 5007 IEC 417, Nr.

  • Page 17: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Keine Teile austauschen und keine Veränderungen vornehmen! Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an einen MKS- Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daß alle Sicherheitseinrichtungen voll funktionsfähig bleiben.
  • Page 18 Sicherheitsvorschriften und VorsichtsmaBnahmen sicherheitshinweise Erdung und Verwendung geeigneter elektrischer Armaturen! In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden. Richtiges Netzkabel verwenden! Das verwendete Netzkabel muß...

  • Page 19: Informations Relatives À La Sécurité

    Informations relatives à la sécurité Pour le trangdueteur de pression Symboles utilisés dans ce manuel d’utilisation Définition des indications AVERTISSEMENT, ATTENTION et REMARQUE utilisées dans ce manuel. Avertissement L’indication AVERTISSEMENT signale un danger potentiel. Elle est destinée à attirer l’attention sur une procédure, une utilisation, une situation ou toute autre chose présentant un risque de blessure en cas d’exécution incorrecte ou de non- respect des consignes.
  • Page 20 Informations relatives à la sécurité Symboles apparaissant sur l’ appareil Symboles apparaissant sur l’appareil Le tableau suivant décrit les symboles apparaissant sur l’appareil. Définition des symboles apparaissant sur l’appareil Terre de protection Marche (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.

  • Page 21: Mesures De Sécurité Et Mises En Garde

    NE PAS SUBSTITUER DES PIÈCES OU MODIFIER L’APPAREIL Ne pas utiliser de pièces détachées autres que celles vendues par MKS Instruments, Inc. ou modifier l’appareil sans l’autorisation préalable de MKS Instruments, Inc. Renvoyer l’appareil à un centre d’étalonnage et de dépannage MKS pour tout dépannage ou réparation afin de s’assurer que tous les...
  • Page 22 Mesures de sécurité et mises en garde Informations relatives à la sécurité UTILISATION D’UN CORDON D’ALIMENTATION APPROPRIÉ Utiliser uniquement un cordon d’alimentation en bon état et conforme aux exigences de puissance d’entrée spécifiées dans le manuel. Utiliser uniquement un cordon d’alimentation amovible avec des conducteurs dont la section est égale ou supérieure à...

  • Page 23: Informatión Sobre Seguridad

    Información sobre seguridad Símbolos usados en el manual de instrucciones Definiciones de los mensajes de ADVERTENCIA, PRECAUCIÓN Y OBSERVACIÓN usados en el manual. Advertencia El símbolo de ADVERTENCIA indica un riesgo. Pone de relieve un procedimiento, práctica, condición, etc., que, de no realizarse u observarse correctamente, podría causar lesiones a los empleados.
  • Page 24 Información sobre seguridad Símbolos gue aparecen en la unidad Símbolos que aparecen en la unidad En la tabla que figura a continuación se indican los símbolos que aparecen en la unidad. Definición de los símbolos que aparecen en la unidad Encendido Apagado (alimentación eléctrica)
  • Page 25 No se debe instalar piezas que no sean originales ni modificar el instrumento sin autorización. Para garantizar que las prestaciones de seguridad se observen en todo momento, enviar el instrumento al Centro de servicio y calibración de MKS cuando sea necesaria su reparación y servicio de mantenimiento.

  • Page 26: Additional Safety Information

    Información sobre seguridad USAR EL CABLE ELÉCTRICO ADECUADO Usar únicamente un cable eléctrico que se encuentre en buenas condiciones y que cumpla los requisitos de alimentación de entrada indicados en el manual. Usar únicamente un cable desmontable instalado con conductores que tengan un área de sección transversal equivalente o superior a 0,75mm².
  • Page 27 Please Let Us Know... MKS Instruments products are the most advance instruments of their type available from any manufacturer. We have made this Instruction Manual as complete and clear as possible. Let us know if you have any comments that can make this manual or our products more useful.

  • Page 28: Chapter One: General Information

    $15 volts at up to 0.75 amp; this is sufficient to operate most heated capacitance diaphragm gauges. The PDR 2000 precisely measures the 0 to 10 volt signal from the CDG to determine pressure. The Model PDR 2000 controller covers full scale ranges from 20 mTorr to 10,000 Torr.

  • Page 29: Controls And Indicators

    +15 at 0.75 amp and –15 volts at 0.75 amp; sufficient to operate temperature-controlled gauges • Mounting The PDR 2000 may be used as a bench-top instrument or it may be mounted in an instrument panel. Clips are provided for panel mounting. •...
  • Page 30 Chapter One: General Information Introduction This button allows the user to select either of the two gauges that are shown on the digital display. • SELECT Button This button allows the user to select parameters to be adjusted, e.g. Set Points. •...

  • Page 31: Figure 1: Model Pdr 2000 Front View

    Figure 1: Model PDR 2000 Front View...

  • Page 32: Figure 2: Model Pdr 2000 Rear View

    Chapter One: General Information Introduction Figure 2: Model PDR 2000 Rear View Figure 3: Model PDR 2000 Dimensions...

  • Page 33: How This Manual Is Organized

    How This Manual is Organized This manual is designed to provide instructions on how to set up, install, and operate a Type PDR 2000 unit. Before installing your Type PDR 2000 unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual.

  • Page 34: Customer Support

    3. Use the original packaging if it is available. 4. If the MKS Instruments PDR 2000 was shipped with a cable and/or CDG sensor, diagnosis and repair will be more efficient if all components are returned together. If this is not convenient, please consult with your MKS Instruments Customer Service Representative 5.

  • Page 35: Chapter Two: Installation

    How To Unpack the PDR 2000 Controller MKS has carefully packed the Type PDR 2000 unit to reach you in perfect operating order. On receiving the unit, however, you should check for defects, cracks, broken connectors, etc., making sure that the Type PDR 2000 was not damaged during shipment.

  • Page 36: Mounting The Controller

    Attaching the CDG Cable The CDG cable has a 9-pin D-sub connector on one end, which plugs into the PDR 2000. There are a variety of conventions for connection to the CDG. You may assemble or modify the cable to adapt to the CDG as needed.

  • Page 37: Figure 4: Model Pdr 2000 Sensor Connector - 9 Pin Female D-Sub Connector

    The following information allows you to make modifications to the cable as needed to interface with your CDG. Refer to the above figure. This shows the 9-pin connector, which is on the rear panel of the PDR 2000. This connector has female sockets; the mating connector on the CDG cable must have male pins.
  • Page 38 Black/shield Tube#2,Pins5/Pwr.Comm & none Table 3: PDR 2000 9-Pin ‘D’ - MKS Baratron 5-Pin Phoenix Connections Current available for +15 volts from pins 4 and 5 and for –15 volts from pins 6 and 7 is internally protected and limited to approximately 0.75 amp total for each supply. For example, this allows CDG#1 and CDG#2 to draw 0.375 amp each;...

  • Page 39: Making Accessory Connections

    Making Accessory Connections The 15-pin D-sub Accessory Connector is on the rear panel of the PDR 2000. The connector has female pins. The mating connector must have male pins. Mating D-sub 15 connectors are available from many of the normal electronic sources. If you need help identifying a source, please contact us.

  • Page 40: Checking Supply Voltage

    The Model PDR 2000 incorporates a universal power supply. This allow the PDR 2000 to operate on any input voltage from 90 VAC to 265 VAC, 47 to 65 Hz. Attaching the Power Cord Plug the power cord into the receptacle in the power module on the rear of the PDR 2000.

  • Page 41: Chapter 3: Operation

    6. display shows software version, e.g. 1.10 The PDR 2000 will go into normal operation and begin measuring pressure. If the CDG is not connected, the display will show OFF. If the system pressure is greater than 10.00 ktorr, the display will show OFF.

  • Page 42: Description Of Parameter Selection And Adjustment

    SET PT 1 HIGH operates in conjunction with SET PT 1 LOW. While the PDR 2000 is in this mode, the set point may be assigned to either...

  • Page 44: Set Pt 2 High

    Set Pt 2 High Default Value: OFF This operates in the same manner as SET PT 1 HIGH, described above. Set Pt 2 Low Default Value: OFF This operates in the same manner as SET PT 1 LOW, described above. Units mTorr/Torr/kTorr—Bar/mBar/microBar—Pascal/kPascal—Arb Default Value: Torr This allows selection of the units to be used in display of the pressure.

  • Page 45: Zero

    0.01 torr, or 10 torr. Adjust the zero adjustment on the CDG (usually a trimpot) until the PDR 2000 display shows a value close to zero. After this initial adjustment, the display may be conveniently set to zero using front panel...

  • Page 46: Reset Of Stored (Default) Values

    Pressure display and ranging are automatic in the PDR 2000. Most readings will take place between zero pressure and the full scale of the PDR 2000. Table 5 that follows, will help explain the operation. PDR 2000 Ranges: Sensor, High, Low, Set Points...

  • Page 47: Analog Output

    X.XX mtorr XX.X mtorr 0.01 mtorr 0.1 mtorr 0.04 mtorr 19.9 mtorr Table 5: PDR 2000 Ranges: Sensor, High, Low, Set Points • Note From 100% of full scale to approximately 105% of full scale, the display will flash. •...

  • Page 48: Serial Interface

    Pin 8 is Rx (signal from the terminal to the PDR 2000) • Pin 9 is return (ground). The serial port allows reading pressure and other parameters of the PDR 2000; it is not possible to modify stored parameters over the serial port.

  • Page 49: The Commands Used In The Pdr 2000

    The Commands Used in the PDR 2000: Pressure To read the pressure of both gauges: Send “p” (ASCII value 112); the PDR 2000 sends pressure for gauge 1 and gauge 2 to the terminal. The output is in the format: ABCDeE FGHIeJ Where: •...

  • Page 50: Full Scale Of The Gauges

    Full Scale Of the Gauges To read the full scale range selected during set up for each gauge: Send “f” (ASCII value 102); the PDR 2000 returns full scale, which the user has selected for each gauge in the format:...

  • Page 51: Set Point #1

    Set Point #2 To read the setting and status of set point #2: Send “2” (ASCII value 50); the PDR 2000 returns information for set point #2 in the same format as for set point #1, above. Model and Software Revision To read the software identification: Send “v”...

  • Page 52: Changing Fuses

    If the self-test fails, run the self-test again by turning the power off and then on again. If it fails again, call MKS Instruments. If fuses burn out, check to see that the proper voltage has been supplied to the power input module.

  • Page 53: Index

    The PDR 2000 will protect itself if it finds excessive power draw again. • It is normal for the PDR 2000 to feel warm to touch along the left side of the case. This is especially true when operating heated CDGs because of the greater power they require.
  • Page 54 Front Panel Controls, 31 Returning the product, 18 How To Unpack the PDR 2000 Controller, 25 Safety procedures and precautions, 3–4 Selecting the CDG, 26 Making Accessory Connections, 29 Sequence After Power Being Turned On, 31 Manual organization, 23 Specifications, 18...

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