MKS 1150C Instruction Manual
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MKS 1150C Instruction Manual

Mass flow controller
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MKS 1150C Instruction Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 112760-P1 Rev C, 3/98 Instruction Manual MKS Type 1150C Mass Flow Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
  • Page 4 112760-P1 Rev C, 3/98 MKS Type 1150C Mass Flow Controller Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 6: Table Of Contents

    Table of Contents Table of Contents Mass Flow Controller Safety Information................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction ....................... 5 How This Manual is Organized..................
  • Page 7 To Display the Output in SCCM..............25 Cautionary Notes......................27 Note 1: Customer Supplied Display Equipment ..........27 Note 2: MKS Supplied Power Supply/Display Equipment ......27 Note 3: Set Point Command................27 Note 4: Overrange Condition ................27 How To Calibrate the 1150 MFC ................28 Chapter Five: Troubleshooting....................29...
  • Page 8 List of Figures and Tables List of Figures and Tables Figures Figure 1: Recommended Installation for the 1150 MFC ............8 Figure 2: Top View of the 1150 Unit..................9 Figure 3: Back View of the 1150 Unit ................... 9 Figure 4: Side View of the 1150 Unit ..................
  • Page 9 List of Figures and Tables Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 10: Mass Flow Controller Safety Information

    Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 11: Symbols Found On The Unit

    Symbols Found on the Unit Mass Flow Controller Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5019 IEC 417, No.5008...

  • Page 12: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 13 Safety Procedures and Precautions Mass Flow Controller Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).

  • Page 14: Chapter One: General Information

    Chapter One: General Information Introduction The MKS Type 1150C Mass Flow Controller (MFC) is designed for precise and repeatable mass flow control of most low vapor pressure liquid or solid source materials into low pressure processes such as Low Pressure Chemical Vapor Deposition (LPCVD), Metal Organic Molecular Beam Epitaxy (MOMBE), and others.

  • Page 15: How This Manual Is Organized

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 16: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 1150 Unit MKS has carefully packed the Type 1150 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 17: Unpacking Checklist

    • Type 1150 Unit • Type 1150 Instruction Manual (this book) Optional Equipment: • Electrical Connector Accessories Kit: 1150C-K1 • Interface cables; refer to Interface Cables, page 15, for information Product Location and Requirements Operating Environmental Requirements • Ambient Operating Temperature: 0° to 50° C (32° to 122° F) •...

  • Page 18: Setup

    Chapter Two: Installation Setup Setup The 1150 MFC is bag packaged in a clean room environment. Keep the unit bagged prior to ® ® installation. The 1150 MFC is supplied with Swagelok 8-VCR type male fittings. It is important to protect the fitting seal surfaces since damaged seal surfaces may leak. Always follow the manufacturer’s recommended installation instructions.

  • Page 19: Mounting The 1150 Unit

    Setup Chapter Two: Installation J15 Connector Connector Figure 4: Side View of the 1150 Unit Mounting the 1150 Unit The 1150 unit has four mounting holes in its base plate as shown in Figure 5. The centers of these slots form a rectangle 8.75 inches long by 2.62 inches wide. Mounting Holes Mounting Holes Figure 5: Location of the Mounting Holes...

  • Page 20: Mechanical Installation

    Chapter Two: Installation Setup Mechanical Installation Source Feed Line Temperature It is critically important for consistent system operation that the source feed lines be adequately heated and insulated. Remember, the coolest point in the system must be the source. The up- and down-stream shutoff valves must also be heated and insulated, since they are integral parts of the feed lines.
  • Page 21 Setup Chapter Two: Installation Source Feed Lines - Conductance To minimize vapor condensation and to ensure that the 1150 unit will operate at full rated flow, use the largest possible I.D. piping. The 1150 unit is equipped with 8-VCR type male fittings to be used with ½...

  • Page 22: Electrical Installation

    The 1150 unit requires two ±15 VDC power supplies. One provides power to the heater and the other provides power to the Baratron pressure transducer and valve control circuitry. We recommend the MKS 260PS-1 (MKS 260PS-3 for the high temperature option) combined with the MKS 246 (Single Channel Power Supply/Readout). The current drawn from the 260PS-1/260PS-3 supply is directly related to the selected operating temperature.

  • Page 23: Table 3: Signal (J15) Connector Pinout

    Electrical Installation Chapter Two: Installation Signal Connector The Signal Conditioner connector (J15) is a 15-pin male Type “D” connector. This connector contains the set point input, valve test point, and manual valve position pins. Signal (J15) Connector Pinout Pin Number Assignment Valve Test Point Flow Signal Output...

  • Page 24: Interface Cables

    For a Flow System Using All MKS Equipment When you purchase a complete mass flow control system, specifying all companion MKS equipment at the time of purchase, MKS will provide the appropriate cable(s) in standard lengths for a nominal cost.

  • Page 25: Generic Shielded Cable Guidelines

    Interface Cables Chapter Two: Installation Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2.

  • Page 26: Chapter Three: Overview

    Changing the Range of the 1150 Unit MKS does not recommend that the Full Scale range of the instrument be changed in the field. This procedure requires disassembly of the instrument and may require replacement of the pressure transducer, and/or changing the nozzle size.

  • Page 27: Calibration

    Calibration Chapter Three: Overview Calibration Each 1150 MFC is calibrated before shipment for the range and temperature marked on the identification tag. Power is applied to the internal heater circuit of the instrument, and it is allowed to stabilize at its operating temperature. The pressure transducer is checked for linearity and repeatability, and adjusted as necessary.

  • Page 28: Analog Interface Signals

    Chapter Three: Overview Analog Interface Signals Analog Interface Signals The 1150 MFC uses the analog set point input to provide “smart” features that otherwise would require separate signal lines and associated output control devices. 1. When the set point input is less than +10 mV the valve will be driven fully closed. This condition is similar to pulling the “CLOSE”...
  • Page 29 Analog Interface Signals Chapter Three: Overview This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 30: Chapter Four: Operation

    OSHA or NIOSH, or experts familiar with your process gas. MKS assumes no liability for safe handling of toxic or hazardous gases. Warning Read and follow all safety messages listed in Mass Flow Controller Safety Information, page 1, BEFORE attempting to operate the 1150 unit.

  • Page 31: How To Set The Temperature

    Note The 1150 MFC is calibrated at a temperature specified at the time the unit was ordered. If the operating temperature must change, contact the MKS Applications group for a new set of calibration data. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 32: Temperature Indications

    4 to 5 hours to reach control temperature. Check zero periodically to ensure maximum accuracy. Note MKS recommends that the instrument be powered at all times. Continuous power to the unit eliminates the need to allow 4 to 5 hours for the unit to reach the operating temperature.

  • Page 33: How To Zero The 1150 Mfc

    Minor deviations in process pressure are allowable, however, any large deviation will result in the inability to zero the instrument. In such cases, contact MKS for assistance. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 34: How To Configure The Output

    Note To configure a readout device without a gauge factor adjustment, to display sccm, an input divider may be used. Please note that MKS Types 112, 147, 246, and 247 have a gauge factor adjustment. Gauge Factor Effect on the Display Range...

  • Page 35: Table 7: Gauge Factor Effect On The Display Range

    How To Configure the Output Chapter Four: Operation Full Scale Flow Rate Gauge Factor Pot Range Full Scale Display Range 1.000 - 1.999 1.00 - 1.99 1.000 - 1.999 2.00 - 9.99 0.20 - 0.99 2.00 - 9.99 10.00 - 19.9 1.00 - 1.99 10.00 - 19.99 20.0 - 99.9...

  • Page 36: Cautionary Notes

    Note 2: MKS Supplied Power Supply/Display Equipment When the 1150 MFC is used with an MKS Type 147, 246, or 247C, Note 1 does not apply. The 147, 246, or 247C takes the flow signal from the 1150 MFC, zeroes it with the front panel zero pot, and sends it back to the controller section of the 1150 unit on pin 10 of the Signal (J15) connector.

  • Page 37: How To Calibrate The 1150 Mfc

    5. Apply a set point of 5.000 VDC to the instrument, at pin 8 of the Signal (J15) connector, and measure the flow of nitrogen through the instrument as indicated on the flow standard (MKS type 258, for example). 6. Adjust the SPAN potentiometer so that the indicated flow of the flow standard is the same as the “Actual Nitrogen Flow”...

  • Page 38: Chapter Five: Troubleshooting

    Chapter Five: Troubleshooting General Information Chapter Five: Troubleshooting General Information The 1150 MFC is optimized at the factory for specific application parameters. Consult the MKS Applications group if your application changes. Warning Read and follow all safety messages listed in Mass Flow Controller Safety Information, page 1, BEFORE attempting to troubleshoot the 1150 unit.
  • Page 39 1. Check line temperatures. or unit is non-linear, Evacuate overnight. or has erratic flow 2. Electronics malfunctioning. 2. Return unit to MKS for service. 3. Improper cable. 3. Check cable type. Also, check cable for damage. 4. System pressure too high.

  • Page 40: How To Check Valve Operation

    Chapter Five: Troubleshooting General Information How To Check Valve Operation If the valve does not appear to be functioning properly, use this procedure to check the valve control electronics. If the electronics are functioning normally, the voltage at pin 1 of the Signal (J15) connector will correspond to the value in Table 9.
  • Page 41 General Information Chapter Five: Troubleshooting This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 42: Chapter Six: Maintenance

    If, after performing the checks listed above, it is determined that cleaning is necessary, disassembly of the instrument will be required. You must send the unit back to MKS for disassembly and cleaning. Prior to any return, the instrument MUST be purged of all contaminants.
  • Page 43 Cleaning and Repair Chapter Six: Maintenance This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 44: Appendix A: Product Specifications

    An overall metal braided shielded cable, properly grounded at both ends, is required during use. Contact MKS Applications group for information on specific applications. The 1150 MFC may be mounted in any position, however, MKS does not recommend mounting it in an upside-down position.

  • Page 45: Electrical Specifications

    Electrical Specifications Appendix A: Product Specifications Weight 7.9 lbs (3.59 kg) Electrical Specifications Heater Supply Power ±15 VDC (±2%) @1.5 Amp maximum; @ 3.0 Amp for the optional high temperature unit Regulation Line 0.1% Load 1.0% Ripple 50 millivolts (peak-to-peak) Signal Conditioner Power ±15 VDC (±2%) @ 0.28 Amp maximum...

  • Page 46: Appendix B: Calibration Data Sheet

    Typical Calibration Data Sheet Each 1150 MFC is shipped with a Calibration Data Sheet, as shown below. This sheet contains important information on the specific application for which the 1150 MFC was designed. 1150C FLOW CALIBRATION DATA CUSTOMER: DATE: 7/12/96...

  • Page 47: Figure 9: Example Calibration Graph

    Typical Calibration Data Sheet Appendix B: Calibration Data Sheet 1150C FLOW CALIBRATION DATA Serial #: FLOW SCCM 1,000.00 837.80 800.00 754.90 672.00 589.10 600.00 506.20 423.30 400.00 340.40 300.00 271.12 257.50 242.36 213.40 184.53 200.00 174.60 155.67 125.50 96.80 91.70 67.68...

  • Page 48: Index

    Index Index Accuracy, 35 Gauge factor, 26 Analog interface, 19 Heating, 11 Cables, 8 High Temperature option, 5, 13 Calibration, 18, 28 Calibration Data Sheet, 5, 24, 28, 37 LED, 23 CE Mark, 35 Cleaning, 33 Conductance, 12 Maintenance, 33 Connectors, 13–14 Manual organization, 6 Customer support, 6...
  • Page 49 Index Returns, 33 RFI, 19 Seal material, 5 Set point, 19 Sonic flow, 5, 17 Source material, 17 Span, 28 Specifications, 35–36 Temperature, 5, 8, 17, 22–23 Temperature control, 11 Temperature status, 23 Troubleshooting, 29 Unpacking opening, 7 Valve, 31 Valve position, 17 Warm up, 23 Warning label, 18...
  • Page 50 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

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