Table of Contents
Advertisement
Quick Links
Advertisement
Table of Contents
Subscribe to Our Youtube Channel
Related Manuals for MKS 640A
Summary of Contents for MKS 640A
- Page 1 116669-P1 Rev B, 12/97 MKS Type 640A/641A Pressure Controller...
- Page 2 MKS Instruments, Inc. ® Baratron is a registered trademark of MKS Instruments, Inc., Andover, MA ® Cajon is a registered trademark of Cajon Company, Macedonia, OH ®...
- Page 3 ® Kel-F is a registered trademark of 3M Company, Minneapolis, MN...
-
Page 5: Table Of Contents
Table of Contents Table of Contents Pressure Transducer Safety Information ................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions................3 Chapter One: General Information ..................5 Introduction......................5 How This Manual is Organized................6 Manual Conventions ...................6 Customer Support....................7 Chapter Two: Installation ....................9 How To Unpack the 640 Series Controller ...............9... - Page 6 Table of Contents A Typical Control System ................22 How The 640 Series Pressure Controller Works ............23 Tuning the 640 Series Pressure Controller ..............24 Proportional Term..................24 Integral Term.....................25 Tuning the 640 Controller ................27 Priority of Commands .....................29 Trip Points ......................30 Action of the Trip Points ................30 Applications with a Large Differential Pressure............31 Labels........................31 Chapter Four: Operation.....................33...
- Page 7 Table of Contents Using Different Gases ................54 Appendix C: Gas Density Table ..................57 Appendix D: Model Code Explanation.................61 Model Code Description..................61 Index..........................65...
- Page 8 Table of Contents viii...
- Page 9 List of Figures List of Figures Figure 1: Front and Back Views of the 640 Series Controller ..........13 Figure 2: Side View of the 640 Series Controller ..............14 Figure 3: Bottom View of the 640 Series Controller..............15 Figure 4: Downstream Pressure Control................16 Figure 5: Upstream Pressure Control ..................17 Figure 6: Top View of the 640 Series Controller..............21 Figure 7: Sample Pressure Control System ................23...
- Page 10 List of Figures...
- Page 11 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit ..............2 Table 2: Interface Cables ..................... 11 Table 3: Fitting Dimension ....................13 Table 4: I/O Connector Pinout ....................18 Table 5: Initial Configuration....................20 Table 6: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer .....
- Page 12 List of Tables...
-
Page 13: Pressure Transducer Safety Information
Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 14: Symbols Found On The Unit
Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019... -
Page 15: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 16 Safety Procedures and Precautions Pressure Transducer Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).
-
Page 17: Chapter One: General Information
Chapter One: General Information Introduction The 640A Series Pressure Controllers include the Type 640 absolute pressure controller and the Type 641 gage pressure controller. The 640 Series Controllers consist of a Baratron ® capacitance manometer (either absolute or gage pressure), a normally closed proportional control valve, and closed-loop control electronics. -
Page 18: How This Manual Is Organized
How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide instructions on how to set up and install a 640 Series unit. Before installing your 640 Series unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. -
Page 19: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. - Page 20 Customer Support Chapter One: General Information This page intentionally left blank.
-
Page 21: Chapter Two: Installation
Chapter Two: Installation How To Unpack the 640 Series Controller MKS has carefully packed the 640 Series unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, and the like, to be certain that damage has not occurred during shipment. -
Page 22: Product Location And Requirements
Follow your corporate policy for handling toxic or hazardous Warning gases. Your corporate policy on handling these gases supersedes the instructions in this manual. MKS assumes no liability for the safe handling of such materials. • Install the 640 Series controller in a “flowing” system where gas is continually added and evacuated. -
Page 23: Interface Cables
In addition, as of January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark. -
Page 24: Generic Shielded Cable Description
Chapter Two: Installation Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;... -
Page 25: Dimensions
Chapter Two: Installation Dimensions Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Front and Back Views The front of the unit has a “Controlled Pressure Port” label to indicate the transducer port. The opposite port houses the control valve. The gas flow can enter the unit through either port, depending upon whether you need upstream or downstream pressure control. -
Page 26: Side View
Dimensions Chapter Two: Installation Side View Pressure controllers have trip point test jacks located on the left, or valve, side of the unit. The test jacks enable you to measure the voltage value of each trip point while adjusting it via pots on the top of the unit. -
Page 27: Setup
Chapter Two: Installation Setup Setup Fittings The 640 Series pressure controller is available with the following fittings: • Cajon 4-VCR male compatible • Cajon 8-VCR male compatible • ¼” Swagelok compatible Mounting Hardware The 640 Series controller has four mounting holes located on the bottom or base of the unit. Use #8-32 UNC-2B hardware to mount the unit. -
Page 28: Installing The Unit
Connect the port labeled “Controlled Pressure Port” to the system whose pressure you need to control. Note MKS defines “upstream” and “downstream” control by the location of the controlled volume relative to the 640 Series Pressure Controller. Downstream Pressure Control... -
Page 29: Figure 5: Upstream Pressure Control
Chapter Two: Installation Setup Upstream Pressure Control Upstream pressure control occurs when the 640 Series controller is positioned after the controlled pressure volume in the gas flow path, so that the controlled volume is upstream of the 640 Series controller. The gas from the pressure system enters the controller on the transducer side, labeled “Controlled Pressure Port.”... -
Page 30: The I/O Connector
Setup Chapter Two: Installation The I/O Connector The Type 640 Series controller has one 15-pin, male Type “D” connector that provides the pressure output, set point input, and trip point output signals. I/O Connector Pinout Pin Number Assignment Valve Test Point Pressure Signal Output Valve Close Valve Open... - Page 31 Chapter Two: Installation Setup Set Point Input (Pin 8) The set point input signal can be a 0 to 5 Volt (factory setting) or 0 to 10 Volt signal. The range of the set point input signal must match the range of the pressure output signal. The 640 controller is initially configured for a 0 to 5 Volt pressure output signal.
-
Page 32: Initial Configuration
Initial Configuration Chapter Two: Installation Initial Configuration The 640 Series Pressure Controller is shipped from the factory with the configuration listed in Table 5. Initial Configuration Feature Setting Options Pressure Control Downstream Upstream Set Point Input* 0 to 5 V 0 to 10 V Pressure Output 0 to 5 V... -
Page 33: Chapter Three: Overview
Chapter Three: Overview General Information Chapter Three: Overview General Information Figure 6 shows the top view of the 640 Series Pressure Controller. The user adjustable controls for zero, span, the P term, the I term, and the trip points are located on the top of the controller. The trip point settings can be measured through two test jacks, located on the side of unit, as shown in Figure 2, page 14. -
Page 34: A Typical Control System
The 640 Series Pressure Controller provides the first three components. The pressure transducer is an MKS Baratron capacitance manometer. The 640 Series unit contains the electronics necessary for pressure control. The control valve included in the 640 controller is a proportional... -
Page 35: How The 640 Series Pressure Controller Works
Chapter Three: Overview How The 640 Series Pressure Controller Works How The 640 Series Pressure Controller Works The 640 Series controller compares the pressure reading to the set point, and positions the valve to maintain, or achieve, the set point pressure. The controller functions as a PI (Proportional- Integral) controller. -
Page 36: Tuning The 640 Series Pressure Controller
Tuning the 640 Series Pressure Controller Chapter Three: Overview Tuning the 640 Series Pressure Controller Tuning optimizes the way the 640 Series unit controls your system. The Proportional (P) and Integral (I) terms adjust the response of the 640 Series controller. The controller responds to changes in either the pressure of the system or the value of the set point. -
Page 37: Integral Term
Chapter Three: Overview Tuning the 640 Series Pressure Controller positions, 8 and 9, repeat the values of positions 0 and 1. The initial setting is 0. As you increase the setting number, the value of the term increases by a factor of approximately 2.8. Integral Term The action of the Integral (I) term creates a valve drive signal that is proportional to the magnitude and sign of the area under the error signal curve (error signal with respect to time). - Page 38 Tuning the 640 Series Pressure Controller Chapter Three: Overview...
-
Page 39: Tuning The 640 Controller
Chapter Three: Overview Tuning the 640 Series Pressure Controller Tuning the 640 Controller Tuning the 640 controller involves adjusting the Proportional and Integral terms to optimize the response of the controller in your system. Since every system is different, the optimum settings for the P term and I term will vary. -
Page 40: Figure 11: Controller Response With Increased P Term
Tuning the 640 Series Pressure Controller Chapter Three: Overview Controller Response with Increased P Term Increasing the P term to 1 while holding the I term at 0 yields: Settling Time Settling Time P = 1 Set Point I = 0 Signal Time Figure 11: Controller Response with Increased P Term... -
Page 41: Priority Of Commands
Chapter Three: Overview Priority of Commands Priority of Commands The 640 Series controller has an established hierarchy that it uses to determine which commands take precedence. The commands and operating modes are listed according to the order of priority (from highest to lowest): •... -
Page 42: Trip Points
Trip Points Chapter Three: Overview Trip Points The 640 Series controller provides two trip points (Trip Point A and Trip Point B). Each trip point operates independently and controls an open collector output that can be connected to an external relay. -
Page 43: Applications With A Large Differential Pressure
It also displays the CE Mark which indicates compliance with European directives. The serial number label is located on the back of the unit. Range: 100 TORR Serial #: 012345678 Model #: 640A12TW1V12V MKS Instruments, Inc. Made in USA Figure 13: Serial Number Label... -
Page 45: Chapter Four: Operation
Check the transducer zero before operating the unit initially and then periodically as required. The zero can be set (or reset) by adjusting the zero potentiometer located on the top cover of the transducer or, on the front panel of an MKS Power Supply/Readout, if you are using one. Note The port labeled “Controlled Pressure Port”... -
Page 46: How To Zero A Type 641 (Gage) Unit
How To Check the Zero Chapter Four: Operation To properly zero a 640 controller (that contains an absolute transducer): 1. Install the 640 controller in a system and connect a power supply/readout. The pressure signal is available on pin 2 of the I/O connector. Use either pin 11 or 12 as the ground. -
Page 47: How To Adjust The Span
Only adjust the pot in conjunction with a calibration transfer standard. Do not adjust the SPAN span setting if a calibration transfer standard is not available. Instead, contact an MKS Service Center for calibration. How To Tune the 640 Series Controller You may need to tune the 640 Series controller to optimize how it controls your system. -
Page 48: How To Adjust The Trip Point Values
How To Adjust the Trip Point Values Chapter Four: Operation How To Adjust the Trip Point Values Equipment required: a digital volt meter (DVM) Caution Only qualified individuals should perform the installation and any user adjustments. They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument. -
Page 49: How To Select The Trip Point Action
Chapter Four: Operation How To Select the Trip Point Action How To Select the Trip Point Action The 640 Series controller is initially configured with TP A set to trip high (it is on when the pressure is above the trip point pressure) and TP B set to trip low (it is on when the pressure is below the trip point pressure). - Page 50 How To Select the Trip Point Action Chapter Four: Operation 6. Position the jumper on jumper block “JP4” to select the action for TP A. Jumper block “JP3” controls TP B. The board silkscreening defines the jumper positions. TH indicates that the trip point will be on when the pressure is above the trip point, and TL indicates that the trip point will be on when the pressure is below the trip point.
-
Page 51: How To Use Trip Points As Error Indicators
Chapter Four: Operation How To Use Trip Points as Error Indicators How To Use Trip Points as Error Indicators You can use the trip points to indicate when the error signal deviates from a given range. The error is defined as the difference between the actual pressure reading and the set point. For example, assume you have a 100 Torr unit and your set point is 50 Torr. -
Page 52: How To Change The Pressure Output Signal Range
4. Position the controller with the front side facing you, and pull up on the enclosure to remove it. The MKS logo is displayed on the front of the unit. The board assembly will be visible, with the Transducer board facing you. The Control board is connected to the back of the Transducer board. - Page 53 Chapter Four: Operation How To Change the Pressure Output Signal Range 10. Attach the hex nuts, removed in step 3, to the I/O connector. 11. Reconnect the leads and wires.
-
Page 54: How To Select Upstream Control
How To Select Upstream Control Chapter Four: Operation How To Select Upstream Control The 640 Series controller is configured for downstream control when it leaves the factory. To use it in a upstream control application, you must remove the enclosure cover and reposition two jumpers on the Control board. - Page 55 Chapter Four: Operation How To Select Upstream Control 6. Position the lower two jumpers horizontally for upstream control. Figure 15, page 42, shows the jumper block configured to operate with a normally closed valve. 7. Slide the enclosure over the unit and press it in place. 8.
- Page 56 How To Select Upstream Control Chapter Four: Operation This page intentionally left blank.
-
Page 57: Appendix A: Product Specifications
Appendix A: Product Specifications Performance Specifications Appendix A: Product Specifications All specifications are at 23° C, 120 VAC Performance Specifications ±0.5% Reading Accuracy CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Control Range 2.0 to 100% F.S. ±0.1% F.S. Control Repeatability Proportional Term 8 positions (0 through 7;... -
Page 58: Environmental Specifications
Environmental Specifications Appendix A: Product Specifications Environmental Specifications Operating Temperature Range 0° to 50° C (32° to 122° F) Storage Temperature Range -20° to 80° C (-4° to 176° F) Storage Humidity Range 0 to 95% Relative Humidity, non-condensing Trip Point Specifications Trip Points Two open collector transistors, adjustable from 1 to 100% full scale... -
Page 59: Physical Specifications
Appendix A: Product Specifications Physical Specifications Physical Specifications ≥1500 psig Burst Pressure Dimensions 1.5 in x 3.0 in (less fittings) x 5.55 in max. 3.81 cm x 7.62 cm (less fittings) x 14.1 cm max. Fittings Cajon 4-VCR male compatible, 8-VCR male compatible, ¼... - Page 60 Physical Specifications Appendix A: Product Specifications This page intentionally left blank.
-
Page 61: Appendix B: Valve Orifice Selection
Appendix B: Valve Orifice Selection General Information Appendix B: Valve Orifice Selection General Information The 640 controller is available in six valve orifice sizes. You should confirm that the valve orifice in your 640 controller is the correct size for your application before you install it into your system. The orifice is not adjustable and is only replaceable at the factory. -
Page 62: Table 7: Orifice Size
General Information Appendix B: Valve Orifice Selection Table 7: Orifice Size... -
Page 63: How To Verify The Orifice Selection
Appendix B: Valve Orifice Selection How To Verify the Orifice Selection How To Verify the Orifice Selection The correct orifice depends on three pieces of information: the upstream pressure, the downstream pressure, and the flow rate. These instructions assume that you are using nitrogen gas. -
Page 64: Table 8: Valve Orifice Index Number
How To Verify the Orifice Selection Appendix B: Valve Orifice Selection Delta Pressure (Torr) Table 8: Valve Orifice Index Number... -
Page 65: Figure 17: Flow Range Selection
Appendix B: Valve Orifice Selection How To Verify the Orifice Selection 3. Use the index number and your maximum flow rate, to determine the orifice size from Figure 17. Each line represents the maximum flow rate for the orifice. Choose the orifice number above your point on the graph to ensure that the orifice can deliver the required flow. -
Page 66: Using Different Gases
How To Verify the Orifice Selection Appendix B: Valve Orifice Selection Using Different Gases The valve orifice selection data is based on nitrogen gas. If you will be using a gas other than nitrogen, you need to compensate for the density difference between nitrogen and your process gas before you can select the appropriate valve orifice. - Page 67 Appendix B: Valve Orifice Selection How To Verify the Orifice Selection Example 2: Using Helium (He) Following the example in How To Verify the Orifice Selection, page 51, using 100% helium: 1. Calculate the orifice sizing factor, using the equation page 54. The standard density of He is 0.179, so the orifice sizing factor is: 1.250 2.64 Orifice Sizing Factor...
- Page 68 How To Verify the Orifice Selection Appendix B: Valve Orifice Selection Example 3: Using 30% Hydrogen (H 2 ) and 70% Nitrogen (N 2 ) Using a mixture of gases, such as 30% hydrogen and 70% nitrogen, may impact the orifice size. Following the example in How To Verify the Orifice Selection, page 51, with this gas mixture: 1.
-
Page 69: Appendix C: Gas Density Table
Appendix C: Gas Density Table Appendix C: Gas Density Table SYMBOL DENSITY g/l @ 0 o C - - - 1.293 Ammonia 0.760 Argon 1.782 Arsine 3.478 Boron Trichloride 5.227 Bromine 7.130 Carbon Dioxide 1.964 Carbon Monoxide 1.250 Carbon Tetrachloride 6.86 Carbon Tetraflouride 3.926... - Page 70 Appendix C: Gas Density Table SYMBOL DENSITY g/l @ 0 o C Dichlorosilane 4.506 1,2-Dichlorotetrafluoroethane 7.626 (Freon - 114) 1,1-Difluoroethylene 2.857 (Freon - 1132A) 2,2-Dimethylpropane 3.219 Ethane 1.342 Fluorine 1.695 Fluoroform 3.127 (Freon - 23) Freon - 11 6.129 Freon - 12 5.395 Freon - 13 CClF...
- Page 71 Appendix C: Gas Density Table SYMBOL DENSITY g/l @ 0 o C Hydrogen Chloride 1.627 Hydrogen Fluoride 0.893 Isobutylene 2.503 Krypton 3.739 Methane 0.715 Methyl Fluoride 1.518 Molybdenum Hexafluoride 9.366 Neon 0.900 Nitric Oxide 1.339 Nitrogen 1.250 Nitrogen Dioxide 2.052 Nitrogen Trifluoride 3.168 Nitrous Oxide...
- Page 72 Appendix C: Gas Density Table SYMBOL DENSITY g/l @ 0 o C Sulfur Hexafluoride 6.516 Trichlorofluoromethane 6.129 (Freon - 11) Trichlorosilane SiHCl 6.043 1,1,2-Trichloro - 1,2,2- FCClF 8.360 Trifluoroethane (Freon - 113) 13.28 Tungsten Hexafluoride 5.858 Xenon NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia) Standard Temperature is defined as 0...
-
Page 73: Appendix D: Model Code Explanation
(flow range). 64XA Type Number Pressure Range Fittings Valve Type Body Seal Material Valve Orifice Trip Points Valve Plug Material Type Number (64XA) The type number identifies your controller; either a 640A absolute pressure controller or 641A gage pressure controller. -
Page 74: Table 9: Pressure Range Selection
Model Code Description Appendix D: Model Code Explanation Pressure Range (XXX) The transducer enclosed in the 640 Series controller, is available in five standard full scale ranges. The full scale pressure is defined by a two number one letter designation. Pressure Range Selection Full Scale Pressure Ordering Code... -
Page 75: Table 12: Seal Material Selection
Appendix D: Model Code Explanation Model Code Description Seal Material (Q) The control valve can use either one of a variety of elastomer seal materials, or an all-metal seal. Seal Material Selection Seal Material Ordering Code Kalrez Metal Viton Table 12: Seal Material Selection Valve Orifice Size (R) The 640 Series controller is available with one of six valve orifice sizes, defined by a single entry in the model code. -
Page 76: Table 14: Trip Point Model Code Entry
Model Code Description Appendix D: Model Code Explanation Trip Points (S ) The 640 Series controller can be built with or without trip points; the choice is designated by a single number in the model code. Trip Points Trip Points Ordering Code With Without... -
Page 77: Index
Index Index Absolute pressure controller, 5 I/O connector, 18, 15–20 Inlet pressure, 15 Input power, 10 Baratron, 5, 22, 45 Installation, 10 Integral control, 20, 25, 33 Interface cables, 11 Cables, 9, 11 CE compliance, 43 Commands, priority, 28 Label, 30 Connector, 9, 15–20 Control board, 40 Control range, pressure, 21... - Page 78 Index Process control, 20, 23–25 Valve orifice, 47–52, 59 Proportional control, 20, 24, 33 Valve plug material, 60 Valve seal material, 5 Valve type, 58 Returning the product, 7, 9 Zero, 31–32 Seal material, 59 Set point, 18 Set point input, 19, 20, 24 Set point recognition, 28 Span adjustment, 33 Specifications...
Need help?
Do you have a question about the 640A and is the answer not in the manual?
Questions and answers