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MKS P9B Instruction Manual

Digital mass flow controller
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1042936-001, Rev A
January, 2013
MKS Type P9B
Digital
Mass Flow Controller
Instruction Manual

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  • Page 1 1042936-001, Rev A January, 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
  • Page 2 (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
  • Page 3 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America ...

  • Page 5: Table Of Contents

    Operation of the MFC with Gases other than Nitrogen ....................24   Chapter Three: Installation and Configuration ................... 26  Unpacking ................................... 26   Product Location and Requirements ..........................27   Dimensions - P9B ............................... 28   Serial Label.................................. 31   Installation Procedure ..............................32  ...
  • Page 6 Pressure Zero Adjustment ............................79   Chapter Eight: Troubleshooting ........................83  Troubleshooting Chart ..............................83   Appendix A: Product Specifications ......................91  Performance Specifications –P9B ..........................91   Specifications are subject to change without notice.Mechanical Specifications ............91   Electrical Specifications ............................. 92  ...
  • Page 7 List of References List of Figures Figure 1: 4-VCR Front View - (Normally Closed Valve) ................28  Figure 2: 4-VCR DeviceNet Inlet End (Left) and Outlet End (Right) Views - (Normally Closed Valve) ..28  Figure 3: 4-VCR Inlet End - 15 pin D and 9 pin D Views (Normally Closed Valve) ........29  Figure 4: 4-VCR Bottom View .........................
  • Page 8 表 5: 本機器に使⽤されているマークについて ..................11  표 6: 장치에 표시된 기호들의 정의 ......................15  Table 7: MKS Interface Cables ........................35  Table 8: Analog Interface – 9 Pin D Males Pinouts – Model Code A ............. 36  Table 9: Analog Interface – 15 Pin D Males Pinouts – Model Code B ............37 ...

  • Page 9: List Of References

    [13] SEMI E80. Test Method Determining Attitude Sensitivity of Mass Flow Controllers [14] SEMI E52. Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers [15] Supplement, Devicenet Profile, P9B MFC, Document No. 1042926-001 [16] Supplement, RS485 Command Specifications, P9B MFC, Document No. 1042928-001...
  • Page 10 List of References This page intentionally left blank.

  • Page 11: Mass Flow Device Safety Information

    Mass Flow Device Safety Information Mass Flow Device Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 12: Safety Procedures And Precautions

    Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers.

  • Page 13: Sicherheitshinweise Für Das Massenflussgerät

    Sicherheitshinweise für das Massenflussgerät Sicherheitshinweise für das Massenflussgerät In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.

  • Page 14: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.

  • Page 15: Informations De Sécurité Pour Appareils De Mesure/Contrôle De Débit Massique

    Informations de sécurité pour appareils de mesure/contrôle de débit massique Informations de sécurité pour appareils de mesure/contrôle de débit massique Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non-respect des consignes.

  • Page 16: Mesures De Sécurité Et Précautions

    Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.

  • Page 17: Medidas De Seguridad Del Dispositivo De Flujo De Masa

    Medidas de seguridad del dispositivo de flujo de masa Medidas de seguridad del dispositivo de flujo de masa Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 18: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 19 Medidas de seguridad del dispositivo de flujo de masa MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad. CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada.

  • Page 21: マスフロー機器の安全に関する情報

    マスフロー機器の安全に関する情報 マスフロー機器の安全に関する情報 本取扱説明書のマーク 本マニュアルでは警告、注意、ポイントのマークを⽤いて重要な事項を記載しています。 警告 この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法、条件など) をすると、⼈が重傷 を負う可能性が想定される内容を⽰しています。必ずお読みください。 注意 この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法など) をすると、 製品が損傷する 可能性が想定される内容を⽰しています。必ずお読みください。 ポイント この表⽰は⼿順や使⽤⽅法、条件などに関する重要な情報が記載されていることを⽰ しています。必ずお読みください。 本機器のマーク 以下の表では、本機器に使⽤されているマークについて説明いたします。 表 5: 本機器に使⽤されているマークについて オン (電源) オフ (電源) 接地 (アース) 保護接地 (アース) IEC 417, No. 5007 IEC 417, No. 5008 IEC 417, No. 5017 IEC 417, No.
  • Page 22 マスフロー機器の安全に関する情報...

  • Page 23: 安全対策について

    マスフロー機器の安全に関する情報 安全対策について 本機器を使⽤する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの 警告を無視すると、機器本来の⽤途の安全基準を侵害することになり、機器が提供する保護機能が 損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履⾏に対して は⼀切責任を負いかねます。 勝⼿に部品を変えたり、本体を改造しないこと 本機器に代⽤部品を使⽤したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。 修理は必ず専⾨の修理サービスを利⽤すること オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専⾨の修理サービスを利 ⽤してください。 電流が通じている回路から切断すること 電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態 でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切 断し、放電してください。 危険な材料を使⽤する場合は慎重に機器を使⽤すること 危険な材料を使⽤する場合は、使⽤者は各⾃の責任の元で適切な安全対策を講じてください。必要に応じて 本機器を浄化してください。また、使⽤する材料に対するシーリング材の耐久性を確認してください。 機器を浄化すること 本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使⽤した材料を完 全に取り除いてください。 浄化する場合は適切な⼿順で⾏うこと 本機器の浄化は換気フードの下で⾏う必要があります。また、浄化作業を⾏う⼈は必ず⼿袋を着⽤してください。 爆発の危険性のある環境で機器を使⽤しないこと 爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使⽤しないでください。ただし、そのような環境 での使⽤が特別に保証されている場合は除きます。 適切な⾦具類を使⽤し、⼿順に従って⾦具の締めを⾏うこと ⾦具類は本機器の仕様と⼀致し、機器本来の⽤途に適合したものである必要があります。⾦具類の取り付け や締めは、製造業者の指⽰に従ってください。 液体の漏れがないよう接続箇所を確認すること...
  • Page 24 マスフロー機器の安全に関する情報 安全なインレット圧⼒で使⽤すること 定格の最⼤圧⼒を超える圧⼒の下で本機器を絶対に使⽤しないでください (最⼤許容圧⼒については仕様書 を参照)。 適切なバーストディスクを取り付けること 圧⼒のかかったガスを使⽤する場合は、万⼀システムが爆発した場合にシステムの圧⼒が上昇するのを防ぐため、 真空システムに適切なバーストディスクを取り付けてください。 本機器に異物やゴミが混⼊しないようにすること 本機器の使⽤前または使⽤中に、ほこりやゴミ、繊維、ガラスの破⽚、⾦属⽚などの異物やゴミが混⼊しないよ うにしてください。本機器が損傷する可能性があります。 温度調整された機器を⼗分に温めてから使⽤すること 温度調整された機器が適切な作動温度にならないうちに使⽤すると、仕様通りの動作をしないことがあります。 本機器が⼗分に温まるまでは⽬盛りをゼロに合わせたり、較正しないでください。...

  • Page 25: 질량 유량 장치 안전 정보

    질량 유량 장치 안전 정보 질량 유량 장치 안전 정보 본 지침 매뉴얼에 사용되는 기호들 매뉴얼 전체에 사용되는 경고, 주의 및 참고 메시지의 정의. 경고 경고 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을 경우, 사람에게 상해를 입힐 수 있는 절차, 수행지침, 상태 또는 이와 유사한 상황들에...

  • Page 26: 안전 절차 및 예방조치

    어떠한 책임도 지지 않습니다. 부품을 교체하거나 기계를 개조하지 마십시오 교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가 필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and Service Center)로 보내주십시오. 자격이 있는 사람에게만 서비스를 받으십시오...
  • Page 27 질량 유량 장치 안전 정보 기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지 확인하십시오. 안전한 흡입 압력에서 작동하십시오 이 장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에 대해서는 제품 사양을 참조하십시오).
  • Page 28 질량 유량 장치 안전 정보 적합한 안전 파열판을 설치하십시오 가압 가스 공급원에서 작동시, 시스템 폭발이 시스템 압력 상승을 일으키는 것을 방지하기 위해 적합한 안전 파열판이 진공 시스템에 설치되어야 합니다. 장치를 오염이 없는 곳에 보관하십시오 장치를 사용하기 전이나 사용 중에는 어떠한 종류의 오염 물질도 허용해서는 안됩니다. 먼지, 때, 보풀, 유리...

  • Page 29: Chapter One: General Information

    This device integrates thermal flow and pressure sensor technologies together with MKS real-time feedback control system providing typical flow control response times of about 750 milliseconds with either a normally closed or normally open valve. Incorporation of pressure measurement along with thermal flow measurement enables a device providing multi-gas, multi-range and pressure insensitive capabilities.

  • Page 30: How This Manual Is Organized

    How This Manual is Organized Control (I/O) Interfaces The P9B MFCs are available with either analog or digital interface I/O which is specified by the user at time of ordering. Analog I/O is available via either a 9 pin D or 15 pin D. The 9 pin D option provides for setpoint I/O along with a valve override function.

  • Page 31: Customer Support

    A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is free of harmful materials. The Health and Safety form can be obtained on the last page of this manual or through the MKS website at: http://www.mksinst.com/service/servicehowtoorder.aspx.

  • Page 33: Chapter Two: Overview

    Flow system (whose flow is being controlled by the MFC.) The MFC provides the first four (4) components. The mass flow transducer is an MKS thermal sensor design. The pressure sensor is capable of measuring pressure from 0 to 100 psia. The MFC instrument contains the electronics necessary for flow control.

  • Page 34: How The Mfc Works

    Operation of the MFC with Gases other than Nitrogen The P9B MFC does not use gas correction factors as many other mass flow controllers do. The operation of the P9B MFC is based on thermodynamic principals and multi-component functions have been developed to accurately calculate the non-linear gas flow of non-calibration gases, with respect to the calibration gas.
  • Page 35 FS) depending on the gas used. The P9B, by using these functions for the various gases, actually reports the flow within the stated accuracy of the flow controller, but for non-calibration gases. The reported flow from a MFC using Helium as the process gas, but not calibrated for Helium, will have the same accuracy for the Helium as it does for Nitrogen, the calibration gas.

  • Page 36: Chapter Three: Installation And Configuration

    Note unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and Service Center before shipping. Please refer to the MKS website http://www.mksinst.com/Service/ServiceHome.aspx...

  • Page 37: Product Location And Requirements

    10000 to 30000 sccm 15 to 40 psid  50000 sccm 35 to 40 psid Valve configurations for low pressure drop applications are available. Please consult MKS for these situations. For additional information, refer to Appendix A, Product Specifications, page 91...

  • Page 38: Dimensions - P9B

    Chapter Three: Installation and Configuration Dimensions - P9B Dimensions - P9B Figure 1: 4-VCR Front View - (Normally Closed Valve) Figure 2: 4-VCR DeviceNet Inlet End (Left) and Outlet End (Right) Views - (Normally Closed Valve)

  • Page 39: Figure 3: 4-Vcr Inlet End - 15 Pin D And 9 Pin D Views (Normally Closed Valve)

    Dimensions - P9B Chapter Three: Installation and Configuration Figure 3: 4-VCR Inlet End - 15 pin D and 9 pin D Views (Normally Closed Valve) Figure 4: 4-VCR Bottom View...

  • Page 40: Figure 5: C Or W Seal Side View - Normally Closed

    Chapter Three: Installation and Configuration Dimensions - P9B Figure 5: C or W Seal Side View – Normally Closed Figure 6: C or W Seal DeviceNet Inlet End (Left) and Outlet End (Right) Views – Normally Closed Valve...

  • Page 41: Serial Label

    Serial Label Chapter Three: Installation and Configuration Figure 7: C and W Seal Bottom View Figure 8: 4-VCR DeviceNet Top View Figure 9: 4-VCR 9 pin D and 15 pin D Top View Serial Label Each MFC has one serial number label. Each label shows the serial number, the model code, the full scale flow range, and the calibration gas.

  • Page 42: Installation Procedure

    Installation Procedure Mounting Hardware P9B MFCs with in-line fittings (VCR) have four threaded mounting holes located on the bottom or base of the unit: two #8-32 and two M4. Depending on the hole pattern chosen, use #8-32 UNC-2B or M4 hardware to mount the instrument.

  • Page 43: Figure 11: Devicenet Mac Id Switches

    Installation Procedure Chapter Three: Installation and Configuration Prepare the system according to your facility’s gas handling procedures, including purging of the gas lines with appropriate purge gas, and notification to equipment personnel and haz/mat teams. PERSONAL Gas systems can contain toxic, explosive, combustible, corrosive or other gases which can present life- threatening hazards.
  • Page 44 Chapter Three: Installation and Configuration Installation Procedure Note: The P9B MFC’s scrolling display shows the IP address, the Gas Type, the Maximum Flow Rate and Active Gas Instance.

  • Page 45: Chapter Four: Analog And Digital Interface

    CB259S-5. Generic Shielded Cable Description MKS offers a full line of cables for most MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 46: Analog Interface Input And Output Options

    Some cables may need internal shielding from specific wires to others. Analog Interface Input and Output Options The P9B analog I/O MFC is available with either a 9 pin D male connector or a 15 pin D male connector for providing power and signal I/O.

  • Page 47: Table 9: Analog Interface - 15 Pin D Males Pinouts - Model Code B

    Analog Interface Input and Output Options Chapter Four: Analog and Digital Interface Table 9: Analog Interface – 15 Pin D Males Pinouts – Model Code B Pin 1 Valve Test Point Pin 2 Flow Signal Output, (0 to +5 VDC) Pin 3 Valve Close (Pull to Ground or Pull Low –...
  • Page 48 Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.
  • Page 49 Analog Interface Input and Output Options Chapter Four: Analog and Digital Interface In order to complete a true zeroing of the device, ensure the following conditions are satisfied prior to beginning the procedure.  Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up, etc.).

  • Page 50: Digital Interface Input And Output Options

    Chapter Four: Analog and Digital Interface Digital Interface Input and Output Options Digital Interface Input and Output Options The P9B digital I/O MFC is available with either the DeviceNet communications protocol or the RS485 communications protocol. DeviceNet Digital Interface Using 5 Pin Microconnector The MFC has one 5-pin, male DeviceNet connector that provides the communications interface with the DeviceNet network, electrical power from the network bus, and shielding for the instrument signals.

  • Page 51: Table 11: Network Status Led Indicators

    Digital Interface Input and Output Options Chapter Four: Analog and Digital Interface DeviceNet Controls and Indicators The top panel of the MFC contains several DeviceNet controls and indicators. The mass flow device has two standard bi-color (green/red) DeviceNet status LEDs, (Module Status LED and Network Status LED) located on top of the instrument.

  • Page 52: Figure 13: Devicenet Baud Rate Switch

    Chapter Four: Analog and Digital Interface Digital Interface Input and Output Options The switch positions are numbered in a clockwise direction, to correspond to the increasing address values. Baud Rate (Kb) Figure 13: Devicenet Baud Rate Switch DeviceNet MAC ID (Node Address) Switches Two 10-position rotary switches, shown below, are used to set the MAC ID (node address).
  • Page 53 Zeroing the Device Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and re- zero them, if needed, when they are first installed on the tool. A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.

  • Page 54: Table 12: Digital Interface - Rs485 Using 9 Pin D - Model Code 5

    For a complete description of this multi-drop protocol see the MKS Document, RS485 command document, 1042928-001, “Supplement, RS485 Command Specifications, P9B MFC”. Please contact MKS for this document.

  • Page 55: Figure 15: Rs485 Baud Rate Switch

    A hardware problem with the EEPROM, or a memory problem with the RAM are major unrecoverable faults. This fault condition sets its exception status bit, and the LED illuminates solid red A major unrecoverable fault prevents operation because the device cannot communicate on the Note network. Contact MKS Instruments, Inc. for assistance.
  • Page 56 Chapter Four: Analog and Digital Interface Digital Interface Input and Output Options...

  • Page 57: Chapter Five: Ethernet Interface Setup And Configuration

    OTHERWISE perform the following steps: 1. Download the (2) files listed below from the MKS website (www.mksinst.com/MDsw.html) by clicking on the link “MFC java plugin file for web access.” The MKS download includes an installation script to properly load the plug-in.
  • Page 58 Chapter Five: Ethernet Interface Digital Interface Input and Output Options Setup and Configuration 4. Read the license agreement, select “I accept...”, click “Next” to continue installation. 5. Select the “Typical” installation option and follow the prompts to install the Java plug-in. 6.
  • Page 59 Host IP address (x) is sent with the command, the script assigns its own subnet mask (255.0.0.0) and gateway (10.0.0.0). The MKS IP Address format is 192.168.2.X, so the Host IP Address must be of the same format. Note A recommended Host IP address is 192.168.1.Y with a Subnet Mask of 255.255.252.0, where Y is some number between 5 and 254.
  • Page 60 Chapter Five: Ethernet Interface Digital Interface Input and Output Options Setup and Configuration To restore to a dynamic IP address, run the HostIP script with an argument of “auto” as shown below: These commands may also be entered directly in the “Run…” window. Instead of typing “command” simply type “c:/HostIP x y z”...
  • Page 61 Digital Interface Input and Output Options Chapter Five: Ethernet Interface Setup and Configuration Option 2.2: From your computer’s “Start” menu, select “Settings” Network and Dialup Connections  Local Area Connections 3. Select Properties. 4. Select Internet Protocol (TCP/IP), then select Properties. 5.
  • Page 62 Chapter Five: Ethernet Interface Digital Interface Input and Output Options Setup and Configuration Additional IP Addresses In the case that you need to be able to connect to more than one IP Address, simply click on the “Advanced” button at the bottom of the current window. Once the “Advanced TCP/IP Settings” window pops up, verify that you’re on the “IP Settings”...
  • Page 63 Digital Interface Input and Output Options Chapter Five: Ethernet Interface Setup and Configuration 4. At the command prompt, enter the command “ipconfig /all” (as shown below) then press Enter. The data inside the highlighted area (lower section, between IP Address and Primary WINS Server) are what is needed for the steps below.
  • Page 65 Digital Interface Input and Output Options Chapter Five: Ethernet Interface Setup and Configuration 7. Select Use the following IP address. Now do the following to configure your computer so that it can still connect to the Internet: o Type in the “IP address”, the “Subnet mask” and the “Default gateway” fields with values returned from the “ipconfig /all”...
  • Page 66 Chapter Five: Ethernet Interface Digital Interface Input and Output Options Setup and Configuration 10. Verify you’re on the “IP Settings” tab and then do the following to configure your computer to talk to the MFC and any other devices with an IP address: o Click “Add…”...
  • Page 67 Digital Interface Input and Output Options Chapter Five: Ethernet Interface Setup and Configuration 14. In the “WINS addresses, in order of use” section, click “Add…” Enter in the Primary WINS server address that was returned from the “ipconfig /all” query in the DOS command window, and click “Add.” If there were any alternate WINS servers listed in the DOS window, now enter them.
  • Page 68 Chapter Five: Ethernet Interface Digital Interface Input and Output Options Setup and Configuration...

  • Page 69: Chapter Six: Embedded Web-Based Gui And Diagnostics

    Logging On to Your MFC Chapter Six: Embedded Web-Based GUI and Diagnostics Chapter Six: Embedded Web-Based GUI and Diagnostics Logging On to Your MFC Before trying to logon to your MFC you must have your network setup correctly. To do this, complete the steps listed in Chapter Five, Ethernet Interface Setup and Configuration, starting on page 44.

  • Page 70: Figure 17: Embedded Gui, Mfc Device Page In Monitor Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Monitor Mode Figure 17: Embedded GUI, MFC Device Page in Monitor Mode Plot Page – Monitor Mode This page enables you to plot and see real-time performance of the device. In Monitor Mode you are able to select variables to plot, the rate at which to display them, and save the data that has been plotted.

  • Page 71: Figure 18: Embedded Gui, Plot Page In Monitor Mode

    Monitor Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Selecting Rate Directly below the list of variables is the Rate selection drop down menu. Here you are able to select the sampling rate at which you’d like to plot the variables. Available rates are 1, 2, 5, 10, 50 and 100 Hz. Starting and Stopping the Plot program Below the Rate selection is the Start/Stop button for the plot program.
  • Page 72 Chapter Six: Embedded Web-Based GUI and Diagnostics Monitor Mode Rescaling X-Axis  entering a value next to where it says “X scale (seconds):” adjusts the number of seconds spanned across the X-Axis, e.g. entering a value of ten seconds sets the X-Axis so that it will show ten second segments at a time.

  • Page 73: Figure 19: Embedded Gui, Diagnostics Page

    Monitor Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Figure 19: Embedded GUI, Diagnostics Page Configuration Page – Monitor Mode This page displays the TCP/IP settings and the current Firmware version for the MFC. In “Monitor Mode” you are only able to view this information. At the bottom of this page you are able to enter the password to change into “Setup Mode.”...

  • Page 74: Figure 20: Embedded Gui, Configuration Page In Monitor Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Monitor Mode Figure 20: Embedded GUI, Configuration Page in Monitor Mode...

  • Page 75: Setup Mode

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode In “Setup Mode” the user is able to configure the MFC, i.e. , gas and gas full scale, zero the device, change the IP address, etc. To enter this mode, while in “Monitor Mode”, go to the “Configuration Page” and enter the Factory-shipped password “config”...

  • Page 76: Figure 22: Embedded Gui, Device Page In Setup Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode Device Page – Setup Mode In “Setup Mode” this page gives you the ability to modify the gas settings. Figure 22: Embedded GUI, Device Page in Setup Mode Gas Settings: The Device Page enables the user to change the MFC’s gas settings. To change the gas settings review the following possible operations and go to the appropriate page.

  • Page 77: Figure 23: Embedded Gui, Creating A New Gas Instance

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics 4. This process typically takes under 30 seconds to complete. When the process is completed, the browser will display a green banner across the top of the Device Page that says, “Gas Selection Update SUCCEEDED.”...

  • Page 78: Figure 25: Embedded Gui, Plot Page In Setup Mode

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode through Ethernet (see notes below), watch the MFC’s performance on the plot, and capture flow and other parameter data from the MFC. For Analog units, sending a setpoint through Ethernet will not work unless the Analog checkbox Note is selected.

  • Page 79: Figure 26: Embedded Gui, Configuration Page In Setup Mode

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Diagnostics Page – Setup Mode There is no difference between this page in “Setup Mode” versus this page in “Monitor Mode.” To learn more on its features, please see the Diagnostics Page section on page 62. Configuration Page –...
  • Page 80 Setup Mode Zeroing the MFC For the P9B MFC there are “Zero Flow” and “Zero Pressure” options. Before zeroing the value make sure the “Zero Adjustment” procedure on page 73 has been followed correctly. To zero the flow, press the “Zero Flow”...

  • Page 81: Figure 27: Embedded Gui, Optional Pc Page In Setup Mode (15 Pin D Analog Only)

    Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics Figure 27: Embedded GUI, Optional PC Page in Setup Mode (15 pin D Analog Only) Enabling the Optional Input To enable the Optional Input, check the “Enable Optional Input” box and then click the “Set” button. You should now see the fields below the checkbox become enabled (text darkens).

  • Page 82: Figure 28: Embedded Gui, Plot Page With Enabled Optional Input (15 Pin D Analog Only)

    Chapter Six: Embedded Web-Based GUI and Diagnostics Setup Mode Command Min Offset: The Command Min Offset has its biggest effect on the valve opening time (dead- time) and initial ramp to setpoint and the amount of overshoot that may result. A MFC is typically used as a PI controller only.

  • Page 83: Tuning The Mfc For Optional Pc

    Tuning the MFC for Optional PC Chapter Six: Embedded Web-Based GUI and Diagnostics The Optional PID parameters are always settable on the plot page, but they will have no effect unless the Optional Input is enabled. The following section discusses tuning the PID values. A MFC is typically used as a PI controller only.

  • Page 84: Figure 30: Effects Of The Integral Control

    Chapter Six: Embedded Web-Based GUI and Diagnostics Tuning the MFC for Optional PC The proportional control setting (Kp) has a minimum value of zero but no maximum value. The factory- shipped setting is for a typical mass flow control system with Nitrogen as the process gas. The actual value depends on the configuration of the FC.
  • Page 85 Tuning the MFC for Optional PC Chapter Six: Embedded Web-Based GUI and Diagnostics Adjusting the Proportional and Integral Control and Optional Command Min Offset Over Ethernet you have the ability to view the current values for the proportional control setting (Kp), the integral control setting (Ki) and the Optional Command Min Offset, and change them.
  • Page 86 Chapter Six: Embedded Web-Based GUI and Diagnostics Tuning the MFC for Optional PC...

  • Page 87: Chapter Seven: Maintenance

    Monthly, as part of a normal preventative maintenance procedure. Methods to Adjust the MFC Flow Zero There are multiple methods to adjust the Flow Zero of the P9B MFC. The methods available depend on the I/O type, either analog or digital.
  • Page 88 Via the protocol Zero Service.  For DeviceNet – Refer to “MKS P9 Devicenet Profile Document”.  For RS485 – Refer to “MKS Document, Command Specification, P9 RS485 Interface”. Flow Zero Adjustment Procedure 1) Assure that the MFC is setup in the exact process conditions: a) Verify that the MFC is installed in the final equipment and orientation (base up, base down, vertical flow up, etc.)

  • Page 89: Pressure Zero Adjustment

    Monthly, as part of a normal preventative maintenance procedure. Methods to Adjust the MFC Pressure Zero There are multiple methods to adjust the Pressure Zero of the P9B MFC. The methods available depend on the I/O type, either analog or digital.
  • Page 90 Via the protocol Zero Service.  For DeviceNet – Refer to “MKS P9 Devicenet Profile Document”.  For RS485 – Refer to “MKS Document, Command Specification, P9 RS485 Interface”. Pressure Zero Adjustment Procedure 1) Assure that the MFC is setup in the exact process conditions: a) Verify that the MFC is installed in the final equipment and orientation (base up, base down, vertical flow up, etc.)
  • Page 91 Pressure Zero Adjustment Chapter Seven: Maintenance DeviceNet Zeroing Commands The MFC must be in the executing state then send the zero service with a target value of zero. The following assumes explicit messaging only using the DeviceNet communication protocol. Place the device in the Executing State through the S-Device Supervisor Object: Note the response Status: Success The following DeviceNet Command places the device in executing.
  • Page 92 Chapter Seven: Maintenance Pressure Zero Adjustment This page intentionally left blank.

  • Page 93: Chapter Eight: Troubleshooting

    Troubleshooting Chart Chapter Eight: Troubleshooting Chapter Eight: Troubleshooting Troubleshooting Chart Table 14: Troubleshooting Chart Symptom Possible Cause Check/Corrective Action MFC display does not No power Check power source light Low power Measure voltage 11-25 VDC (DNet) Wrong cable Check cable Bad cable connection Check pin(s) continuity MFC does not respond to...
  • Page 94 MFC. If flow present, possible clogged sensor MFC control circuit failure Run MFC diagnostics. If error results, contact MKS service center. MFC shows output flow > MFC valve full open Check valve current for maximum FS (overrange)
  • Page 95 MFC valve partial contamination Cycle-purge device, check valve setpoint @ higher flows, current but will not go to 0 Faulty control valve, adjustment Run MFC diagnostics, call MKS or electronics service center Inlet pressure too high Decrease inlet pressure Device zero offset...
  • Page 96 Check MFC active gas using digital correct gas - actual gas used interface or Ethernet GUI different MFC control parameters set Contact MKS service center incorrectly MFC output slow to Inlet pressure too low Increase inlet pressure respond to setpoint...
  • Page 97 Troubleshooting Chart Chapter Eight: Troubleshooting - Network status LED Green Link OK, On-line, Connected The device in on-line and has connection in the established state. - For a Group 2 only device it means that this device is not allocated to a master.
  • Page 98 Chapter Eight: Troubleshooting Troubleshooting Chart Flashing Green Device in Standby (The Device The device needs commisioning due Needs Commissioning) to configuration missing, incomplete or incorrect. Unrecoverable Fault The device has an unrecoverable fault; may need replacing. Flashing Red Minor Fault Recoverable Fault Flashing Red &...
  • Page 99 Troubleshooting Chart Chapter Eight: Troubleshooting This page intentionally left blank.

  • Page 101: Appendix A: Product Specifications

    Appendix A: Product Specifications Performance Specifications –P9B Appendix A: Product Specifications Performance Specifications –P9B Full Scale Flow (N2 equivalent) 5-50000 sccm Maximum Inlet Pressure 150 psig, limited to maximum differential pressure across MFC. Normal Operating Pressure Differential (with atmospheric 10 to 5000 sccm, 10 to 40 psid...

  • Page 102: Electrical Specifications

    Specifications are subject to change without notice. Appendix A: Product Specifications Mechanical Specifications Mechanical Specifications Fittings (compatible with) Swagelok, 4 VCR, 1-1/8” surface mount (C-seal, W-seal) Display 4 digits for value, 4 characters for unit Leak Integrity External (scc/sec He) <...
  • Page 103 Appendix A: Product Specifications Electrical Specifications Digital I/O (DeviceNet) Input Voltage Required +11 to +25 VDC Max current at start-up (first 5 sec.) 15VDC (±5 %) @ 350 mA Typical current at steady state 15VDC (±5 %) @ 280 mA Data Rate/Network Length Date Rate (User selectable) 125 Kbps, 500m (1,640 ft)
  • Page 104 Electrical Specifications Appendix A: Product Specifications Digital I/O (RS485) Input Voltage Required +15 to +25 VDC Max current at start-up (first 5 sec.) 15VDC (±5 %) @ 350 mA Typical current at steady state 15VDC (±5 %) @ 280 mA Date Rate/Network Length Date Rate (User selectable) 9.6 KBaud, 1200 m (4000 ft.)
  • Page 105 Appendix A: Product Specifications Electrical Specifications...

  • Page 106: Appendix B : Model Code Explanation

    Type P9B Mass Flow Controller (multigas, multi-range, pressure insensitive – standard length) CCC=P9B. Gas Code (GGG) – Reference SEMI E52, Practice for Referencing Gases and Gas Mixtures Note: Contact MKS Applications Engineering if the desired gas is not listed in the table which follows. Code...
  • Page 107 Appendix B : Model Code Explanation Model Code Description Carbon Tetrachloride CCl4 Carbon Tetrafluoride (R-14) Carbonyl Sulfide Chlorine Chlorine Trifluoride ClF3 Chlorodifluoromethane (R-22) CHClF2 Chloroform (Trichloromethane) CHCl3 Chloropentafluoroethane (R-115) C2ClF5 Chlorotrifluoromethane (R-13) CClF3 Cyanogen C2N2 Cyanogen Chloride ClCN Cyclopropane C3H6 Deuterium Diborane B2H6...
  • Page 108 Model Code Description Appendix B : Model Code Explanation Hydrogen Selenide H2Se Hydrogen Sulfide Iodine Pentafluoride Isobutane C4H10 Isobutylene C4H8 Krypton Methane Methanol CH4O Methyl Acetylene C3H4 Methyl Bromide CH3Br Methyl Chloride CH3Cl Methyl Fluoride CH3F Methyl Mercaptan CH4S Methylamine CH5N Methyltrichlorosilane CH3Cl3Si...
  • Page 109 Appendix B : Model Code Explanation Model Code Description Sulfur Tetrafluoride Sulfuryl Fluoride SO2F2 Tetrafluoroethane (R-134a) C2H2F4 Titanium Tetrachloride TiCl4 Toluene C7H8 Trans-Butene C4H8 Trichloroethane C2H3Cl3 Trichlorofluoromethane (R-11) CCl3F Trichlorosilane SiHCl3 Trichlorotrifluoroethane (R-113) C2Cl3F3 Trifluoromethane (Fluoroform R-23) CHF3 Trimethoxyborine C3H9BO3 Trimethylamine C3H9N Tungsten Hexafluoride...
  • Page 110 Downport C-Seal per SEMI 2787.1 Downport W-Seal per SEMI 2787.3F Applicable to 1.125” width product. For 1.5” wide product, contact MKS Applications. Connector – Control I/O (W) The MFC’s connector is designated by a single number code. The MFC is also available with a DeviceNet connector.
  • Page 111 Model Code Description...

  • Page 112: Appendix C: Health And Safety Form

    Model Code Description Appendix C: Health and Safety Form Appendix C: Health and Safety Form...

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