MKS Mass-Flo 1679B Instruction Manual
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MKS Mass-Flo 1679B Instruction Manual

MKS Mass-Flo 1679B Instruction Manual

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MKS Mass-Flo 1679B Instruction Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 118719-P1 Rev B, 12/97 Instruction Manual MKS Type 1679B ® Mass-Flo Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
  • Page 4 118719-P1 REV B, 12/97 MKS Type 1679B ® Mass-Flo Controller Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 6: Table Of Contents

    Table of Contents Table of Contents Mass Flow Controller Safety Information................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction ....................... 5 Design Features.....................
  • Page 7 Table of Contents P. C. Edge Card Connector ................20 The Gas Correction Factor (GCF)................21 How To Read the Flow Output Directly ..............22 Chapter Four: Operation ......................23 How To Start Up the Flow Controller.................23 How To Zero the Flow Controller ................24 How To Adjust the Controller Gain................25 How To Override the Valve..................26 Priority of the Commands ................26...
  • Page 8 Table of Contents Appendix D: Model Code Explanation .................. 45 Model Code....................... 45 Index............................49 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 9 Table of Contents Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 10 Figure 6: Wiring Diagram for an Input Divider..............22 Tables Table 1: Definition of Symbols Found on the Unit ..............2 Table 2: MKS Cables .......................15 Table 3: 9-Pin Type “D” Connector Pinout................18 Table 4: 15-Pin Type “D” Connector Pinout................19 Table 5: 20-Pin Edge Card Connector Pinout ................20 Table 6: Troubleshooting Chart ....................31...
  • Page 11 List of Figures and Tables viii Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 12: Mass Flow Controller Safety Information

    Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 13: Symbols Found On The Unit

    Symbols Found on the Unit Mass Flow Controller Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5019 IEC 417, No.5008...

  • Page 14: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 15 Safety Procedures and Precautions Mass Flow Controller Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).

  • Page 16: Chapter One: General Information

    The Type 1679B All Metal Mass-Flo controller accurately measures and controls the mass flow rates of gases, largely independent of gas pressure or temperature. Based upon a patented MKS measurement technique, the instrument is a laminar flow device whose precise indication of mass flow is achieved through the use of a bypass element in parallel with a sensor tube.

  • Page 17: Design Features

    Introduction Chapter One: General Information Design Features The design of the 1679 flow controller incorporates an advanced flow sensor, a new control valve, and an optimized bypass. (U.S. and Foreign Patents on the sensor and valve) . The latest generation two-element sensing circuit provides accurate, repeatable performance even in low flow ranges (<...

  • Page 18: How This Manual Is Organized

    Chapter One: General Information How This Manual is Organized How This Manual is Organized This manual is designed to provide instructions on how to set up and install a Type 1679 unit. Before installing your Type 1679 unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual.

  • Page 19: Customer Support

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 20: Chapter Two: Installation

    If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping.

  • Page 21: Unpacking Checklist

    Unpacking Checklist Chapter Two: Installation Unpacking Checklist Standard Parts: • The 1679 flow controller Optional Accessories: • Power Supply/Readout device • Cabling to connect the flow controller to the readout device Environmental Requirements Follow the guidelines listed below when installing and using the 1679 flow controller. 1.

  • Page 22: Setup

    Chapter Two: Installation Setup Setup Follow the guidelines below when setting up the 1679 flow controller. 1. Set the controller into position where it will be connected to a gas supply. Placement of flow components in an orientation other than that in which they were calibrated (typically horizontal) may cause a small zero shift.

  • Page 23: Dimensions

    Setup Chapter Two: Installation Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Controller Gain Zero Adjust 4.99 (126.7) with Type "D" connector 4.80 (121.9) with recessed P.C. Edge Board connector 3.00 (76.2) 0.50 (12.7) Cajon 4-VCR or compatible 4.88 (123.9) shown ¼...

  • Page 24: Gas Line Connections

    Chapter Two: Installation Gas Line Connections 1.45 (36.8) Figure 2: Side View of the 1679 Flow Controller Gas Line Connections Connect the gas line (via tubing) from the gas supply to the flow controller’s inlet, and from the flow controller’s outlet, to the downstream tubing. Standard Fittings The 1679 flow controller is equipped with Cajon 4-VCR male compatible fittings.

  • Page 25: Mounting A Type 1679 Mfc

    Mounting a Type 1679 MFC Chapter Two: Installation Mounting a Type 1679 MFC Tapped holes are provided in the base of the unit for mounting. Refer to Figure 3 for the size and location of the mounting holes. 2.25 0.38 (9.5) (57.2) 0.35 (8.9) 0.75 (19.1)

  • Page 26: Chapter Three: Overview

    EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. MKS products that meet these requirements are identified by application of the CE Mark. This MKS product meets CE Mark requirements, per EMC Directive 89/336/EEC. To ensure compliance when installed, an overall metal braided shielded cable, properly grounded at both ends, is required during use.

  • Page 27: Generic Shielded Cable Description

    Chapter Three: Overview Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 28: Example 1: Preferred Method To Connect Cable

    Chapter Three: Overview Interface Cables Example 1: Preferred Method To Connect Cable (shown on a pressure transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary)

  • Page 29: Electrical Connections

    Chapter Three: Overview Electrical Connections If you are using the 1679 instrument with any equipment other than corresponding MKS power supply/readout units, consult the manufacturer’s specifications for connection, and for proper electrical and power characteristics. Refer to Appendix A: Product Specifications, page 33, for electrical requirements of the Type 1679 flow controller.

  • Page 30: Table 4: 15-Pin Type "D" Connector Pinout

    Table 4 lists the pinout of the 15-pin Type “D” connector. 15-Pin Type “D” Connector Pinout Pin Number Assignment Pin Number Assignment MKS Test Point No Connection Flow Signal Output Optional Input (0 to +5 VDC) Valve Close Signal Ground...

  • Page 31: P. C. Edge Card Connector

    Electrical Connections Chapter Three: Overview P. C. Edge Card Connector Table 5 shows the pinout of the 20-pin Edge Card connector. 20-Pin Edge Card Connector Pinout Pin Number Assignment Pin Number Assignment Chassis Ground Set Point Input (0 to +5 VDC) Power Supply Ground Signal Ground Flow Output...

  • Page 32: The Gas Correction Factor (Gcf)

    1. When using the GCF, the accuracy of the flow reading may vary by ±5%, however, the repeatability will remain ±0.2% of F.S. 2. All MKS readouts have Gas Correction Adjustment controls to provide direct readout. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 33: How To Read The Flow Output Directly

    10 K Figure 6: Wiring Diagram for an Input Divider Note MKS Types 147/647, 167, 246, 247, 260, and 660 readouts provide gas correction factor adjustment. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 34: Chapter Four: Operation

    (either a Type “D” or a P. C. Edge Card connector) located at the top of the flow controller. Plug the other end of the cable into an MKS or MKS-compatible power supply/readout unit. 3. Apply power to the MFC instrument.

  • Page 35: How To Zero The Flow Controller

    Refer to Figure 1, page 12, for the location of the Zero pot. If you are using an MKS power supply/readout unit, the flow controller can also be zeroed at the front panel of the readout unit. 3. Open the positive shutoff valve.

  • Page 36: How To Adjust The Controller Gain

    Chapter Four: Operation How To Adjust the Controller Gain How To Adjust the Controller Gain Adjust the controller gain if the flow signal oscillates. Reducing the controller gain will reduce the signal oscillation. The controller gain adjustment pot is located on the upstream side of the controller.

  • Page 37: How To Override The Valve

    How To Override the Valve Chapter Four: Operation How To Override the Valve The valve override feature enables the control valve to be fully opened (purged) or closed independent of the set point command signal. Refer to Table 4, page 19, or Table 5, page 20, for the appropriate pin locations.

  • Page 38: Chapter Five: Theory Of Operation

    Chapter Five: Theory of Operation General Information Chapter Five: Theory of Operation General Information The 1679 Flow Controller measures the mass flow rate of a gas and controls the flow rate according to a given set point. The control range is from 2 to 100% of Full Scale (F. S.) with an accuracy of ±...

  • Page 39: Control Circuitry

    Control Circuitry Chapter Five: Theory of Operation Control Circuitry The controller employs the above measurement technique and utilizes a control circuit that provides drive current for the proportioning control valve. The flow controller accepts a 0.050 to 5 VDC set point signal, compares it to its own flow signal, and generates an error voltage.

  • Page 40: Chapter Six: Maintenance

    Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an ERA Number (Equipment Return Authorization Number) before returning the unit to MKS Instruments for service.

  • Page 41: Repair

    Repair Chapter Six: Maintenance Repair Contact any authorized MKS Sales Office or Calibration and Service Center should you encounter any difficulties or problems using your flow controller. Note If it is necessary to return the instrument to MKS for repair, please...

  • Page 42: Chapter Seven: Troubleshooting

    Chapter Seven: Troubleshooting Troubleshooting Chart Chapter Seven: Troubleshooting Troubleshooting Chart Troubleshooting Chart Symptoms Possible Cause Remedy No output or overrange at Improper cable Check cable for type zero (after warm-up) Valve override function Disconnect valve override applied Electronics malfunctioning Return for service Unit indicates a negative flow Unit installed in gas stream Reinstall unit in proper flow backwards...
  • Page 43 Troubleshooting Chart Chapter Seven: Troubleshooting This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 44: Appendix A: Product Specifications

    Appendix A: Product Specifications Performance Specifications Appendix A: Product Specifications Performance Specifications ± 1% F.S. Accuracy Control Range 10, 20, and 50 sccm 1 sccm to 100% F.S. ≥ 2% to 100% F.S. 100 sccm Controller Settling Time ≤ 10, 20, and 50 sccm 1.5 seconds (to within 2% of set point) ≥...

  • Page 45: Environmental Specifications

    Environmental Specifications Appendix A: Product Specifications Environmental Specifications Storage Humidity Range 0 to 95% relative humidity, non-condensing Operating Temperature Range 0° to 50° C (32° to 122° F) Storage Temperature Range -20° to 80° C (-4° to 176° F) Electrical Specifications Connector Options 15-pin Type “D”...

  • Page 46: Physical Specifications

    Appendix A: Product Specifications Physical Specifications Physical Specifications ≤ <5.0 in x ≤ 1.5 in x 3 in Body (height x width x length) without <12.7 cm x ≤ 3.8 cm x 7.6 cm fittings CE Compliance EMC Directive 89/336/EEC Products with Edge Card connectors are not CE compliant.
  • Page 47 Physical Specifications Appendix A: Product Specifications This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 48: Appendix B: Gas Correction Factors

    Appendix B: Gas Correction Factors Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR - - - 0.240 1.293 1.00 Ammonia 0.492 0.760 0.73 1.39 1 Argon 0.1244 1.782 Arsine 0.1167 3.478...
  • Page 49 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorosilane 0.150 4.506 0.40 1,2-Dichlorotetrafluoroethane 0.160 7.626 0.22 (Freon - 114) 1,1-Difluoroethylene 0.224 2.857 0.43 (Freon - 1132A) 2,2-Dimethylpropane 0.3914 3.219 0.22 Ethane...
  • Page 50 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Hydrogen Chloride 0.1912 1.627 1.00 Hydrogen Fluoride 0.3479 0.893 1.00 Isobutylene 0.3701 2.503 0.29 Krypton 0.0593 3.739 1.543 Methane 0.5328 0.715 0.72 Methyl Fluoride...
  • Page 51 5.858 1.32 Empirically defined Consult MKS Instruments, Inc. for special applications. NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia). Standard Temperature is defined as 0 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 52: Appendix C: Mfc Sizing Guidelines

    The flow controller range depends on the desired flow rate and the gas correction factor for the gas to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow rate for other gases may vary.

  • Page 53: How To Determine The Flow Controller Range

    When using a gas with a density higher than nitrogen, be sure that the control valve Full Scale range can accommodate the desired flow rate. Please call the MKS Applications group if you have any questions. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 54: How To Determine The Valve Configuration

    Appendix C: MFC Sizing Guidelines How To Determine the Valve Configuration How To Determine the Valve Configuration 1. Determine the maximum flow coefficient (C v ), for the gas of interest, using the equation: Gas Density (max) = Max. Flow Rate, sccm Pressure Factor 1.293 where:...

  • Page 55: Table 8: Valve Configuration Selection Guide

    How To Determine the Valve Configuration Appendix C: MFC Sizing Guidelines The C v value represents the maximum flow rate for the unit. Choose the valve configuration above your calculated C v value to ensure that the unit can deliver the required flow.
  • Page 56 Appendix D: Model Code Explanation Model Code ® Use the MKS Type 1679 Mass-Flo Controller (MFC) when both gas flow control and measurement are required. The instrument is available with the flow control valve in a normally closed configuration. The desired options are identified in the model code when you order the unit.
  • Page 57 Model Code Appendix D: Model Code Explanation Full Scale Range - sccm of Nitrogen (XXX) The full scale range is indicated by a two digit / one letter code. Full Scale Range Ordering Code 1,000 2,000 5,000 10,000 Fittings (Y) Three types of fittings are available, designated by a single letter code.
  • Page 58 Appendix D: Model Code Explanation Model Code Connector (W) Five types of connectors are available, indicated by a single letter or number code. Ordering Code 9-pin Type “D” 15-pin Type “D” 20-pin Edge Card Digital, RS-485*  Digital, DeviceNet * Consult factory for availability Seals (Z) The all-metal seals are indicated by a single letter code.
  • Page 59 Model Code Appendix D: Model Code Explanation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 60 Index Index Connections, 13 Performance specifications, 33, 34, 35 Connector PID control, 28 Edge Card, 20 Power requirements, 10 Type "D", 18, 19 Product code, 45 Connectors, 6 Control circuitry, 28 Reliability, 6 Customer support, 8 Repair, 30 Returns, 8, 9 Design, 5 Design features, 6 Set point, 5...
  • Page 61 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

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