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Summary of Contents for MKS 153D
- Page 1 115714-P1 Rev D, 3/99 Instruction Manual MKS Type 153D and 1253D Throttle Valve Controllers Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Page 2 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
- Page 3 115714-P1 Rev D, 3/99 MKS Type 153D and 1253D Throttle Valve Controllers...
- Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents Valve Safety Information ....................... 1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Informations relatives à la sécurité pour la valve..............5 Symboles utilisés dans ce manuel d'utilisation ............ - Page 6 Table of Contents 153 Unit: Heated Valves ................26 System Considerations...................26 Size of the 253 Valve..................26 Setup..........................26 Mounting the 153 Unit...................26 Mounting the 1253 Unit.................26 Chapter Three: Overview .......................27 General Information ....................27 Labels ........................28 Serial Number Label ..................28 Pump Label (153 units only)................28 External Connectors and Controls on the 153 Unit .............29 J1 - INPUT Connector ...................29 J2 - POWER Connector .................31...
- Page 7 How To Communicate via RS-232 ................46 How To Connect to a PC................46 How To Change the Dipswitch Settings ............47 How To Connect to the MKS PT-1 ............... 48 Standard Protocol ...................... 49 How To Reset the 153/1253 Controller ............51 Portable Terminal (PT-1) Protocol ................
- Page 8 Table of Contents...
- Page 9 List of Figures and Tables List of Figures and Tables Figures Figure 1: Piping and Cable Interconnections for the Type 153 Unit ........21 Figure 2: Returned Leads Tied to System Ground ..............23 Figure 3: Piping and Cable Interconnections for the Type 1253 Unit ........24 Figure 4: Serial Number Label ....................
- Page 10 List of Figures and Tables viii...
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Page 11: Valve Safety Information
Valve Safety Information Symbols Used in This Instruction Manual Valve Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 12: Symbols Found On The Unit
Symbols Found on the Unit Valve Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008... -
Page 13: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 14 Safety Procedures and Precautions Valve Safety Information DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All valve fittings must be consistent with valve specifications, and compatible with the intended use of the valve.
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Page 15: Informations Relatives À La Sécurité Pour La Valve
Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. -
Page 16: Symboles Apparaissant Sur L'unité
Symboles apparaissant sur l'unité Informations relatives à la sécurité pour la valve Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007... -
Page 17: Mesures De Sécurité Et Précautions
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. - Page 18 Mesures de sécurité et précautions Informations relatives à la sécurité pour la valve PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation. UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE Tous les équipements de la valve doivent être cohérents avec ses spécifications, et compatibles avec l'utilisation prévue de la valve.
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Page 19: Sicherheitshinweise Für Das Ventil
Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Page 20: Erklärung Der Am Gerät Angebrachten Symbole
Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für das Ventil Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzerdung IEC 417, No.5007... -
Page 21: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. - Page 22 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für das Ventil Anweisungen zum Ausblasen des Ventils Das Ventil darf nur unter einer Ablufthaube ausgeblasen werden. Schutzhandschuhe sind zu tragen. Nicht zusammmen mit explosiven Stoffen, Gasen oder Dämpfen benutzen! Um der Gefahr einer Explosion vorzubeugen, darf dieses Produkt niemals zusammen mit explosiven Stoffe aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
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Page 23: Medidas De Seguridad De La Válvula
Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Page 24: Símbolos Hallados En La Unidad
Símbolos hallados en la unidad Medidas de seguridad de la válvula Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra... -
Page 25: Procedimientos Y Precauciones De Seguridad
No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento. - Page 26 Procedimientos y precauciones de seguridad Medidas de seguridad de la válvula USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DE EXPLOSIONES Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal...
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Page 27: Chapter One: General Information
Chapter One: General Information Introduction The MKS Type 153D and Type 1253D “Smart” Throttle Valve Controllers are designed for use in downstream pressure control applications. Both units work with the Type 253 valve and consist of the same electronics but differ in packaging. The 153 unit includes a 253 valve (built into it), a microprocessor, RS-232 communication connections, and driver circuits. -
Page 28: How This Manual Is Organized
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. -
Page 29: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. -
Page 30: Interface Cables
January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark. -
Page 31: Interconnections For The 153 Unit
Chapter Two: Installation Interface Cables Interconnections for the 153 Unit Figure 1 shows a typical set up for the 153 unit. EX T ER N A L GA S SET POI N T PO W ER SU PPLY PR ESSU R E C H A M B ER T R A N SD U C ER PT -1... - Page 32 Interface Cables Chapter Two: Installation The 253 valve, enclosed in the 153 unit, requires +15 to +30 Volts. If you need to power a pressure transducer, you must supply ± 15 VDC to the 153 unit. The 153 unit uses the +15 Volts and sends the ±...
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Page 33: Figure 2: Returned Leads Tied To System Ground
Chapter Two: Installation Interface Cables SET POINT OUTPUT SET POINT SOURCE SET POINT RETURN POWER + 15/30 V POWER SUPPLY POWER GND ANALOG GND PRESSURE SIGNAL Type 153/1253 PRESSURE TRANSDUCER The Type 153 and 1253 units use true differential inputs for the pressure and set point input signals. -
Page 34: Interconnections For The 1253 Unit
± 15 Volts on to the pressure transducer through the INPUT connector (J1). Figure 3 shows the ± 15 Volts being supplied from the MKS 260PS through a CB153-1 cable to the 1253 unit. The pressure transducer power and pressure signal connections are made through J1. -
Page 35: Generic Shielded Cable Guidelines
Chapter Two: Installation Interface Cables Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Page 36: Product Location And Requirements
Some installations require that the exhaust line and throttle valve be heated to prevent exhaust vapors from precipitating out in the exhaust line. For these types of applications, contact MKS Instruments, Inc. System Considerations For best pressure control, locate the pressure transducer and the exhaust valve as close as practical to the process chamber. -
Page 37: Chapter Three: Overview
General Information Chapter Three: Overview General Information MKS products are designed and tested to provide the highest degree of safety attainable. To use your MKS valve safely, you must always conform to the following instructions: • Refer to the valve instruction manual for directions on installation and operation of the valve. -
Page 38: Labels
Serial #: 012345678 Model #: 153DXYZ MKS Instruments, Inc. Made in the USA Figure 4: Serial Number Label The options for the 153 controller are identified in the model code when you order the unit. Refer to Appendix B: Model Code Explanation, page 57, for more information. -
Page 39: External Connectors And Controls On The 153 Unit
Chapter Three: Overview External Connectors and Controls on the 153 Unit External Connectors and Controls on the 153 Unit The 153 unit has two external connectors: J1 and J2. Figure 6 shows the location of the two connectors and the top panel of the 153 unit. Manual Switch O P E N C L O S E... -
Page 40: Table 7: Input Connector (J1) Pinout
External Connectors and Controls on the 153 Unit Chapter Three: Overview INPUT Connector (J1) Pinout Description Also connects to J2 Pin Chassis Ground TX (RS-232) RXD (RS-232) No Connection No Connection No Connection Digital Common +5 Volt Output (Powers portable terminal) Set Point Input (Hi side) Set Point Return (Lo side) Power Common (Return for power supply) -
Page 41: J2 - Power Connector
Chapter Three: Overview External Connectors and Controls on the 153 Unit J2 - POWER Connector J2 is a 9-pin male Type “D” connector that serves as the POWER connector. It contains pins for Power Input, Pressure Input, and Limit-Switch Outputs. POWER Connector (J2) Pinout Description Also connects to J1 Pin... -
Page 42: External Connectors And Controls On The 1253 Unit
External Connectors and Controls on the 1253 Unit Chapter Three: Overview External Connectors and Controls on the 1253 Unit The 1253 controller has three external connectors: J1, J2, and J3. Figure 7 shows the front panel of the 1253 unit. Figure 7: Front Panel of the 1253 Unit The J1 INPUT connector and the J2 POWER connector function exactly the same on the 1253 unit as they do on the 153 unit. -
Page 43: Manual Switch
Chapter Three: Overview External Connectors and Controls on the 1253 Unit VALVE Connector (J3) Pinout Description Motor upper winding (Lo side) Motor upper winding (Hi side) Digital Ground Open Limit-Switch Close Limit-Switch Motor lower winding (Lo side) Motor lower winding (Hi side) +5 VDC for opto switches Motor return Table 9: VALVE Connector (J3) Pinout... -
Page 44: Internal Controls On The 153/1253 Controller
Internal Controls on the 153/1253 Controller Chapter Three: Overview Internal Controls on the 153/1253 Controller The dipswitch bank on the motherboard provides the connections for all the internal controls. Figure 8 shows the location of the dipswitch bank inside the 153/1253 unit. Dipswitch Bank Figure 8: Dipswitch Bank on the Motherboard The dipswitch bank on the motherboard (CPU board) has 8 dipswitches that allow you to set the... -
Page 45: Table 10: Explanation Of The Dipswitch Settings
Sxxx.x. When ON, the set point entry is S1xxx.x. The extra 1 makes this entry compatible with other MKS instruments (ex. Types 152, 153A, and 112). Switch 1: Selects the set point control action. When the switch is OFF, a zero to full scale set point produces an open to close valve action (normal control). -
Page 46: Factory Settings
Factory Settings Chapter Three: Overview Factory Settings RS-232 Configuration The 153/1253 unit is shipped with the internal dipswitches set as shown in Table 10, page 35. Refer to Figure 8, page 34, for the location of the dipswitch bank on the motherboard. Table 11 shows the factory configuration for the RS-232 communications parameters. -
Page 47: Control Parameters
Chapter Three: Overview Factory Settings Control Parameters Table 12 lists the factory default settings for the control parameters. Factory Default Control Parameter Parameter Setting Control Type Pressure Set Point Type Analog Set Point Control Normal Pressure Full Scale. + 10 Volts Set Point Full Scale + 10 Volts Gain Setting... -
Page 48: Power-Down Constants
Power-Down Constants Chapter Three: Overview Power-Down Constants The 153/1253 unit saves several constants in non-volatile RAM when the power is turned off. When the power is restored, the 153/1253 unit “remembers” these settings. The parameters are listed below: • Number of valve steps •... -
Page 49: Valve Slippage Signal
Chapter Three: Overview Valve Slippage Signal Valve Slippage Signal The Type 153/1253 unit has a “Valve Slipped” signal that can be useful when diagnosing exhaust valve or system problems. The Valve Slipped signal is only available through the RS-232 interface. When the 153/1253 unit contacts either of the limit switches, the internal position signal should equal the appropriate valve position (0 for close, 100% for open). - Page 50 Valve Slippage Signal Chapter Three: Overview This page intentionally left blank.
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Page 51: Chapter Four: Operation
Chapter Four: Operation General Information Chapter Four: Operation General Information The Type 153/1253 controller accepts pressure or position set points from an external computer (via RS-232) or an external analog voltage source, and use an internal digital “PID” algorithm to determine valve position. -
Page 52: How To Learn The Valve With The 1253 Controller
Therefore, to ensure proper control you must instruct the 1253 controller to learn the valve it is controlling. You must initiate the learn process via RS-232 communications, on either a PC or a MKS PT-1 portable terminal. Refer to RS-232 Communications, page 46, for more information. -
Page 53: How To Tune The 153/1253 Controller
Chapter Four: Operation How To Tune the 153/1253 Controller How To Tune the 153/1253 Controller 1. Apply power to the 153/1253 unit and turn on the upstream gas source(s). 2. Apply the desired analog set point signal or an RS-232 message. The 153/1253 unit responds by changing the pressure smoothly to the desired value. -
Page 54: How To Calibrate The 153/1253 Controller
Learn number of valve steps You must issue these commands via RS-232 communication. To do this, connect a computer or an MKS PT-1 to the 153/1253 controller. Learn the Analog Set Point Zero 1. Supply zero input voltage on INPUT connector, J1, pin 9. -
Page 55: How The 153/1253 Controller Handles The Calibration Voltages
Chapter Four: Operation How To Calibrate the 153/1253 Controller Learn the Analog Pressure Zero 1. Warm-up the transducer and pump it below its resolution. 2. Send the Learn Analog Pressure Zero command: Type Z2, and press ENTER The 153/1253 controller verifies that the pressure transducer is properly warmed-up and pumped below its resolution. -
Page 56: How To Switch Between Normal And Reverse Modes
How To Switch Between Normal and Reverse Modes Chapter Four: Operation How To Switch Between Normal and Reverse Modes The Normal/Reverse Switch (switch 1 on the Dipswitch bank ) switches the Type 153/1253 controller from a “normal” mode of operation, to “reverse” mode of operation. The modes are: Normal - Pressure above the set point causes the valve to move toward open position. -
Page 57: How To Change The Dipswitch Settings
Chapter Four: Operation How To Communicate via RS-232 2. Configure identical communication parameters on the 153/1253 unit and the PC. Table 13 lists the communication parameters and the 153/1253 unit default settings. RS-232 Communications Settings Parameter Settings Baud Rate 9600 Parity NONE Stop Bits... -
Page 58: How To Connect To The Mks Pt-1
You must reboot the system before any changes to the dipswitch setting are recognized by the 153/1253 unit. 5. Replace the cover of the unit. How To Connect to the MKS PT-1 The PT-1 comes with its RS-232 communication cable attached. •... -
Page 59: Standard Protocol
Chapter Four: Operation Standard Protocol Standard Protocol Table 14 lists the standard protocol commands that enable you to operate the 153/1253 controller remotely. Commands must be followed by ENTER, < ↵ > , and dipswitch 6 must Note be set to OFF. Table 9 lists the standard protocol commands: Standard Protocol Commands Command... -
Page 60: Table 15: Report Command Responses
Standard Protocol Chapter Four: Operation Report Command Responses Parameter Responses Units Digital Pressure Set Point S xxx.x Percent Gain G xxx.x Percent Lead L xxx.x Percent Analog Set Point A xxx.x Percent Pressure P xxx.x Percent Position V xxx.x Degrees Slipped ? 0 = OK 1 = Slipped... -
Page 61: How To Reset The 153/1253 Controller
Chapter Four: Operation Portable Terminal (PT-1) Protocol How To Reset the 153/1253 Controller The “B” command resets the controller, relearns the valve, and establishes settings for the lead, gain, set point, and the full scale and zero voltage levels for both the pressure input and set point input. -
Page 62: New Set Point Syntax
When dipswitch 2 is ON, (the default setting) the set point entry is downwardly compatible with other instruments such as MKS models 152, 153A, and 112. When dipswitch 2 is OFF, the “1” is dropped from the command string and the syntax becomes: Sxxx.x. -
Page 63: Chapter Five: Maintenance
Chapter Five: Maintenance General Information Chapter Five: Maintenance General Information Periodically check for wear on the cables and inspect the enclosure for visible signs of damage. How To Clean the Unit Periodically wipe down the unit with a clean, damp cloth. - Page 64 General Information Chapter Five: Maintenance This page intentionally left blank.
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Page 65: Appendix A: Product Specifications
Appendix A: Product Specifications Electrical Specifications Appendix A: Product Specifications Electrical Specifications CE Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Directive 89/392/EEC Machinery Directive Control Lines OPEN and CLOSE Valve control lines (Activated by an active low TTL) Hi input maximum voltage is 30 Volts and drawing less than 200 µA of leakage current Input Power Minimum =+14 VDC to maximum +30 VDC @ less than 5... -
Page 66: Performance Specifications
Performance Specifications Appendix A: Product Specifications Performance Specifications Display One Red LED for OPEN Limit Switch One Red LED for CLOSE Limit Switch One Green LED for Power Manual Switch Toggle switch directs valve to OPEN or CLOSE position 153 only - Normal/Hold Switch toggles valve between normal operation and hold operation which holds the valve in position Valve Speed - OPEN to CLOSE... -
Page 67: Appendix B: Model Code Explanation
The type number designates the model number of the valve. Type 153 with ASA Flanges Type Nominal Inside ASA Flange Flapper Number Diameter Size O-Ring inches (mm) 153D-2-2-1 1.888 (48) 2” 153D-2-2-2 1.950 (50) 2” 153D-60-2-1 2.362 (60) 2” 153D-60-2-2 2.362 (60) 2”... - Page 68 Appendix B: Model Code Explanation Type 153 with KF or NW ISO Flanges Type Nominal Inside ISO Flange Flapper Number Diameter Size O-Ring inches (mm) 153D-20-40-1* 0.779 (20) KF-40 153D-20-40-2* 0.779 (20) KF-40 153D-1-40-1* 1.270 (32) KF-40 153D-1-40-2* 1.270 (32)
- Page 69 Appendix B: Model Code Explanation Model Code for the Type 153 Unit Type 253 with CF Flanges Type Nominal Inside CF Flange Size Flapper Number Diameter O-Ring inches (mm) 153D-20-2CF-1 0.779 (20) 2¾” 153D-20-2CF-2 0.779 (20) 2¾” 153D-1-2CF-1 1.270 (32) 2¾” 153D-1-2CF-2 1.270 (32) 2¾”...
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Page 70: Model Code For The Type 1253 Unit
Model Code for the Type 1253 Unit Appendix B: Model Code Explanation Model Code for the Type 1253 Unit The model code for this stand-alone electronics module is: 1253D There are no options to specify through the model code. -
Page 71: Index
Index Index CF flanges model codes, 59 1253 controller Connectors external controls, 32–33 1253 unit, 32–33 front panel, 32 153 unit, 29–31 internal controls, 34–35 Control method selection, 35 MAN switch, 33 Control parameters, 41 mounting, 26 Control parameters, factory defaults, 37 VALVE connector, 32 Control parameters, setting, 43 153 and 1253, descriptions of, 17... - Page 72 Medidas de seguridad de la válvula, 13 data bits, 36, 47 Model codes, 57–60 end-of-line delimiter, 35 Motherboard, 34 factory configuration, 36 Mounting MKS PT-1, 48 1253 controller, 26 NULL MODEM cable, 46 153 controller, 26 parity, setting, 35 portable terminal protocol, 51 protocol, selecting, 35...
- Page 73 Index Serial number label, 28 Set point, 41 control action, 35 format, 35 signal, 49 signal source, 35 syntax, 52 Sicherheitshinweise für das Ventil, 9 Standard protocol, 49–51 System considerations, 26 Tuning, 43 Unpacking instructions, 19 VALVE connector, 32 Valve Safety Information, 1 Valve slippage signal, 39...
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