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Summary of Contents for MKS Mass-Flo 1479A
- Page 1 119474-P1 Rev B, 10/97 Instruction Manual MKS Type 1479A ® Mass-Flo Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
- Page 2 For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
- Page 3 119474-P1 Rev B, 10/97 MKS Type 1479A ® Mass-Flo Controller...
- Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents Mass Flow Controller Safety Information................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction ....................... 5 Design Features..................... - Page 6 Table of Contents Electrical Connections....................19 9-Pin Type “D” Connector................19 15-Pin Type “D” Connector ................20 P.C. Edge Card Connector ................21 The Gas Correction Factor (GCF)................22 Control Valve......................23 Chapter Four: Operation ......................25 How To Start Up the Flow Controller.................25 How To Zero the Flow Controller ................26 How To Adjust the Controller Gain................27 How To Override the Valve..................28 Priority of the Commands ................28...
- Page 7 Table of Contents How To Determine the Flow Controller Range ............52 How To Determine the Valve Configuration .............. 53 Appendix D: Model Code...................... 57 Model Code....................... 57 Index............................61...
- Page 8 Table of Contents...
- Page 9 Figure 10: The PC Board....................... 41 Tables Table 1: Definition of Symbols Found on the Unit ..............2 Table 2: MKS Interface Cables....................16 Table 3: 9-Pin Type “D” Connector Pinout................19 Table 4: 15-Pin Type “D” Connector Pinout................20 Table 5: 20-Pin Edge Card Connector Pinout ................21 Table 6: Troubleshooting Chart ....................35...
- Page 10 List of Figures and Tables viii...
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Page 11: Mass Flow Controller Safety Information
Mass Flow Controller Safety Information Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 12: Symbols Found On The Unit
Mass Flow Controller Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008 IEC 417, No.5007... -
Page 13: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 14 Mass Flow Controller Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
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Page 15: Chapter One: General Information
The 1479 mass flow controller (MFC) can interface to complementary MKS equipment (Types 147/647, 160, 246, 247) to display the reading and to provide the power, and set point commands. -
Page 16: Reliability
Introduction Chapter One: General Information Reliability To help provide excellent reliability, the design contains a low mechanical and electronic components count and has successfully passed the following tests: • STRIFE, including temperature cycling and vibration (sine and random tests) and with an overall metal braided, shielded cable, properly grounded at both ends: •... -
Page 17: How This Manual Is Organized
Chapter One: General Information How This Manual is Organized How This Manual is Organized This manual is designed to provide instructions on how to set up and install a Type 1479 unit. Before installing your Type 1479 unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. -
Page 18: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. -
Page 19: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. -
Page 20: Unpacking Checklist
Unpacking Checklist Chapter Two: Installation Unpacking Checklist Standard Parts: • The 1479 flow controller Optional Accessories: • Electrical Connector Accessories Kit, 1479A-K1 (includes a mating connector for the I/O connector) • Power Supply/Readout device • Cabling to connect the flow controller to the readout device Environmental Requirements Follow the guidelines listed below when installing and using the 1479 flow controller. -
Page 21: Setup
Chapter Two: Installation Setup Setup Follow the guidelines below when setting up the 1479 flow controller. 1. Set the controller into position where it will be connected to a gas supply. Placement of flow components in an orientation other than that in which they were calibrated (typically horizontal) may cause a small zero shift. -
Page 22: Dimensions
Setup Chapter Two: Installation Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Controller Gain Zero Adjust 5.49 (139.5) with Type "D" connector 5.30 (134.6) with recessed P.C. Edge Board connector 3.00 (76.2) 0.50 (12.7) Cajon 4-VCR or compatible 4.88 (123.9) shown 1/4"... -
Page 23: Gas Line Connections
Chapter Two: Installation Gas Line Connections 1.45 (36.8) Figure 2: Side View of the 1479 Flow Controller Gas Line Connections Connect the gas line (via tubing) from the gas supply to the flow controller’s inlet, and from the flow controller’s outlet, to the downstream tubing. Standard Fittings The 1479 flow controller is equipped with Cajon 4-VCR male compatible fittings. -
Page 24: Figure 3: Mounting Dimensions Of The 1479 Flow Controller
Mounting a Type 1479 MFC Chapter Two: Installation 2.25 0.38 (9.5) (57.2) 0.35 (8.9) 0.75 (19.1) 2.75 0.13 (3.2) (69.9) 8-32 UNC-2B x 0.25 DP, 4 places Figure 3: Mounting Dimensions of the 1479 Flow Controller... -
Page 25: The Type 2479 Mfc
Thread) internal fitting. The positive shutoff valve requires approximately 75 psig to open the valve. A mounting plate (MKS p/n 119000-P1) is attached to the unit to secure it in place and make it a drop-in replacement for other MKS MFCs with close coupled shutoff valves. -
Page 26: Interface Cables
EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. MKS products that meet these requirements are identified by application of the CE Mark. This MKS product meets CE Mark requirements, per EMC Directive 89/336/EEC. To ensure compliance when installed, an overall metal braided shielded cable, properly grounded at both ends, is required during use. -
Page 27: Generic Shielded Cable Description
Interface Cables Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;... -
Page 28: Example 1: Preferred Method To Connect Cable
Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a pressure transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary) -
Page 29: Chapter Three: Overview
Chapter Three: Overview Electrical Connections If you are using the 1479 instrument with any equipment other than corresponding MKS power supply/readout units, consult the manufacturer’s specifications for connection, and for proper electrical and power characteristics. Refer to Appendix A: Product Specifications, page 43, for electrical requirements of the Type 1479 flow controller. -
Page 30: 15-Pin Type "D" Connector
15-Pin Type “D” Connector Table 4 lists the pinout of the 15-pin Type “D” connector for the 1479 mass flow controller. 15-Pin Type “D” Connector Pinout Assignment Assignment MKS Test Point No Connection Flow Signal Output Optional Input (0 to +5 VDC) -
Page 31: P.c. Edge Card Connector
+15 VDC Valve Open (TTL low) Optional Input No Connection No Connection -15 VDC No Connection MKS Test Point No Connection No Connection Signal Common Valve Close (TTL low) Table 5: 20-Pin Edge Card Connector Pinout Note 1. The “No Connection” pin assignment refers to a pin with no internal connection. -
Page 32: The Gas Correction Factor (Gcf)
1. When using the GCF, the accuracy of the flow reading may vary by ±5%, however, the repeatability will remain ±0.2% of F.S. 2. All MKS readouts have Gas Correction Adjustment controls to provide direct readout. 3. MKS Types 147/647, 167, 246, 247, 260, and 660 readouts provide gas correction factor adjustment. -
Page 33: Control Valve
Chapter Three: Overview Control Valve Control Valve The Control Valve is a specially constructed solenoid valve in which the armature (moving valve mechanism) is suspended by two springs. This arrangement ensures that no friction is present and makes precise control possible. The 1479 controller has the valve normally closed; the control current is used to lift the armature and plug assembly from the seat, allowing a controlled flow of gas. - Page 34 Control Valve Chapter Three: Overview This page intentionally left blank.
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Page 35: Chapter Four: Operation
(either a 15-pin Type “D” or a PC Edge Card connector) located at the top of the flow controller. Plug the other end of the cable into an MKS or MKS-compatible power supply/readout unit. 3. Apply power to the MFC instrument. -
Page 36: How To Zero The Flow Controller
Refer to Figure 1, page 12, for the location of the Zero pot. If you are using an MKS power supply/readout unit, the flow controller can also be zeroed at the front panel of the readout unit. 3. Open the positive shutoff valve. -
Page 37: How To Adjust The Controller Gain
Chapter Four: Operation How To Adjust the Controller Gain How To Adjust the Controller Gain Adjust the controller gain if the flow signal oscillates. Reducing the controller gain will reduce the signal oscillation. The controller gain adjustment pot is located on the upstream side of the controller. -
Page 38: How To Override The Valve
How To Override the Valve Chapter Four: Operation How To Override the Valve The valve override feature enables the control valve to be fully opened (purged) or closed independent of the set point command signal. Refer to Table 3, page 19, Table 4, page 20, or Table 5, page 21, for the appropriate pin locations. -
Page 39: The Optional Input
Chapter Four: Operation The Optional Input The Optional Input The 1479/2479 MFCs can control flow based on a 0 to 5 Volt signal from an external sensing device using the optional input feature. A common application of this feature is for pressure control using input from a pressure transducer. - Page 40 The Optional Input Chapter Four: Operation This page intentionally left blank.
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Page 41: Chapter Five: Theory Of Operation
Chapter Five: Theory of Operation Flow Path Chapter Five: Theory of Operation The 1479 Flow Controller measures the mass flow rate of a gas and controls the flow rate according to a given set point. The control range is from 2 to 100% of Full Scale (F.S.) with an accuracy of ±1% of F.S. -
Page 42: Control Circuitry
Control Circuitry Chapter Five: Theory of Operation Control Circuitry The controller employs the above measurement technique and utilizes a control circuit that provides drive current for the proportioning control valve. The flow controller accepts a 0 to 5 VDC set point signal, compares it to its own flow signal, and generates an error voltage. This error signal is then conditioned by a PID (Proportional-Integral-Derivative) algorithm and amplified so that it can reposition the control valve, thus reducing the control error to zero. -
Page 43: Chapter Six: Maintenance
Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an ERA Number (Equipment Return Authorization Number) before returning the unit to MKS Instruments for service. - Page 44 Zero Adjustment Chapter Six: Maintenance This page intentionally left blank.
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Page 45: Chapter Seven: Troubleshooting
Chapter Seven: Troubleshooting Troubleshooting Chapter Seven: Troubleshooting Troubleshooting Refer to the troubleshooting chart should you encounter a problem with your 1479 unit. Troubleshooting Chart Symptoms Possible Cause Remedy No output or overrange at Improper cable Check cable for type zero (after warm-up) Valve override function Disconnect valve override applied... - Page 46 Troubleshooting Chapter Seven: Troubleshooting Troubleshooting Chart (Continued) Symptoms Possible Cause Remedy Unit does not achieve full Upstream pressure too low Increase upstream pressure flow Excessive valve preload Readjust the valve, according to How To Adjust the Valve Preload, page 37 Incorrect maximum valve Return for service current setting...
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Page 47: How To Adjust The Valve Preload
Chapter Seven: Troubleshooting How To Adjust the Valve Preload How To Adjust the Valve Preload Caution 1. All valves are adjusted at the factory for proper leak integrity and flow control response. Adjust the valve ONLY if the Troubleshooting Chart, Table 6, page 35, recommends that you do so. 2. -
Page 48: Figure 8: Location Of The Retaining Screws
How To Adjust the Valve Preload Chapter Seven: Troubleshooting 1. Set your processing system to supply the MFC with a non-hazardous gas (Ar, N , or He) and purge thoroughly. Warning You MUST use a “safe” gas while making any valve adjustments to safeguard against inadvertent exposure to any toxic or hazardous gas. -
Page 49: Figure 9: Location Of The Jam Nut And Adjustment Nut
Follow your corporate policy on handling toxic or hazardous gases. Your corporate policy on handling these gases supersedes the instructions in this manual. MKS assumes no liability for the safe handling of such materials. If appropriate, remove the MFC from the process tool and make the adjustments using a surrogate gas. -
Page 50: Table 7: Maximum Valve Current
The MFC output should be 5.0 Volts (100%) and the valve current no greater than the limits in Table 7. If the valve current exceeds these limits, return the unit to MKS for service. If the valve current is less than or equal to the value in Table 7, it must be adjusted. -
Page 51: Figure 10: The Pc Board
Chapter Seven: Troubleshooting How To Adjust the Valve Preload 21. Locate the Current Limiting potentiometer, R85, on the PC board. The potentiometer R85, is located in the top right hand corner of the PC board. It is the only black potentiometer on the board and is much smaller than the other potentiometers. Valve Current Limit Potentiometer Figure 10: The PC Board... -
Page 52: Table 8: Required Valve Current Headroom
How To Adjust the Valve Preload Chapter Seven: Troubleshooting 22. Determine the required valve current limit; add the appropriate headroom from Table 8 to the full scale valve current recorded in step 19. . Required Valve Current Headroom MFC Flow Capacity (N 2 equivalent) Milliamp Value ≤50 sccm 24 mA... -
Page 53: Appendix A: Product Specifications
Appendix A: Product Specifications Performance Specifications Appendix A: Product Specifications Performance Specifications ±1% F.S. Accuracy EMC Directive 89/336/EEC CE Compliance Products with Edge Board connectors and products used with flying leads are not CE compliant. Control range 2.0 to 100% F.S. <... -
Page 54: Environmental Specifications
Environmental Specifications Appendix A: Product Specifications Environmental Specifications Storage Humidity Range 0 to 95% relative humidity, non-condensing Operating Temperature Range 0° to 50° C (32° to 122° F) Storage Temperature -20° to 65° C (-4° to 149 F) Electrical Specifications CE Mark Compliance EMC Directive 89/336/EEC Input voltage/Current required... -
Page 55: Physical Specifications
Appendix A: Product Specifications Physical Specifications Physical Specifications ≤ <5.5 in x ≤ 1.5 in x 3 in Body (height x width x length) without <14.0 cm x ≤ 3.8 cm x 7.6 cm fittings Connector options 9-pin Type “D” 15-pin Type “D”... - Page 56 Physical Specifications Appendix A: Product Specifications This page intentionally left blank.
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Page 57: Appendix B: Gas Correction Factors
Appendix B: Gas Correction Factors Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR - - - 0.240 1.293 1.00 Ammonia 0.492 0.760 0.73 1.39 1 Argon 0.1244 1.782 Arsine 0.1167 3.478... - Page 58 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Dichlorosilane 0.150 4.506 0.40 1,2-Dichlorotetrafluoroethane 0.160 7.626 0.22 (Freon - 114) 1,1-Difluoroethylene 0.224 2.857 0.43 (Freon - 1132A) 2,2-Dimethylpropane 0.3914 3.219 0.22 Ethane...
- Page 59 Appendix B: Gas Correction Factors SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION cal/g o C g/l @ 0 o C FACTOR Hydrogen Chloride 0.1912 1.627 1.00 Hydrogen Fluoride 0.3479 0.893 1.00 Isobutylene 0.3701 2.503 0.29 Krypton 0.0593 3.739 1.543 Methane 0.5328 0.715 0.72 Methyl Fluoride...
- Page 60 0.161 8.360 0.20 (Freon - 113) Tungsten Hexafluoride 0.0810 13.28 0.25 Xenon 0.0378 5.858 1.32 Empirically defined Consult MKS Instruments, Inc. for special applications. NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia). Standard Temperature is defined as 0...
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Page 61: Appendix C: Mfc Sizing Guidelines
The flow controller range depends on the desired flow rate and the gas correction factor for the gas to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow rate for other gases may vary. -
Page 62: How To Determine The Flow Controller Range
= full scale. Note When using a gas with a density higher than nitrogen, be sure that the control valve Full Scale range can accommodate the desired flow rate. Please call the MKS Applications group if you have any questions. -
Page 63: How To Determine The Valve Configuration
Appendix C: MFC Sizing Guidelines How To Determine the Valve Configuration How To Determine the Valve Configuration 1. Determine the maximum flow coefficient (C v ), for the gas of interest, using the equation: Gas Density (max) = Max. Flow Rate, sccm Pressure Factor 1.293 where:... -
Page 64: Table 10: Valve Configuration Selection Guide
How To Determine the Valve Configuration Appendix C: MFC Sizing Guidelines 2. Select the valve configuration with the C v value that is closest to, though larger than, the C v value calculated in step 1. The C v value represents the maximum flow rate for the unit. Choose the valve configuration above your calculated C v value to ensure that the unit can deliver the required flow. - Page 65 Appendix C: MFC Sizing Guidelines How To Determine the Valve Configuration Example Suppose you need to flow boron trichloride at a rate of 250 sccm and the inlet pressure is 20 psia. Your process runs at atmospheric pressure, so the differential pressure is 5 psid. 1.
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Page 67: Appendix D: Model Code
Appendix D: Model Code Model Code ® Use the MKS Type 1479 Mass-Flo Controller (MFC) when both gas flow control and measurement are required. The instrument is available with the flow control valve in a normally closed configuration. The desired options are identified in the model code when you order the unit. - Page 68 Model Code Appendix D: Model Code Full Scale Range - sccm of Nitrogen (XXX) The full scale range is indicated by a two digit / one letter code. Full Scale Range Ordering Code 1,000 2,000 5,000 10,000 20,000 Fittings (Y) Three types of fittings are available, designated by a single letter code.
- Page 69 Appendix D: Model Code Model Code Connector (W) Five types of connectors are available, indicated by a single letter or number code. Ordering Code 9-pin Type “D” 15-pin Type “D” 20-pin Edge Card Digital, RS-485* Digital, DeviceNet * Consult factory for availability Seals (Z) The all-metal seals are indicated by a single letter code.
- Page 70 Model Code Appendix D: Model Code This page intentionally left blank.
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Page 71: Index
Index Index Connections, 13 Leak rate, 15 Connector 1479 Edge Card, 21 Maintenance, 33 1479 Type "D", 19, 20 Manual organization, 7 Control circuitry, 32 Measurement technique, 31 Control valve, 23 Mounting, 13 Customer support, 8 NUPRO valve, 15 Design, 5 Dimensions, 12 Performance specifications, 43 Physical specifications, 45... - Page 72 Index Troubleshooting, 35 Unpacking, 9 checklist, 10 opening, 9 Valve override, 28 Zero, 26...
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