MKS Mass-Flo 1163B Manuals

Manuals and User Guides for MKS Mass-Flo 1163B. We have 1 MKS Mass-Flo 1163B manual available for free PDF download: Manual

MKS Mass-Flo 1159B Manual

MKS Mass-Flo 1163B Manual (57 pages)

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
7
Safety Procedures and Precautions
11
Chapter One: General Information
15
- Introduction
  15
- How this Manual Is Organized
  16
- Customer Support
  17
Chapter Two: Installation
19
Chapter Three: Overview
27
- General
  27
- Figure 6: Dimensions
  28
- Figure 7: NUPRO Valve Dimensions
  28
- NUPRO Positive Shut-Off Valve
  29
- Interface Connectors and Cables
  30
- Electrical Connections
  31
- Type "D" Connector
  31
- Control Valve
  33
Chapter Four: Operation
35
- Warm up and Start up
  35
  - How to Start up the Flow Controller
    35
  - How to Zero the Flow Controller
    36
- Valve Override
  37
- Adjusting the Speed to Set Point
  37
- NUPRO BN Shutoff Valve
  37
Chapter Five: Theory of Operation
39
Chapter Six: Maintenance
45
- Valve Adjustment
  45
- Repair
  46
Table 3: Troubleshooting Chart
47
Chapter Seven: Troubleshooting
47
Appendix A: Product Specifications
49
- General Specifications
  49
- Electrical Specifications
  50
- Mechanical Specifications
  50
Appendix B: Gas Correction Factors
51
Index
55

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