Specification; Specifications - SMC Networks PFM3 Series Operation Manual

Specification

■Specifications

Model
Rated flow
range
Dry air, N
(measurement
∗ 1
range)
CO
2
Dry air, N
Displayable
∗ 2
range
CO
2
Dry air, N
Settable range
∗ 2
CO
2
∗ 2
Minimum set unit
Accumulated pulse flow rate
exchange value
∗ 3
Display unit
∗ 4
Accumulated flow range
Source voltage
Power consumption
Sensor input
Input number 1
Hysteresis
mode
5
Hysteresis∗
Window
comparator
mode
Switch output
Max. load
current
Max. load
voltage
Residual
voltage
Output
protection
Accumulated pulse output
Response time
Repeatability
Voltage output
Output
impedance
Current output
Analog
Max. load
output
impedance
Min. load
impedance
Accuracy
, Ar 0.2 to 10 L/min
2
0.2 to 5 L/min
、Ar 0.2 to 10.5 L/min
2
0.2 to 5.2 L/min
、Ar 0 to 10.5 L/min
2
0 to 5.2 L/min
0.01 L/min
0.1 L/Pulse
24 VDC ripple 10% or less (Protected against inverse connection)
PFM30□: Voltage input 1 to 5 VDC (Input impedance 1 MΩ)
PFM31□: Current input 4 to 20 mA (Input impedance 250 Ω)
NPN or PNP open collector output (Same as the switch output)
±0.1%F.S. or less, Analog output ±0.3%F.S. or less
PFM3
0.5 to 25 L/min
0.5 to 12.5 L/min
0.5 to 26.3 L/min 1 to 52.5 L/min
0.5 to 13.1 L/min 1 to 26.2 L/min
0 to 26.3 L/min 0 to 52.5 L/min
0 to 13.1 L/min 0 to 26.2 L/min
0.1 L/min
0.1 L/Pulse
Real-time flow rate L/min CFM x 10
Accumulated flow L ft
1999999 L
50 mA or less
Variable
Variable
NPN or PNP open collector output: 2 outputs
80 mA
30 VDC (NPN output)
1 V or less (80 mA load current)
Excess current protection
1 s(50 ms/0.5 s/2 s are selectable)
1 to 5 VDC (0 L/min to Max. rated flow)
Approx. 1 kΩ
4 to 20 mA (0 L/min to Max. rated flow)
600 Ω(24 VDC)
50 Ω
±1%F.S. or less (Value to displayed value)
-53-
1 to 50 L/min 2 to 100 L/min
1 to 25 L/min 2 to 50 L/min
2 to 105 L/min
2 to 52 L/min
0 to 105 L/min
0 to 52 L/min
0.1 L/min 0.1 L/min
0.1 L/Pulse 1 L/Pulse
-2
3 -1
x 10
No.PF##-OMJ0018