Parameters For Sputter Coating; Sputter Materials - Leica EM ACE600 Operating Manual

Density is the specific weight (g/m3) of the material. Set if pre-sputtering is
required. Set the pre-sputtering current and time.

4.7.3 Parameters for sputter coating

Current
Material
in mA
Au
Au/Pd
Pt
Pt/Pd
Ag
Cr
W
Ir
Al
Ti
Md
Ni
Cu
Co
* all sputter currents 10% higher than the sputter current (to remove the oxid layer)
** To safe time, the base vacuum can be reduced to the 10‐5 range
*** This rate is only a very rough estimation
In case the vacuum or plasma cannot be stabilized, check if the argon line is
open.
4.7.4

Sputter materials

New sputter materials can be defined. Open Menu, tab file and material
management. Select an existing material or add a new one.
Operating Manual Leica EM ACE600
Parameter sugestions for ACE600
Presput Thic
tering knes Time
in s * s nm
30 ‐ 4 50 5x10‐2
30 ‐ 4 50 5x10‐2
35 ‐ 4 50 5x10‐2
35 ‐ 4 50 5x10‐2
35 30 4 50 4x10‐2
110 120 4 10 8x10‐3
90 60 4 10 8x10‐3
80 ‐ 3 10 8x10‐3
100 60 9 60 1x10‐2
100 60 4 50 1x10‐3
90 60 6 15 8x10‐3
100 60 10 40 2x10‐2
60 30 10 50 2x10‐2
100 60 4 50 2x10‐2
Version 01/19
Sputter
WD Rotation
Vaccum Tilt
mm (1‐5)
mbar
50 3 no 8x10‐5
50 3 no 8x10‐5
50 3 no 8x10‐5
50 3 no 8x10‐5
50 3 no 8x10‐5
50 3 no 2x10‐5
50 3 no 2x10‐5
50 3 no 2x10‐5
50 3 no 5x10‐5
50 3 no 5x10‐5
50 3 no 5x10‐5
50 3 no 5x10‐5
50 3 no 5x10‐5
50 3 no 5x10‐5
Base Expected
Purge
Vacuum rate app.
Vacuum
** ***
8x10‐6 0,1 nm/s
8x10‐6 0,07 nm/s
8x10‐6 0,07 nm/s
8x10‐6 0,07 nm/s
8x10‐6 0,1 nm/s
3x10‐6 0,44 nm/s
3x10‐6 0,4 nm/s
3x10‐6 0,1 nm/s
5x10‐6 0,15 nm/s
5x10‐6 0,12 nm/s
5x10‐6 0,4 nm/s
5x10‐6 0,25 nm/s
5x10‐6 0,2 nm/s
5x10‐6 0.08 nm/s
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