3.
Hold the ion optics assembly by its handles and align the guide pins with the
holes in the vacuum manifold.
4.
Gently lower the ion optics assembly until it is seated on the vacuum manifold.
Ensure that the large o-ring remains in place and does not move out of its
groove in the tub.
5.
Reconnect all cables at the front and rear of the optics assembly.
6.
Make sure that the Sliding Lock attachment on the RF Generator Cable connector is
in the "down" (unlocked) position prior to connecting it to the receptacle on the RF
Generator box as shown in the following figure.
Figure 37 RF G
Figure 37
RF Generator cable
enerator cable connector.
7.
Connect the RF Generator Cable connector to the receptacle on the RF
Generator box. See the following figure.
connector.
Maintenance
103
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