System Description - Keithley S530 Administrative Manual

S530 Administrative Guide
If you have any questions after reviewing this information, contact your local Keithley Instruments representative or
call one of our applications engineers at 1-888-KEITHLEY (1-888-534-8453) within the U.S. and Canada. You can
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System description

The Keithley Instruments S530 Parametric Test System is a configurable, instrument-based system for
semiconductor parametric characterization and testing. There are two different S530 systems available:
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S530 low-current parametric test system
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Consists of two to four (up to eight channels) source measure units (SMUs), one switching matrix, an
optional capacitance/voltage (C-V) unit, and a LO patch panel.
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Two-wire system (non-Kelvin), or, four-wire system (Kelvin).
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S530 high-voltage parametric test system
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Consists of two to four (up to seven channels) SMUs, one switching matrix, one optional C-V unit, a LO
patch panel, and a high-voltage safety interlock device.
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Two-wire system (non-Kelvin), or, four-wire system (Kelvin).
NOTE The LO patch panel and the high-voltage safety interlocks are not visible from the
front (see
The S530 systems have flexible hardware configurations that allow you to customize them to your specific needs.
See Table 1 for a description of the main system configuration options, and see
S530 system (refer to the legend in the next Figure that shows where the instruments are located in the system).
Table 1: S530 system configuration options
DC source measure units (SMU)
6-slot switching matrix
Optional capacitance/voltage (C-V)
Optional instruments
Each system contains:
PA-992 Rev. D / April 2012
www.keithley.com
Figure 1).
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1. Computer inside cabinet
2. External 20-inch flat-panel monitor and keyboard mounted
3. S530 system software – Keithley Tesh Environment (KTE)
for updated worldwide contact information.
2 to 8 maximum
Maximum number of units depends on other items in the
system rack
Model 2410 high-voltage SMU
Model 707B with either
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Model 7174A switch card
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Model 7072-HVF switch card
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Model 7530 switch card
1 channel of C-V
Based on Model 4200-SCS with CVU card
DMM
Up to 3 dual-channel pulse cards
Frequency measurement option
on exterior of cabinet
or Automated Characterization Suite (ACS)
Figure 1 for an example of the
1