Honeywell CM4 Technical Handbook page 141

CM4 Four-Point Continuous Monitor
Gas Name
Phosphine XP4
(PH )
3
Silane
(SiH )
4
Silane XP4
(SiH )
4
Silane XP4
(SiH )
4
Low Level
Silane XP
(SiH )
4
Silane XP
(SiH )
4
Low Level
Sulfur Dioxide
(SO )
2
* = Minimum Sample Time TLV = Threshold Limit Value LAL = Lowest Alarm Level LDL = Lower Detectable Limit
CM4 Technical Manual
Default
TLV LAL LDL Alarm
Level 1
300 ppb 5 ppb 5 ppb 300 ppb 600 ppb
5 ppm 1 ppm 0.5 ppm 5 ppm
5 ppm 0.5ppm 0.3 ppm 5 ppm
5 ppm 50 ppb 50 ppb 500 ppb 1000 ppb 50-5000 ppb
5 ppm 0.5 ppm 0.3 ppm 5 ppm
5 ppm 50 ppb 50 ppb 500 ppb
250 ppb 30 ppb 25 ppb 250 ppb 500 ppb 25-2500 ppb
Table C-1: Chemcassette Detectable Gases (cont'd)
Default
Alarm Range Alarm Setting
Level 2
5-3000 ppb
5-3000 ppb
1.04.9 ppm
5.0-9.9 ppm
10 ppm 0.5-50 ppm 10.0-19.9 ppm
20.0-50.0 ppm
0.5-4.9 ppm
5-9.9 ppm
10 ppm 0.3-50 ppm 10-19.9 ppm
20-50 ppm
50-249 ppb
250-499 ppb
500-999 ppb
1000-5000
ppb
0.5-4.9 ppm
5.0-9.9 ppm
10 ppm 0.3-50 ppm 10-19.9 ppm
20-50 ppm
50-249 ppb
250-499 ppb
1000
50-5000 ppb 500-999 ppb
ppb
1000-5000 ppb
30-249 ppb
250-2500
ppb
C-13
Time to 1 TLV
Initial
Alarm @ 2 TLV
Analysis Chemcassette
Concentration
Period Part Number
10 Foot Sample
(seconds)
Line
15
<8 sec 1258-9300
0*
60
45
30 <25 sec 874300
15
5*
60
45
30 <20 sec 1258-9300
15
5*
360
<105 sec
240
(Alarm @ 500
120 1258-9300
ppb with 1000
60
ppb SiH gas)
5*
4
60
45
30 <20 sec 1874-9300
15
5*
360
<105 sec
240
(Alarm @ 500
120 1874-9300
ppb with 1000
60
ppb SiH gas)
5*
4
60
30
<20 sec 874568
0*