Agilent Technologies 5975 Operation Manual page 131

Table 20
MFC
(%)
10
15
20
25
30
35
40
amiliarize yourself with the measurements on your system under operating
conditions and watch for changes that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
5975 Series MSD Operation Manual for MassHunter
Flow and pressure readings
Pressure (Torr)
Methane
EI/PCI/NCI MSD
(Performance turbo pump)
10
–5
×
5.5
10
–5
×
8.0
10
–4
×
1.0
10
–4
×
1.2
1
–4
×
1.5
10 –4
×
2.0
10 –4
×
2.5
Operating in Chemical Ionization (CI) Mode
Ammonia
EI/PCI/NCI MSD
(Performance turbo pump)
–5
×
5.0 10
–5
×
7.0 10
–5
×
8.5 10
–4
×
1.0 10
–4
×
1.2 10
–4
×
1.5 10
–4
×
2.0 10
4
131