Specifications - SMC Networks XLGR Series Operation Manual

3. Specifications

Model
Valve size
Main exhaust valve
Actuating type
Bypass valve
Fluid
Ambient temperature: 20
Operating pressure Pa
Main exhaust valve
Conductance
l/s Note 1
Bypass valve
Internal
Leakage
3
Pam /s
External
Flange type
Main material Note 2
Surface treatment for body
Pilot pressure MPa
Main exhaust valve
Port size
Bypass valve
Air
Main exhaust valve
consumption
3
cm
Bypass valve
Note 3
Weight kg
Note1) Conductance is "molecular flow" measured with an elbow pipe which has the same
dimension as each applicable flange.
Note2) The seal sliding part for vacuum uses vacuum grease (Y-VAC2).
Note3) For one cycle of cylinder.
Bypass valve conductance < for Reference only >
The graph to the right is to show the
relationship between the bypass valve adjusting
screw.
The data shown is based on internal SMC
experimentation. The results found in the actual
application may vary. Please verify settings for
each individual application.
Please refer to "5-2. Adjusting the bypass
valve" for adjustment procedure.
XLGR-80*-1*
o
C
Body :A6063,A50521
Bellows (Bypass valve): SUS316L Seal material: FKM
1000
XLGR-100*-1*
80 100
Double acting (pressurized to open / close)
Normal close (N.C.)
Vacuum of inert gas
5 to 60 (5 to 150 for high temperature type)
Atmospheric pressure to 1 x 10
200 300
MAX31.5（Viscosity / Theoretical value）
-9
1.3 x 10 for the standard material (FKM)
at ambient temperature, excluding gas permeation
-9
1.3 x 10 for the standard material (FKM)
at ambient temperature, excluding gas permeation
KF（NW）,K（DN）
Outside: hard anodized Inside: basis material
0.4 to 0.6
Rc1/8
2300
4.9 8.3
24
22
20
18
16
14
12
10
8
6
4
2
0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0
- 8 -
XLGR-160*-1*
160
-5
800
Critical part :SUS304,A6061
M5
3700
16
15.7
XLGR-100*-1*
XLGR-160*-1*
XLGR-80*-1*
Adjusting screw rotations n
XL-OMP0001-A