Related Manuals for SMC Networks XLF Series
Summary of Contents for SMC Networks XLF Series
- Page 1 文書 No. XL*****-OMJ0003-E PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLF Series...
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Page 2: Table Of Contents
Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. -
Page 3: Safety Instructions
Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations. -
Page 4: Limited Warranty And Disclaimer
Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act. -
Page 5: Product Specific Precautions
. Product Specific Precautions 1 Common Precautions 1 Be sure to read before handling. Design Warning ●All models 1. The material of the body and bonnet is A6063, and other metal components of the vacuum part are made of SUS304. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (refer to “How to Order”). - Page 6 ●High temperature type (temperature specification / H0 H4 H5) 1. In models with a heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The set temperature for models with a heater should be established without any drafts or heat insulation.
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Page 7: Maintenance Parts
2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts SMC specified parts should be used for service. Refer to the construction drawing. 1. Replace the bonnet assembly when changing the sealant material. Due to the different materials used, changing only the seal may prove inadequate. - Page 8 Additional symbols of the seal materials Seal Barrel FKM for ULTIC EPDM Kalrez Chemraz ARMOR material Perfluoro PLASMA Combination ※ 2101-80 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 -XF1 Note1) Due to the different materials used, changing only the seal may prove inadequate.
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Page 9: Specifications
3. Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10 Conductance l/s Note 1 Internal 1.3 x 10... - Page 10 3-2. Heater specifications Item XL□-25 XL□-40 XL□-50 XL□-63 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. Initial power / 100 VAC 200/40 200/50 400/100 Power 200 VAC...
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Page 11: Construction And Outer Dimensions
4. Construction and Outer dimensions Auto switch (option) Magnet (option) Indicator (option) Bonnet assembly (maintenance part) Port (opened by applying pressure) Heater (option) External seal (maintenance part) Sliding seal (material: FKM) Scraper (material: FKM) Spring (material: oil hardened and tempered wires (electroless nickel plating treatment)) Shaft (material: SUS304) Valve (material: SUS304) -
Page 12: Period And Scope Of Warranty
5. Period and scope of warranty The warranty period is 3 million cycles (for size 16, 25 and 40), 2 million cycles (for size 50, 63 and 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first. -
Page 13: Parts Replacement Procedure
6. Parts Replacement Procedure 6-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is assured before handling. - Page 14 6-2. Disassembly procedure Step 1 Step 2 Bolt b O-ring Bottom surface of groove Bonnet assembly discharge gas. Heater Pilot port Bolt a Cover Body The heater is removed by loosening bolt a. Bolt Remove the O-ring from the groove for a is behind the cover.
- Page 15 6-3. Assembly Procedure Step 1 Step 2 O ring groove Clean cloth Valve Ethanol Assemble parts eliminating any dust or debris. Eliminate any dust within O-ring groove of the Wipe off dust with a clean cloth soaked with valve. ethanol. Blow parts with clean air if necessary. (Ensure there is no fibers or dust.
- Page 16 Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface. Step 6 Bolt b Tightening torque of Tightening torque of bolt a Tightening torque of bolt a bolt b N･m N･m N･m Tightening Tightening...
- Page 17 Revision Ｃ Safety Instructions 2011.1 Ｄ Limited warranty and Disclaimer 2014.4 Ｅ Front cover, back cover, safety precautions Correction 2024.10 1st Printing :2005.6 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...
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