Related Manuals for SMC Networks XLFR Series
Summary of Contents for SMC Networks XLFR Series
- Page 1 Doc. NoXL*****-OML0011-A. PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLFR Series...
- Page 2 Contents Safety Instructions…………………………………………………….…………2 1. Precautions on handling 1…………………………………………………4 (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. Precautions on handling 2…………………………………………………6 (Maintenance parts) 3. Specifications……………………………………………………………….7 4. Construction………………….……………………………………………..8 5. Adjustment of the bypass valve…………………………………………..9 6. Dimensions…………………..…………………………………………….10 7. Guaranteed term and guaranteed range………………………………..11 8.
- Page 3 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
- Page 4 Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.
- Page 5 1. Precautions on handing 1 Common Specific Precautions 1 Be sure to read before handling. Precautions on Design Warning ● All models (1) The body material is A6061, A6063、the bellows is SUS316L, and other metal seal material is SUS304. Standard seal material in the vacuum section is FKM. Grease for vacuum (Fluorine grease : Y VAC 2) is applied to axis seal and fixed seal of vacuum area.
- Page 6 Piping Caution Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc. (2) There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way. Maintenance Warning If the fluid or reaction product (deposit) may deteriorate safety, those who have...
- Page 7 2. Product on handing 2 Common Specific Precautions 2 Be sure to read before handling Maintenance Parts Maintenance parts Part no. Valve model no. Description XLFR-80＊ XLFR-100＊ XLFR-160＊ Bonnet Ass’y ② XLF80＊-30-1＊ XLF100＊-30-1＊ XLF160＊-30-1＊ Note2) Bypass valve ③ XLA-16＊-X65 Noto2) O-Ring ④...
- Page 8 3. Specifications Model XLFR-80＊ XLFR-100＊ XLFR-160＊ Valve size Actuating type Main exhaust valve Normal close（NC） Bypass valve Normal close（NC） Fluid Vacuum with inert gas Operating temperature 5 to 60 C(5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10 Conductance l/s Main exhaust valve Note 1...
- Page 9 4. Construction Bypass valve adjustment bolt Bonnet Ass’y ※１ Auto switch (option) (Note1) Lock nut Operation port 1 Bypass valve ※1 Main exhaust valve Open (Note2) Operation port 2 External seal ※1 Bypass valve Open (material: FKM) External sea(material: FKM) Valve seal(material: FKM) Sealed part...
- Page 10 5. Aqjustment of the bypass valve ・Adjustment of the bypass valve Adjust the bypass valve by changing the open amount of the valve. Bypass valve stroke can be adjusted within 1 to 5mm(Note 1) 1. Loosen lock nut⑨ to release locking. Hold bypass valve adjusting bolt⑩...
- Page 11 6. Dimensions Detail イ部詳細 イ 部 φC Dimension in mm Model XLFR-80＊ 148.5 XLFR-100＊ XLFR-160＊ Model XLFR-80＊ Rc1/8 XLFR-100＊ Rc1/8 XLFR-160＊ Rc1/8 Note 1 M dimension indicates bolt size Note 2 N dimension indicates the switch lead wire length (L type is 3000 mm) -10- XL-OML0011-A...
- Page 12 7. Guaranteed period and range The guaranteed period covers the period which finishes the earliest among followings; (1)1 million operating cycles (with durability test condition of SMC), (2)18 months after shipping from SMC, (3)12 months after customer starting the use of the product at your place or your customer’s place.
- Page 13 8. Parts Replacement Procedure Description Main valve seal Parts replacement procedure Responsible High vacuum angled Type Model no. XLFR Dept. valve Procedure1, Valve disassembly Procedure2, Remove external seal Procedure3, Remove internal seal Bottom of groove to extract gas Remove the seal from the place at Remove O-ring from the body.
- Page 14 Main valve seal Description Parts replacement procedure XLFR Responsible High vacuum angled Model no Type Dept. valve Procedure 6, Valve assembly Apply ethanol to clean cloth to wipe off dust on valve’s O-ring groove, and O-ring surface. Apply 0.4MPa to operation port, and mount the bonnet Ass’y to the body. Tighten bolts in cross-bolting pattern.
- Page 15 Bypass, valve seal Description Parts replacement procedure Responsible Type High vacuum valve Model no. XLFR Dept. Procedure1 Procedure2 Procedure3 Bottom of groove to extract gas Remove the seal from the place at Apply 0.4Mpa to operation port. O-ring groove to extract gas by the Apply ethanol clean...
- Page 16 Bypass valve Seal Parts replacement Description procedure Responsible Type High vacuum valve Model no. XLFR Dept. Procedure1 Procedure2 Procedure3 Take O-ring out of the body. Apply ethanol clean Apply 0.4Mpa to operation port. (Attention should be taken not to cloth(Bemcot) to wipe off dust on Loosen bolts in order of number damage body mount surface) O-ring surface and body mount...
- Page 17 Revision history A Front cover, back cover, safety precautions Correction 2024.08 1st printing: 2007.12 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...
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