Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.
Common Precautions 1 Be sure to read before handling. This valve (XLDV series) is equipped with a solenoid shifting valve. The solenoid shifting valve is a 3-port solenoid valve V100 or SYJ300 series. Be sure to read the Operation Manuals of this valve and V100 or SYJ300 before use.
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Wiring Caution 1. When a solenoid valve with a DC type (light) and surge voltage suppressing circuit is connected, check whether it has polarity. If there is polarity, and polarity is mistaken, the device of the valve and power supply equipment may burn out and malfunction can occur. 2.
2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution Replace the bonnet assembly when changing the sealant material. Due to the different materials used, changing only the seal may prove inadequate. Bonnet assembly/construction part number:1 Valve size XLDV25-30-1 XLDV40-30-1...
Optional sealant material Sealant Barrel EPDM Kalrez Chemraz Perfluoro material Compound no. 2101-80 4079 SS592 SS630 SSE38 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 Sealant FKM for ULTIC material PLASMA ARMOR ※ Compound no. 1232-70 3310-75 UA4640 Symbol -XS1 -XT1 -XU1 -XF1 Note1) Due to the different materials used, changing only the seal may proveinadequate.
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See the figure on the right for the relationship between the number of revolutions of the adjustment nut (pitch 1mm) and conductance of the initial pumping valve. (The conductance is shown as a guide only.) 初期排気弁コンダクタンス Initial pumping conductance XLD-100 XLDV-100 XLD-160 XLDV-160...
4. Construction Auto switch (option) Adjustment nut (knurled outside) Adjusting the opening of the valve for initial pumping Magnet (option) Bonnet assembly (maintenance part) (Including body, external seals and other parts except for Bellows holder accessories) (material: SUS304) External seal (maintenance part) Solenoid valve Bellows (material: SUS316L)
6 Period and Scope of Warranty The warranty period is 2 million cycles (for size 25 to 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.
7 Parts Replacement Procedure Replacement procedure Division Model High Vacuum Angle Valve Procedure 1 Procedure 2 Procedure 3 Screw for fixing Bottom of gas release valve S assembly Valve S seal assembly Solenoid valve for main pumping 1(P) SUP 1(P) SUP Solenoid valve for initial pumping...
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Replacement procedure Division Model High Vacuum Angle Valve Procedure 7 Procedure 8 Procedure 9 Screw for fixing valve S assembly Valve S seal assembly (mount it after checking it has one O-ring.) O-ring (mount it on valve S seal.) 1(P) SUP Solenoid valve for initial pumping...
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