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SMC Networks XLS Series Operation Manual

High vacuum l type valve
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Doc.no XL*****-OMI0013-B
PRODUCT NAME
High Vacuum L Type Valve
MODEL / Series / Product Number
XLS Series

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Summary of Contents for SMC Networks XLS Series

  • Page 1 Doc.no XL*****-OMI0013-B PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLS Series...

  • Page 2: Table Of Contents

    Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Precautions on handling 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2.

  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
  • Page 4 Safety Instructions Caution 1.The product is provided for use in manufacturing industries. The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary. If anything is unclear, contact your nearest sales branch.

  • Page 5: Precautions On Handling 1

    1. Product Specific Precautions 1 Precautions 1 Be sure to read before handling. Design Warning ●All models 1. The body material is A6063, the bellows is SUS316L, and other metal material is SUS304. The seal material for vacuum environment is FKM. The armature assembly for vacuum uses fluorine type resin (PFA).

  • Page 6: (Precautions On Design, Selection, Mounting, Piping, Maintenance) 2. Precautions On Handling 2

    Maintenance Warning If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and experience (e.g. a specialist). Caution 1. When removing deposits from the valve, take care not to damage any part of the valve. 2.

  • Page 7: Maintenance Parts

    2. Product Specific Precautions 2 Precautions 2 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Maintenance can be done without removing a pipe. Remove the four hexagon socket head cap screws on the top of the cover. When the sealant is replaced, be careful not to give a flaw on the sealing face such as a body.

  • Page 8: Specifications

    3. Specifications Table 1 Valve specifications Model XLS-16 XLS-25 XLS-16-P*G XLS-25-P*G Flange (valve) size Actuating type Normally closed (N.C.) Fluid Vacuum of inert gas Operating temperature 5 to 40 Exhausting direction Free Operating pressure Pa 1×10 (absolute pressure) to 0.1MPa (G) Conductance l/s Note 1 1.3 x 10 Internal...

  • Page 9: Construction / Operatio

    4. Construction / Operation Retainer Coil assembly Control power supply (maintenance service part) Core assembly (maintenance service part) Armature assembly (maintenance service part) Cover Core O-ring external seal 3- 1 (maintenance service part) Bonnet O-ring external seal 3- 2 (maintenance service part) Spring Bellows Valve...

  • Page 10: Dimensions

    5.Dimensions OPERATION INPUT □□□V φ6～9 XLS-**-P*G XLS-**-P*G (制御電源付) G1/2 (with control power supply) DIN形ターミナル( D ) DIN terminal (D) XLS-**-** (制御電源無) XLS-**-** (without control power supply) K±2 270±10 290±10 G1/2 G1/2 ターミナル( T ) Terminal (T) コンジット( C ) Conduit (C) グロメット( G ) Grommet (G) Model...

  • Page 11: Period And Scope Of Warranty

    6.Period and Scope of Warranty The waranty period is 0.5 million cycles (under SMC’s endurance test conditions), 1 year in service or within 1.5 years after delivery, whichever comes first. If the valve has been used outside of the specifications, or if a failure occurs as a result of mounting onto a machine or replacement of an assembly, seals, or etc.

  • Page 12: Parts Replacement Procedure

    7.Parts Replacement Procedure 7-1. Precautions Be sure to adhere to the instructions given in “1. Precautions 2“, when disassembling the product for maintenance. Along with the precautions listed in Chapter 2, the user should comply with those listed below. Warning ...
  • Page 13 7-2. Replacement Procedure 1:Replacementof coil 2:Replacement of other parts assembly Procedure 1 Procedure 2 core Wave washer ｳｪｰﾌﾞﾜｯｼｬ Retainer ③ ① ② ｶﾊﾞｰ Cover Pull out ④ Core assembly ｺｱAss'y Core O-ring ｺｱOﾘﾝｸﾞ Armature ｱｰﾏﾁｬAss'y assembly ﾎﾞﾝﾈｯﾄOﾘﾝｸﾞ Bonnet O-ring Pull out the retainer to the Parts excepting the wave washer and the cover are the service side with the coil assembly...
  • Page 14 Revision □ B RENEWAL 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...

This manual is also suitable for:

Xls-16-*c seriesXls-16-*t seriesXls-16-*g seriesXls-16-*d seriesXls-25-*g seriesXls-25-*d series ... Show all

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