Specifications - SMC Networks XLF-2 Series Operation Manual

4. Specifications

4-1. Valve specifications
Model
Flange (valve) size
Actuating type
Fluid
Operating temperature
Operating pressure Pa(abs)
Conductance l/s Note 1)
Internal
Leakage
Pa･m 3 /s
External
Flange type
Main material Note 2)
Surface treatment for body
Actuation pressure MPa(G)
Air consumption for
cm 0.5MPa
3
Note 3)
Port size
Weight kg
Note 1) Conductance is "molecular flow" measured with an elbow pipe which has the same dimension as each
applicable flange.
Note 2) Grease for vacuum is applied to the sliding part for the seals (Fluorine grease: Y-VAC2).
Note 3) For one cycle of cylinder.
XLF-16-2 XLF-25-2
16
o C 5 to 60 (5 to 150 for high temperature type)
5
1.3 x 10
at ambient temperatures , excluding gas permeation
1.3 x 10
at ambient temperatures , excluding gas permeation
Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant
Outside: hard anodized Inside: basis material
31
M5
0.29 0.49
XLF-40-2 XLF-50-2
25 40
Normally closed
Vacuum of inert gas
Atmospheric pressure to 1 x 10
14 45
-10 for the standard material (FKM)
-10 for the standard material (FKM)
KF (NW)
material)
0.4 to 0.7
61 220
1.2
- 9 -
XLF-63-2 XLF-80-2
50 63
-5
80 160
KF (NW), K (DN)
390 680
Rc 1/8
1.9 3.3
XL-OMV0017-A
80
200
1420
5.7