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SMC Networks XLH Series Operation Manual

High vacuum l type valve

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Doc. no.XL*****-OMJ0005-D
PRODUCT NAME
High Vacuum L Type Valve
MODEL / Series / Product Number
XLH Series

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Summary of Contents for SMC Networks XLH Series

  • Page 1 Doc. no.XL*****-OMJ0005-D PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLH Series...
  • Page 2: Table Of Contents

    Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2.
  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
  • Page 4: Limited Warranty And Disclaimer/Compliance Requirements

    Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.
  • Page 5: Product Specific Precautions

    1. Product Specific Precautions 1 Common Precautions 1 Be sure to read before handling. Design Warning ●All models 1.The body material is A6063,the bellows is SUS316L, and other metal seal material is SUS304. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (Refer to Chapter 4, “Construction and Outer dimensions”...
  • Page 6 Caution 1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc. 2. There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way. Maintenance Warning If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve...
  • Page 7: Product Specific Precautions

    2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for service. Refer to Chapter 4, “Construction and Dimensions" (P. 9) for the part indication numbers. Handle assembly/construction part number (1) Valve size Temperature specifications...
  • Page 8: Specifications

    3. Specifications 3-1. Valve specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size Valve type Manual type Fluid Vacuum of inert gas Operating temperature 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10 Note 1) Conductance l/s Internal 1.3 x 10 for the standard material (FKM)
  • Page 9 3-2. Heater specifications Item XLH-25 XLH-40 XLH-50 90 to 240 ACV Rated voltage of the heater Heater assembly number XL1A25-60S-1 XL1A25-60S-1 No. of heater assemblies 1 pc. 1 pc. Initial power / 100 VAC 200/40 200/50 Power 200 VAC 800/45 800/55 consumption (W) Heater assembly number...
  • Page 10: Construction And Dimensions

    4. Construction and Dimensions 4-1. Construction Indicator (option) ※Handle Ass'y(Maintenance part)① (including ②,⑤,⑥,⑦) ⑦Bellows holder ( Material: SUS304) ③Exterior seal (Maintenance part) Heater(option) ⑥Bellows (Material: SUS316L) Velocidor side exhaust ⑤Valves (Material: SUS304) ②Valves seal (Maintenance part) ④Bpdy (Material: A6063) 4-2. Dimensions Unit: mm A...
  • Page 11: How To Order

    5. How to order X LH ( - X Part with changed Flange size seal material Size Symbol Changed part None ②・③ ② ③ ※See the Contruction and part Page9 Heater Applicable Symbol Heater flange size 16 25 40 50 Seal material FKM(Standard) ●...
  • Page 12: Period And Scope Of Warranty

    6. Period and Scope of Warranty The warranty period is 1,000,000 cycles (under SMC's endurance test conditions), 1 year in service or within 1.5 years after delivery, whichever comes first. If the valve has been used outside of the specifications, or if a failure occurs as a result of mounting onto a machine or replacement of an assembly, Seal material etc.
  • Page 13: Parts Replacement Procedure

    7. Parts Replacement Procedure 7-1. Precautions Be sure to adhere to instructions given in “1. Precautions 1”, when disassembling the product for maintenance. Along with the precautions listed in Chapter 1, the user should comply with those listed below. Warning •...
  • Page 14 7-2. Disassembly procedure Step 1 Removal of handle assembly Step 2 Removal of valve seal Bolt Valve seal Handle assembly Bottom surface of groove to discharge Body Loosen the bolt gradually in numerical order with Remove the valve seal from the seal mounting the valve opened a little to disassemble the body groove.
  • Page 15 7-3.Assembly Procedure Step 1 Preparation Step 2 Reassembly of valve seal (No.1) Groove for mounting the seal Valve Clean cloth Ethanol Assemble parts eliminating any dust or debris. Eliminate any dust within groove for mounting the Wipe off dust with a clean cloth soaked with seal of the valve .
  • Page 16 Step 5 Reassembly of S valve seal assembly O-ring valve seal Bellows holder Wipe off any dust from the valve seal valve seal and the Bellows holder surface. Step 6 Reassembly of bonnet assembly Bolt Tightening torque of bolt N・m Valve Tightening size...
  • Page 17 7-4. Heater Replacement Procedure Step 1 Assembly of heater Heat transfer sheet Heater Heater Body Mounting screw Body Heater cover Mounting screw Heater cover Put heat transfer sheet(Note1), heater, heater cover to backside of body. Tighten the mountiug screws to install heater assembly. Tighten torque:0.3N・m For detachment, remove the mounting screws.
  • Page 18 Revision RENEWAL 2024.07 1st Printing: 2005.9 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. © SMC Corporation All Rights Reserved 17 - XL*****-OMJ0005-D...

This manual is also suitable for:

Xlh16-30-1Xlh25-30-1Xlh40-30-1Xlh50-30-1