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Summary of Contents for SMC Networks XLD Series
- Page 1 Doc. no.XL*****-OMI0011-E PRODUCT NAME High Vacuum L Type Valve MODEL/ Series XLD Series...
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Page 2: Table Of Contents
Doc. no.XL*****-OMI0011-E Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. -
Page 3: Safety Instructions
Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations. - Page 4 Safety Instructions Caution 1.The product is provided for use in manufacturing industries. The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary. If anything is unclear, contact your nearest sales branch.
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Page 5: Product Specific Precautions
1. Product Specific Precautions 1 Precautions 1 Be sure to read before handling. Design Warning ●All models 1. The body material is A6063,the bellows is SUS316L, and other metal components of the vacuum part are made of SUS304. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (refer to “How to Order”). - Page 6 heating of other piping. Fine adjustment is not possible. 3. When installing heater accessories or mounting a heater, check insulation resistance at the actual operating temperature. A current leakage breaker or fuse should be installed. 4. If the valve is to be insulated, only the body should be insulated, excluding the bonnet part. 5.
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Page 7: Product Specific Precautions
2. Product Specific Precautions 2 Precautions 2 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for service.Refer to the construction drawing. 1. Replace the bonnet assembly when changing the seal material. Due to the different materials used, changing only the seal may prove inadequate. - Page 8 Additional symbols of the seal materials Barrel FKM for ULTIC Seal material EPDM Kalrez Chemraz ARMOR Perfluoro PLASMA Combination No. 2101-80 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate. Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd.
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Page 9: Specifications
3. Specifications Model XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 Flange (valve) size Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10 Conductance l/s Main pumping Note 1) - Page 10 3-2. Heater specifications XL□-25 XL□-40 XL□-50 XL□-63 Item Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. Initial power / 100 VAC 200/40 200/50 400/100 Power 200 VAC...
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Page 11: Construction
4. Construction Adjustment nut (knurled outside) Auto switch (option) Adjusting the opening of the valve for initial exhausting Adjustment nut holding screw Bonnet assembly Magnet (option) (maintenance part) Pilot port S (For initial pumping valve) Bellows holder (material: SUS304) Pilot port M (For main pumping valve) External seal (maintenance part) -
Page 12: Operation
5. Operation 5-1. Adjusting the opening of the valve for initial pumping Adjust the initial pumping amount with no air pressure to the pilot port S before using. Initial flow is reduced by turning the adjustment nut clockwise. It is increased by turning it counterclockwise. The location where the nut gently stops during rotation clockwise and counterclockwise indicates the initial flow zero and the maximum flow. -
Page 13: Dimensions
6. Dimensions Unit: mm Model XLD-25 XLD-40 XLD-50 17.5 XLD-63 XLD-80 26.5 XLD-100 XLD-160 - 11 - XL*****-OMI0011-E... -
Page 14: Guaranteed Term And Guaranteed Range
7. Guaranteed term and guaranteed range The guaranteed period covers the period which finishes the earliest among 2 million operating cycles (for size 25 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customer’s place. -
Page 15: Parts Replacement Procedure
8. Parts Replacement Procedure 8-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is confirmed before handling. - Page 16 8-2. Disassembly procedure Step 1 Step 2 Bolt c Bolt b S valve seal assembly O-ring Bonnet assembly Heater Pilot port M Bolt a Cover Pilot port S Body The heater is removed by loosening bolt a. Bolt a is Apply 0.3MPa of air pressure to the pilot port S.
- Page 17 8-3. Assembly Procedure Step 1 Step 2 Step 3 ring M valve Clean cloth O ring Ethanol Assemble parts eliminating dust. Eliminate the dust of O ring groove Wipe off the dust on the valve seal Wipe off dust with a clean cloth of pilot valve M.
- Page 18 Step 6 Step 7 Tightening torque of bolt C Bolt C N・m O ring Tightening Model S valve seal torque Ass'y XLD-25 0.36±0.1 Other than 0.63±0.1 Needle seat XLD-25 Mounting surface of O ring Body Pilot port S Apply 0.3MPa of air pressure to the pilot port S. Place Wipe off the dust from the external seal O ring surface the needle seat or S valve seal assembly, and tighten and the mounting surface of the body O ring.
- Page 19 Revision E Precaution for mounting added. 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...
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