SMC Networks XLD Series Operation Manual

High vacuum l type valve
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Doc. no.XL*****-OMI0011-F
PRODUCT NAME
High Vacuum L Type Valve
MODEL/ Series
XLD Series
- 0 -

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Summary of Contents for SMC Networks XLD Series

  • Page 1 Doc. no.XL*****-OMI0011-F PRODUCT NAME High Vacuum L Type Valve MODEL/ Series XLD Series - 0 -...
  • Page 2: Table Of Contents

    XL*****-OMI0011-F Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Piping, Air Supply) 2.
  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
  • Page 4 Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.
  • Page 5: Product Specific Precautions 1

    1. Product Specific Precautions 1 Precautions 1 Be sure to read before handling. Piping Caution 1. Refer to the Fittings and Tubing Precautions on the SMC website for handling One-touch fittings. 2. Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe.
  • Page 6: Product Specific Precautions 2

    2. Product Specific Precautions 2 Precautions 2 Be sure to read before handling. Design Warning ●All models 1. The body material is A6063, the bellows is SUS316L, and other metal seal material is SUS304. Refer to Chapter 5, “Construction and Dimensions” (P. 11) for details. Standard seal material in the vacuum section is FKM that can be changed to the other materials.
  • Page 7 ●High temperature type (temperature specification / H0 H4 H5) 1. In models with a heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The set temperature for models with a heater should be established at normal ambient temperature without any drafts or heat insulation.
  • Page 8: Product Specific Precautions 3

    3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, “Construction and Dimensions” (P. 11) for the part indication numbers. Replace the bonnet assembly when changing the seal material. Due to the different materials used, changing only the seal may prove inadequate.
  • Page 9 Suffix for seal materials Seal Barrel FKM for ULTIC EPDM Kalrez Chemraz material Perfluoro PLASMA ARMOR Combination 2101-80 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 ※ Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 -XF1 Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. Note1) Kalrez is a registered trademarkof the E.I.du Pont de Nemours and Company or its affiliates.
  • Page 10: Specifications

    4. Specifications 4-1. Specifications Model XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 Flange (valve) size Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10 Conductance l/s Main pumping Note 1)
  • Page 11 4-2. Heater specifications Item XL□-25 XL□-40 XL□-50 XL□-63 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. Initial power / 100 VAC 200/40 200/50 400/100 Power 200 VAC...
  • Page 12: Construction And Dimensions

    5.Construction and Dimensions 5-1.Construction Adjustment nut (knurled outside) Auto switch (option) Adjusting the opening of the valve for initial exhausting Adjustment nut holding screw Bonnet assembly Magnet (option) (maintenance part) Pilot port S (For initial pumping valve) Bellows holder (material: SUS304) Pilot port M (For main pumping valve) External seal...
  • Page 13 5-2. Dimensions Heater (Option) Auto switch (Option) Unit: mm Model XLD-25 XLD-40 XLD-50 17.5 XLD-63 XLD-80 26.5 XLD-100 XLD-160 - 12 - XL*****-OMI0011-F...
  • Page 14: Operation

    5. Operation 6-1. Adjusting the opening of the valve for initial pumping Adjust the initial pumping amount with no air pressure to the pilot port S before using. Initial flow is reduced by turning the adjustment nut clockwise. It is increased by turning it counterclockwise. The location where the nut gently stops during rotation clockwise and counterclockwise indicates the initial flow zero and the maximum flow.
  • Page 15: How To Order

    7. How to order X LD A ( - X A N1 A ) Part with changed seal material Symbol Changed part Flange size Size None ②・③・④・⑤ ②・④・⑤ ③ *See the Contruction and part Page 11 Seal material FKM(Standard) *See page 8 for non-standard Flange type Body surface treatment Symbol...
  • Page 16: Period And Scope Of Warranty

    8. Period and Scope of Warranty The warranty period is 2 million cycles for sizes 25, 40, 50, 63 and 80, 1 million cycles for sizes 100 and 160 (under SMC's endurance test conditions), 1 year in service or within 1.5 years after delivery, whichever comes first.
  • Page 17: Parts Replacement Procedure

    9. Parts Replacement Procedure 9-1. Precautions Be sure to adhere to the instructions given in “2. Precautions 2“, when disassembling the product for maintenance. Along with the precautions listed in Chapter 2, the user should comply with those listed below. Warning •...
  • Page 18 9-2. Disassembly procedure Step 1 Removal of bonnet assembly Step 2 Removal of S valve seal assembly Bolt b Bolt a S valve seal assembly O-ring Bonnet assembly Pilot port M Pilot port S Body Supply air pressure of 0.2MPa (G) to the pilot port Supply air pressure of 0.3MPa (G) to the pilot port M.
  • Page 19 9-3. Assembly Procedure Step 2 Reassembly of valve Step 3 Reassembly of valve Step 1 Preparation seal (No.1) seal (No.2) Groove for mounting the seal M valve Clean cloth Valve seal Ethanol Assemble parts eliminating any Eliminate any dust within groove Wipe off any dust on the surface dust or debris.
  • Page 20 Step 6 Reassembly of S valve seal assembly Step 7 Remount of external seal (No.3) Tightening torque of bolt b Bolt b N・m External seal Tightening Model torque S valve seal XLD-25 0.36±0.1 assembly Other than Mounting part of 0.63±0.1 Needle seat XLD-25 the external seal...
  • Page 21 9-4. Heater Replacement Procedure Step 1 Assembly of heater Heat transfer sheet Heater Heater Mounting Mounting screw screw Body Body Heater cover Heater cover Size 25 Size 40 or larger Put heat transfer sheet(Note1), heater, heater cover to backside of body. Tighten the mounting screws to install heater assembly.
  • Page 22 Revision RENEWAL 2024.07 1st Printing: 2006.8 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. © SMC Corporation All Rights Reserved - 21 - XL*****-OMI0011-F...

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