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SMC Networks XLGR Series Operation Manual

High vacuum l type valve
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Doc. no.XL-OMP0001-A
PRODUCT NAME
High Vacuum L Type Valve
MODEL / Series / Product Number
XLGR Series

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Summary of Contents for SMC Networks XLGR Series

  • Page 1 Doc. no.XL-OMP0001-A PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLGR Series...

  • Page 2: Table Of Contents

    Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2.

  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.

  • Page 4: Limited Warranty And Disclaimer/Compliance Requirements

    Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.

  • Page 5: Product Specific Precautions

    1. Product Specific Precautions 1 Common Precautions 1 Be sure to read before handling. Design Warning ●All models 1. The body material is A6063 and A5052. Bellows material is SUS316L. Internal vacuum valve components are SUS304 or A6061. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (refer to “How to Order”).
  • Page 6 Maintenance Warning If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and experience (e.g. a specialist). Caution 1. When removing deposits from the valve, take care not to damage any part of it. 2.

  • Page 7: Product Specific Precautions

    2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts SMC specified parts should be used for service. Refer to the construction drawing. 1. Replace the bonnet assembly when changing the sealant material. Due to the different materials used, changing only the seal may prove inadequate.
  • Page 8 Additional symbols of the seal materials Seal Barrel FKM for ULTIC EPDM Kalrez Chemraz material ARMOR Perfluoro PLASMA Combination ※ 2101-80 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 -XF1 Note1) Due to the different materials used, changing only the seal may prove inadequate. Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd.

  • Page 9: Specifications

    3. Specifications XLGR-80*-1* XLGR-100*-1* XLGR-160*-1* Model Valve size Main exhaust valve Double acting (pressurized to open / close) Actuating type Bypass valve Normal close (N.C.) Fluid Vacuum of inert gas Ambient temperature: 20 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10 Main exhaust valve...

  • Page 10: Construction

    4. Construction Auto switch (option) Options Bonnet assembly Note 1 Pilot port 1 (Maintenance part) Main exhaust valve close Pilot port 2 Main exhaust valve open Bypass valve adjustment External seal bolt (maintenance part) Lock nut Axial seal Bypass valve Note 2 (material : FKM) (Maintenance part) Scraper (Material : FKM)

  • Page 11: Operation

    5. Operation 5-1.Operation 1. Main exhaust valve The valve sits in the body seat to seal by applying pressure to the pilot port 1. (Pilot port 2 opens) The valve leaves from the body seat to open by applying pressure to the pilot port 2. (Open pilot port 1) 2.

  • Page 12: Dimensions

    6. Dimensions L (Width across flats) (Width across flats) Detail of (a) Rc1/8 G Model XLGR-80*-1* 45.5 38.5 XLGR-100*-1* 270.5 38.5 XLGR-160*-1* 38.5 Model XLGR-80*-1* XLGR-100*-1* XLGR-160*-1* 12.5 - 11 - XL-OMP0001-A...

  • Page 13: Guaranteed Term And Guaranteed Range

    7. Guaranteed term and guaranteed range The warranty period is 2 million cycles (for size 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first. If the valve has been used outside of the specifications, or if a failure occurs as a result of mounting onto a machine or replacement of an assembly, O-ring etc.

  • Page 14: Parts Replacement Procedure

    8. Parts Replacement Procedure 8-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is assured before handling.
  • Page 15 8-2．Main exhaust valve disassembly procedure Step 1 Step 2 Bolt O-ring Bonnet assembly Bottom of the gas release groove Body Disassemble the body and the bonnet assembly by Remove the O-ring from the gas release part of the O-ring gradually loosening the hexagon socket head cap groove with a tool whose height is as the same as the screws.
  • Page 16 8-3. Main exhaust valve disassembly procedure Step 1 Step 2 Step 3 O ring groove O-ring Clean cloth Valve Ethanol Assemble parts eliminating dust. Eliminate the dust of O ring Wipe off the dust on the valve seal O Wipe off dust with a clean cloth groove of pilot valve.
  • Page 17 8-4.Bypass valve disassembly procedure Step 1 Step 2 Bolt ring surface seal Bonnet assembly Bolt Pilot port Body Bypass valve Body Remove Bypass valve from Body by loosening the Apply 0.4MPa of air pressure to the pilot port of Bypass hexagon socket head cap screws in numerical order.
  • Page 18 8-5.Bypass valve assembly procedure Step 1 Step 2 Step 3 O ring groove Clean cloth Valve O-ring Ethanol Assemble parts eliminating any Eliminate any dust within O-ring Wipe off any dust on the valve seal dust or debris. Wipe off dust with a groove of the valve.
  • Page 19 Step 7 O-ring groove O ring for surface seal Body After removing dust, apply a small amount of grease for vacuum. After removing dust from O-ring for surface seal, apply a small amount of grease for vacuum (Y VAC2). Apply vacuum grease evenly on the entire O ring.
  • Page 20 Revision history Ａ Limited warranty and Disclaimer 2012.8 Ｂ Front cover, back cover, safety precautions Correction 2024.08 1st Printing :2010.4 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...

This manual is also suitable for:

Xlgr-80 1 seriesXlgr-100 1 seriesXlgr-160 1 series