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Summary of Contents for SMC Networks XLH16
- Page 1 Doc. no.XL*****-OMJ0005-C PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLH Series...
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Page 2: Table Of Contents
Contents Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. -
Page 3: Safety Instructions
Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations. - Page 4 Safety Instructions Caution 1.The product is provided for use in manufacturing industries. The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary. If anything is unclear, contact your nearest sales branch.
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Page 5: Product Specific Precautions
1. Product Specific Precautions 1 Common Precautions 1 Be sure to read before handling. Design Warning ●All models 1.The body material is A6063,the bellows is SUS316L, and other metal seal material is SUS304. The sealing material of the vacuum part is FKM as standard, but this can be changed to other materials (refer to “How to Order”). - Page 6 Piping Caution 1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc. 2. There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way. Maintenance Warning If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve...
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Page 7: Product Specific Precautions
XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 Standard(5～150 Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound No. 1349-80). e.g.) XLH16-30-1-XN1 Exterior seal, valve seal Description Valve size Material Constructions No. AS568-025V AS568-030V... - Page 8 3. Specifications 3-1. Valve specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size Valve type Manual type Fluid Vacuum of inert gas Operating temperature 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10 Note 1) Conductance l/s Internal 1.3 x 10 for the standard material (FKM)
- Page 9 heaters to prevent overheating. With PTC type heaters, there is an initial surge of current (inrush current) after the power is supplied. These inrush current will reduce overtime. If multiple heater assemblies are used, the inrush current to the heaters will be magnified and care should be taken. When multiple heater assemblies or valves are used, do not apply power to the heater assemblies simultaneously.
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Page 10: Construction And Outer Dimensions
4. Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ②,⑤,⑥,⑦) Bellows holder (Material: SUS304) Heater(option) Exterior seal (Maintenance part) Bellows (Material: SUS316L) Valve (Material: SUS304) Valve seal (Maintenance part) Body (Material: A6063) φH Unit: mm Ａ Ｂ Ｃ Ｄ Ｅ... -
Page 11: Period And Scope Of Warranty
5. Period and scope of warranty The warrantyd period covers the period which finishes the earliest among 0.1 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customer’s place. If the valve has been used outside of the specifications, or if a failure occurs as a result of mounting onto a machine or replacement of an assembly, O-ring etc. -
Page 12: Parts Replacement Procedure
6. Parts Replacement Procedure 6-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too. Warning • If it is expected that product materials may get stuck to the product, ensure safety is assured before handling. - Page 13 6-2. Disassembly procedure Step 1 Step 2 Bolt b O-ring Handle assembly Bottom surface Bolt a of groove to discharge gas Body Cover Heater The heater is removed by loosening Bolt a. Remove the O-ring from the groove for Bolt a is behind the Cover. Remove the Cover discharging gas using a plastic tool to prevent using a watchmaker's screwdriver.
- Page 14 6-3.Assembly Procedure Step 1 Step 2 O-ring groove Valve Clean cloth Ethanol Assemble parts eliminating any dust or debris. Eliminate any dust within O-ring groove of the Wipe off dust with a Clean cloth soaked with Valve. Ethanol. Blow parts with clean air if necessary. (Ensure there is no fibers or dust.
- Page 15 Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface. Step 6 Bolt b Tightening torque of bolt b N･m Valve Tightening size torque Handle XLH-16 assembly Bolt a Tightening torque of bolt a N･m Valve Tightening...
- Page 16 Revision C Renewal 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...
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