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SMC Networks XLAQ Series Operation Manual

High vacuum l type valve

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Doc. no.XL-OMJ0002-E
PRODUCT NAME
High Vacuum L Type Valve
MODEL / Series / Product Number
XLAQ Series
XLDQ Series

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Summary of Contents for SMC Networks XLAQ Series

  • Page 1 Doc. no.XL-OMJ0002-E PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLAQ Series XLDQ Series...
  • Page 2: Table Of Contents

    Contents Page Safety Instructions…………………………………………………….…………3 1. Precautions on handling 1…………………………………………………5 (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. Precautions on handling 2…………………………………………………7 (Maintenance parts) 3. Specifications……………………………………………………………….8 4. Construction and dimensions……………………………………………..10 5. Guaranteed term and guaranteed range………………………………..12 6. Bonnet assembly mounting / removing procedure……………………. 13 7.
  • Page 3: Safety Instructions

    Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC) , and other safety regulations.
  • Page 4: Limited Warranty And Disclaimer/Compliance Requirements

    Safety Instructions Caution We develop, design, and manufacture our products to be used for automatic control equipment, and provide them for peaceful use in manufacturing industries. Use in non-manufacturing industries is not covered. Products we manufacture and sell cannot be used for the purpose of transactions or certification specified in the Measurement Act.
  • Page 5: Precautions On Handling 1

    1. Precautions on handling 1 Common Specific Precautions 1 Be sure to read before handling. Precautions on Design Warning ●All models a) The body material is A6063、the bellows is SUS316L, and other metal seal material is SUS304. Standard seal material in the vacuum section is FKM that can be changed to the other materials (please refer “How to Order”).
  • Page 6 ● High temperature types; (Temperature specifications/H0 H4 H5) a) In models with heater (thermistor), take care not to damage the insulation component of the lead wires and the connector section. b) The setting temperature for models with heater should be established without a draft or heat insulation.
  • Page 7: Precautions On Handling 2

    2. Precautions on handling 2 Common Specific Precautions 2 Be sure to read before handling Maintenance Parts Caution The bonnet assembly should also be replaced when changing the seal material. Due to the different materials used, changing only the seal may prove inadequate.
  • Page 8: Specifications

    3. Specifications XLAQ Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 Flange (valve) size Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10 Conductance l/s Note 1 1.3 x 10 for the standard material (FKM)
  • Page 9 Heater Specifications 1000 Rated voltage: AC90V~AC125V 抵抗温度代表特性 Typical temperature characteristics of resistance Temp. characteristics of resistance: Refer to the figure on the right. Curie point (C.P.) 160 The used heater is PTC thermistor. It has characteristics such that the resistance decreases until temp.
  • Page 10: Construction And Dimensions

    4. Construction/ Dimensions 4-1 XLAQ Series Auto switch (option) Indicator (option) Handle Bonnet assembly (maintenance part) Magnet (option) Port (opened by applying pressure) Bellows holder Heater (option) (material: SUS304) External seal (maintenance part) Bellows (material:SUS304) Valve (material:SUS304) Valve seal (maintenance part)
  • Page 11 4-2 XLDQ Series Auto switch (option) Handle Indicator (option) Bonnet assembly (maintenance part) Magnet (option) Operating port S Operating port M Bellows holder (material: SUS304) Heater (option) Bellows External seal (material:SUS304) (maintenance part) O ring for dynamic (material: FKM) ring static Valve Valve seal...
  • Page 12: Guaranteed Term And Guaranteed Range

    5. Guaranteed period and range The guaranteed period covers the period which finishes the earliest among 2 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customer’s place. Note: The product durability is varied depending on the operating conditions (such as a use with large flow rate).
  • Page 13: Bonnet Assembly Mounting/Removing Procedure

    6. Bonnet assembly mounting/removing procedure Bonnet assembly mounting/removing procedure 1 Model High Vacuum Angle Valve Dept Step 1 (Detaching) Step 2 Step 5 Bonnet ass’y Handle Bonnet Shaft Supply 0.4Mpa of pressure to Turn the handle clockwise. the port. Body Step 3 Step 4 Pull the bonnet assembly out...
  • Page 14 Valve seal / External seal replacement procedure 1 Model High Vacuum Angle Valve Dept Step 1 Step 3 Step 4 If the bonnet assembly is held as it was removed from the body, start from Procedure 3. internal seal external seal groove When the handle is turned clockwise with the bonnet...
  • Page 15: Replacement Of Part

    Bonnet assembly mounting/removing procedure Valve seal / External seal replacement procedure 1 Model High Vacuum Angle Valve Dept Step 1 Step 2 Step 3 Refer to “Bonnet assembly mounting/removing procedure” for mounting/ removing the bonnet assembly. bonnet assembly Remove the O-ring from the Remove the O-ring from the gas release groove with a pin external O-ring groove.
  • Page 16 Valve S seal assembly replacement procedure 1 High Vacuum Angle Valve Model Dept Step 1 Step 2 Refer “Bonnet assembly mounting/removing procedure” for mounting/ removing the bonnet assembly. bonnet assembly body Port M Port S Apply pressure of 0.3MPa to the operating port S (for initial exhausting).
  • Page 17 Revision history Front cover, back cover, safety precautions Correction 2024.08 1st printing: 2005.4 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. ©...