SMC Networks XLA-2 Series Operation Manual page 9

High vacuum l type valve
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Bellows assembly, Nut assembly
Valve size
Description
Part indication No.
Bellows assembly
(7)
Nut assembly
(9)
Valve size
Description
Part indication No.
Bellows assembly
(7)
Nut assembly
(9)
Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2. Order separately
if it is required.
Note 2) Add the seal material symbol shown in the table below at the end of the model number. This is not
necessary for the standard seal material (FKM: Compound No. 1349-80).
e.g.) XL1A16-2-101-XN1
Suffix for seal materials
Seal material
Combination No.
Symbol
Note 1) Barrel Perfluoro
Kalrez
is a registered trademarkof the E.I.du Pont de Nemours and Company or its affiliates.
Chemraz
R
※Same specifications as the standard FKM type
Heaters
Temperature
specifications
H4 (100
o
C)
H5 (120
o
C)
Example) The heaters included with XLA-80H5-2 are 2 pieces of XL1A25-60S-2 (a set including 2 heater
units).
16
XL1A16-2-101
XL1A16-10-1
63
XL1A63-2-101
XL1A50-10-1
Barrel
EPDM
Kalrez
Perfluoro
R
2101-80
70W
-XN1
-XP1
is a registered trademark of MATSUMURA OIL Co.,Ltd.
R
is a registered trademarkof the Greene,Tweed Technologies,inc.
25
40
-
XL1A25-60S-1
XL1A25-60S-1
XL1A25-60S-2
25
XL1A25-2-101
XL1A40-2-101
XL1A25-10-1
XL1A40-10-1
80
XL1A80-2-101
XL1A80-10-1
Chemraz
4079
SS592
SS630
-XQ1
-XR1
-XR2
Valve size
50
XL1A25-60S-1
XL1A25-60S-2
XL1A25-60S-2
XL1A25-60S-3
- 8 -
40
50
XL1A50-2-101
XL1A50-10-1
FKM for
VMQ
PLASMA
SSE38
1232-70
3310-75
-XR3
-XS1
-XT1
63
80
XL1A25-60S-3
XL1A25-60S-2(2 sets)
XL-OMS0001-D
FKM
-XF1

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