Construction And Dimensions - SMC Networks XLA-2 Series Operation Manual

High vacuum l type valve
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5. Construction and Dimensions

5-1. Construction
Indicator (Optional)
Cylinder
Heater (Optional)
5
Body (Material: A6063)
alve seal 2)
(V
Washer (Material: SUS304 or equivalent)
Nut (Material: SUS304 or equivalent)
(Shaft)
- 11 -
Auto switch (Optional)
Bonnet assembly (Maintenance part)
1
(Including 2, 3, 7, 9, and 10)
Magnet (Optional)
Pilot port
Bellows holder (Material: SUS304)
8
External seal (Maintenance part)
4
Shaft (Material: SUS304)
10
Bellows assembly (Maintenance part)
7
(Including 6, 8)
Bellows (Material: SUS316L)
Valve seal 1 (Maintenance part)
2
Valve (Material: SUS304)
6
Valve seal 2 (Maintenance part)
3
Nut assembly (Maintenance part)
9
(Set of a nut and a washer)
XL-OMS0001-D

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