Vacuum Piping; Fig. 4 Basic Piping Diagram To The Vacuum Chamber - Ulvac GLD-040 Instruction Manual

3.3 Vacuum piping

(1) Before connecting the pipe to the pump, clean the inner walls of the vacuum chamber,
piping and vacuum valve to completely eliminate moisture, fine particles, dust, dirt and rust.
Note
If fine particles, dust or dirt, etc are evacuated, the pump may malfunction.
If moisture is evacuated, not only does the ultimate pressure increase but also
the inside of the pump becomes rusty causing the pump to malfunction.
(2) Mount vacuum valve (A) and leak valve (B) between the vacuum chamber and pump as
shown in Fig. 4.

Fig. 4 Basic piping diagram to the vacuum chamber

(3) Use a KF-25 (NW-25) flange for the connection to the inlet port.
Note
The wire mesh in the inlet port has been adopted to prevent foreign matter from
entering the pump. Do not remove the wire mesh.
Vacuum valve
(A)
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Leak valve (B)
Pump