Example Of Cryo-U; Cryopump Vacuum System; Installation - Ulvac CRYO-U Series Instruction Manual

Installation

IG2
PiG2
IG1
MBS-C
GV1
N
2
GV2
Refrigerator Power Cable
Figure 4-1
4-2
Vacuum
Chamber
Flexible Hoses
MBS-C ：MBS-C CRYO METER
* Select a thermometer according to the model of your cryopump.
PiG1 ：CRYOPUMP PIRANI GAUGE
IG1 ：CRYOPUMP IONIZATION GAUGE
PiG2 ：VACUUM CHAMBER PIRANI GAUGE
IG2 ：VACUUM CHAMBER IONIZATION GAUGE
PiG3 ：ROUGHING PUMP PIRANI GAUGE
V1 ：MAIN VALVE
RV1 ：CRYOPUMP ROUGHING VALVE
RV2 ：VACUUM CHAMBER ROUGHING VALVE
GV1 * ：PURGE GAS INTRODUCTION VALVE (if required)
GV2 * ：PURGE GAS EXHAUST VALVE (if required)
* Refer to Section 4.4 for more details.

Example of CRYO-U

ULVAC CRYOGENICS INCORPORATED
RV2
V1
PiG1 PiG3
RV1
Compressor Unit
®

Cryopump Vacuum System

Roughing pump
Input Power Cable
To Power Source
Cooling Water