Ulvac GLD-040 Instruction Manual page 11

Fig. 1 Dimensional drawing of GLD-040 oil sealed rotary vacuum pump ·········· 4
Fig. 2 Transportation method of the oil sealed rotary vacuum pump ············ 5
Fig. 3 Lubrication of the oil sealed rotary vacuum pump ······················ 6
Fig. 4 Basic piping diagram to the vacuum chamber
Fig. 5 Electric wiring diagram
Fig. 6 Method of wiring for power supply switch
Fig. 7 Changeover switch in the terminal box
Fig. 8 Change region of the voltage and frequency
Fig. 9 Interior of Terminal Box,GLD-040
Fig. 10 Manual Reset Type Thermal Protector
Fig. 11 Pumping speed curve
Fig. 12 Replacement of the coupling spider
Fig. 13 Disassembly drawing of GLD-040 oil sealed rotary vacuum pump ········· 29
Table 1 Specification
Table 2 Characteristics of the thermal protector
Table 3 Periodic inspection table
Table 4 Trouble check list
Table 5 GLD-040 Maintenance parts list
Attached table: Safety Data Sheet for Vacuum Pump Oil R-2
Figures and Tables
Contents - 3
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