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Frequency
Item
Once/3
Oil
days
Sound
Vibration
Current
value
Once/week
Surface
temperature
Oil leakage Oil leakage from the shaft seal
Once/3,000
Evacuation
operation
wire mesh
hours or
Oil
once/6
months
Once/year
Spider
2) Inspection of the amount of pump oil
Refill the pump oil so that the pump oil level is kept within the range of the lines showing
the upper and lower limits on the oil level gauge during operation.
3) Inspection of oil leakage
When oil leaks from the shaft seal section or drain plug seal section, repair is required. Our
specified O-rings and seals are always available from the service departments shown at the
back of this manual. When necessary, contact them.
4) Inspection of evacuation wire mesh
If the wire mesh is clogged with dust included in the evacuated gas, the pump's efficiency
may deteriorate.
5) Inspection of abnormal sounds and vibration
Check the nuts and bolts for looseness.
Table 3 Periodic inspection table
Details
Amount
Color (Reddish brown, dark blown,
and cloudy white are not good.)
Abnormal sound
Abnormal vibration
Difference from the rated value
Surface temperature
(The temperature higher than the
room temperature by 50℃ or more
is abnormal.)
section and plugs.
Clogged with dust
Even if no problem is recognized,
be sure to replace the oil.
Damage or fracture
- 21 -
Measures
Refill the oil.
Replace the oil.
Check nuts and bolts for
looseness. If not clear, contact us.
Check the cause of an overload.
If not clear, contact us.
Check the cause of an overload.
If not clear, contact us.
Replace seals, or contact us.
Clean the wire mesh.
Replace the oil.
Replace the spider.
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