Ulvac GLD-040 Instruction Manual page 37

Problem
⑥ The specified amount of oil has not
The pressure
does not been added.
decrease.
⑦ The oil has deteriorated.
⑧ Leakage occurs from the pipe
connected to the pump.
⑨ Our specified oil is not being used.
⑩ Oil does not circulate, or the oil
hole of the cover is clogged.
① Problem with power supply voltage ① Set the power supply voltage to
Abnormal
sound is
generated.
② The motor malfunctions.
③ Foreign matter has entered the
pump.
④ The specified amount of oil has not
been added.
⑤ The coupling spider malfunctions.
⑥ Oil does not circulate, or the oil
hole of the cover is clogged.
⑦ Components inside the pump have
burnt out.
① Continuous operation at high
Pump surfaces
evacuation pressure
are extremely
hot (50 °C or
more higher
than the room
temperature)
② The specified amount of oil has not
been added. (If the oil amount is not
sufficient, the cooling effect of the
pump will be reduced.)
③ The temperature of the evacuated
gas is high.
④ Oil does not circulate, or the oil
hole of the cover is clogged.
① The pump is been filled in excess of
A lot of oil
splashes out the specified amount.
from the
② Continuous operation is performed
exhaust port.
at a high evacuation pressure.
① Deterioration of the O-ring and the
The oil leaks
outside the oil seal of the case and cover
pump.
Cause
⑥ Add the specified amount of oil.
⑦ Replace the oil.
⑧ Locate the leakage with a leakage
⑨ Overhaul the pump and replace
⑩ Overhaul and clean the oil hole.
② Replace the motor.
③ Eliminate the foreign matter and
④ Add the specified amount of oil.
⑤ Replace the coupling spider.
⑥ Overhaul and clean the oil hole.
⑦ Overhaul (replace the damaged
① If continuous operation is
② Add the specified amount of oil.
③ Mount cooling equipment such as a
④ Overhaul and clean the oil hole.
① Discharge the oil until it reduces to
② Install an oil mist trap at the outlet
① Check and replace the O-ring and
- 26 -
Measures
detector and stop the leakage.
with oil specified by us
within ±10% of the rated voltage.
overhaul the pump.
components).
performed at a high evacuation
pressure, the pump surface
temperature reaches 80℃.
However, this is not a serious
problem.
gas cooler at the inlet side.
the specified amount.
side.
oil seal.
Reference
3.2
6.3
6.3
6.2
3.5
3.2
6.4
6.2
3.2
6.2
3.2
4.8
6.2