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Ulvac MS Series Instruction Manual

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YO23-1101AK-DI-001-03
Dry Vacuum Pump
Original Instructions
INSTRUCTION MANUAL
MODEL
MS-Series
ＭＳ１２０Ａ-E
ＭＳ１２００Ａ-E
ULVAC, Inc.

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  • Page 1 YO23-1101AK-DI-001-03 Dry Vacuum Pump Original Instructions INSTRUCTION MANUAL MODEL MS-Series ＭＳ１２０Ａ-E ＭＳ１２００Ａ-E ULVAC, Inc.
  • Page 2 Before Use of This Machine Dry Pumps from ULVAC, Inc. (hereinafter referred to as "Our Company"): MS series (hereinafter referred to as "this machine") Upon receipt of the machine, please confirm the contents included are the same as you ordered and check the machine for any damage attributed to transportation etc.

  • Page 3: Safety Indications

    Safety Indications Signal words and symbol marks are used in the warning indications contained in this document and on the product so that the user can understand the matters to be observed. Their meanings are as follows. ▶ Definition of signal words The terms that signify the warning level for safety are referred to as "signal words."...

  • Page 4: Warning Label Types And Display Positions

    Warning Label Types and Display Positions A warning label is attached onto a warning location on the machine. Before operating this pump, be sure to confirm the warning contents. ▶ Warning label types and descriptions Parts with this warning label have a risk of electrical shock. Turn off the primary power supply before starting wiring or maintenance.

  • Page 5: Warning Label Display Position

    ▶ ▶ Warning label display position MS120A-E 【When silencer installed】 ▶ Figure 1 Warning label pasting position （MＳ120A-E） ▶ MS1200A-E 【When silencer installed】 Figure 2 Warning label pasting position （MＳ1200A-E） YO２2-1105AK-DI-003-03...

  • Page 6: Warranty Terms

    Warranty Terms Although this pump undergoes our stringent internal inspection before shipment, if there are any failures attributable to us such as a manufacturing defect or accident during shipping, contact our nearest sales office or dealer. We will repair or replace it free of charge. ▶...

  • Page 7: Others（Warranty Terms

    (a) Transactions in Japan: We will send a substitute product, or repair the product returned to us or our nearest ULVAC TECHNO office. If on-site action is required, contact our nearest sales office or dealer separately. (b) Direct export transactions: We will send a substitute product, or repair the product returned to us or our nearest service center.

  • Page 8: Applicable Model

    specifications and operating procedures. ● Note that the specifications, prices, and other contents in this manual are subject to change without notice for improvement or other reasons. Changes are released as a revision that updates the document number listed on the top-right corner of the instruction manual's cover. ●...
  • Page 9 viii YO２2-1105AK-DI-003-03...

  • Page 10: Table Of Contents

    Table of Contents Before Use of This Machine ..............i Safety Indications ........................ii Definition of signal words ................... ii ▶ Definition of pictograms: ..................ii ▶ Warning Label Types and Display Positions ................iii Warning label types and descriptions .............. iii ▶...
  • Page 11 Detailed Functions of Parts ................. 13 2.6.1 Summary of controller .................... 13 2.6.2 Stop switch....................16 2.7 System Configuration ...................... 17 3. Installation ..................20 Before Installation ....................20 3.1.1 Responsibility for work from shipping to startup ........20 3.1.2 Storage environment requirements ............
  • Page 12 6.Troubleshooting ................. 58 6.1 Trouble with Basic Operation ..................58 6.2 Alarm Status and Measures .................... 59 6.2.1 Alarm list ...................... 59 6.2.2 Inverter alarm code list ................61 6.3 How to Restart the Pump after an Alarm ..............66 7.

  • Page 13: For Safety Use

    1. For Safety Use This chapter describes how to reduce risks as well as which dangerous behaviors must be avoided for each work item. 1.1 Handling of his Machine If you need an overhaul or repair or if you have a problem, contact our nearest service center. This manual assumes that this pump's interlock system or control system has been integrated into the host equipment.

  • Page 14: Acceptance/Transfer/Storage

    Exchange and Foreign Trade Law as well as government ordinances, ministerial ordinances, notices, and other orders based on said law. Contact our nearest sales office or dealer. 【 List of sales offices 】 https://www.ulvac.co.jp/support_info/sales_office/ 1.2 Acceptance/Transfer/Storage 1.2.1 Acceptance Never get under this machine This machine may fall or topple if a forcible operation is performed or if the equipment is not sufficiently maintained.

  • Page 15: Transfer

    1.2.2 Transfer Do not use the casters as a transportation device or a means of equipment support. Although this pump is equipped with casters, do not use them as a transportation device or a means of equipment support. For transport, use cargo-handling equipment or a pallet truck. To transport this machine, a load higher than the safety standards is required.

  • Page 16: Disposal

    1.4 Disposal Ask a waste disposal specialist to dispose of this pump if you have used it to exhaust harmful gas that may endanger human health. Ask a waste disposal specialist to dispose of this pump if you have used it to exhaust harmful gas that may endanger human health.

  • Page 17: Transfer Of Heavy Object

    1.6.2 Transfer of heavy object Never get under this pump. The pump may fall or topple if a forcible operation is performed or if the equipment is not sufficiently maintained. Never get under this pump. Certified persons must perform loading work and operate the cargo- handling machine.

  • Page 18: Leakage Of High-Temperature Cooling Water

    Do not increase the pressure on the pump's exhaust side to 0.03 MPaG or higher. Measure the pressure on the pump's exhaust side. If the pressure is 0.03 MPaG (0.3kg/cm G) (gauge pressure) or higher, remove any objects that prevent gas on the exhaust port side from passing.

  • Page 19: Product Overview

    2. Product Overview The MS series is designed to pump a general equipment which interlock system and control system are to be installed in the host device. 2.1 Application ● Pumping system for electronic components and semiconductor manufacturing equipment Etching equipment, Ashing equipment, Plasma cleaning equipment, etc.

  • Page 20: Efforts Related To Rohs Directive And

    2.3 Efforts Related to RoHS Directive and Regulated Hazardous Substances The main unit and the standard accessories including the cable assembly do not contain the following 10 specified environmentally hazardous chemical substances of more than their thresholds that are regulated by the RoHS Directive (Revised RoHS Directive 2011/65/EU and (EU) 2015/863).

  • Page 21: Performance Curve

    Performance Curve 2.4.1 Pumping speed Figure 3 Pumping speed curve (MS120A-E) 1,200 1,000 1000 10000 100000 Pressure (Pa) Figure 4 Pumping speed curve (MS1200A-E) YO２2-1105AK-DI-003-03...

  • Page 22: Power Consumption

    2.4.2 Power consumption Figure 5 Power curve (MS120A-E) 6,000 MS1200A 5,000 4,000 3,000 2,000 1,000 1000 10000 100000 Pressure (Pa) Figure 6 Power curve (MS1200A-E) YO２2-1105AK-DI-003-03...

  • Page 23: Name And Function Of Parts

    Name and Function of Parts Figure 7 Name of parts (MS120A-E) Figure 8 Name of parts (MS1200A-E) YO２2-1105AK-DI-003-03...
  • Page 24 Table 2 Name of Parts Name Function Cooling water inlet Connects the pipe that supplies cooling water. (Rc3/8) Cooling water outlet Connects the pipe that discharges cooling water. (Rc3/8) Purge gas inlet Connects the pipe that supplies a purge gas. Purge gas adjustment regulator Adjust the secondary pressure of purge gas.

  • Page 25: Detailed Functions Of Parts

    Detailed Functions of Parts 2.6.1 Summary of controller A dedicated controller is prepared for this machine. The controller can be inserted from either the front or the back. Controller port Figure 9 Controller port (MS120A-E) Controller port Figure 10 Controller port (MS1200A-E) YO２2-1105AK-DI-003-03...
  • Page 26 Figure 11 Controller Table 3 Description of Controller Name Sign Function START switch START Start the pump. STOP switch STOP Stop the pump. MODE switch MODE Switch setting items. Change the settings’ values. ▽／△ Input change switch Change the settings’ selections. ENTER switch ENTER Confirm the selected items and settings.
  • Page 27 Table 4 Description of LED lamps Name Lamp on Lamp off RUN lamp Pump starting Pump stopping REMOTE lamp REMOTE operating LOCAL operating ALARM lamp ALARM happening Pump in normal WARNING lamp WARNING happening Pump in normal ○ If abnormality occurs, the controller's WARNING lamp and ALARM lamp will light up, and the buzzer will sound.

  • Page 28: Stop Switch

    2.6.2 Stop switch This machine is equipped with a stop switch for stop. To stop the pump without using the controller, press the stop switch to stop the pump. Stop switch Stop switch (MS120A-E) (MS1200A-E) Figure 13 Stop switch ■ Pump stop method Press the stop switch.

  • Page 29: System Configuration

    2.7 System Configuration As utilities, nitrogen gas, cooling water, and power is required. Nitrogen gas system Nitrogen gas is supplied to the pump casing to reduce corrosion caused by corrosive gases and deposition of reaction products. It is also used as a shaft seal gas that prevents oil in the lubrication chamber from flowing into the pump casing, so please flow nitrogen gas regardless of the type of gas being inhaled during pump operation.

  • Page 30: Power System

    Figure 15 System connection diagram 1 （MS1200A-E） Electrical system The electrical system is divided into power line that drive the motor and control line. There is sensor inside that monitors the operating status constantly. These sensors detect abnormalities, and as abnormality to alert from the output of buzzer, LED, and remote connector. There are two ways to operate the pump: local operation using a dedicated controller (LOCAL) and remote operation using electrical signals from a remote connector (REMOTE).
  • Page 31 ● The interlock system and control system of this machine are designed to be incorporated into the host equipment. ● This machine should be installed inside or near the host equipment (within 3m from the EMO button). ● The power line of this machine should be connected to the EMO system of the host equipment. Figure 16 System connection diagram 2 The warranty covers this machine only (refer to "Warranty Scope").

  • Page 32: Installation

    (transport), while the customer is in charge of the stages from cargo reception through startup. However, the customer may fully or partly transport, unpack, or install this pump depending on the pump's terms and conditions. Packing ULVAC ・ Transport ULVAC entrust this task to a specified carrier. ・ Cargo reception and unpacking Customer ・ Inspection Customer ・...

  • Page 33: Storage Environment Requirements

    3.1.2 Storage environment requirements Store into following conditions when this machine will be stored at warehouse or clean storage room prior to installation without use for a long period of time. -20 to 60°C (No freezing) Ambient temperature Ambient humidity 95 %RH or less (No condensation) Altitude 1,000m or less of altitude above sea level...

  • Page 34: Unpacking

    This equipment is not intended for use in residential environments and may not provide adequate protection against radio reception in such environments. This product must not be used in residential areas. 3.2 Unpacking This machine is protected by stretch film, cushioning materials, or by other means, packed in a wooden frame or cardboard, and shipped.

  • Page 35: Transfer

    Table 5 List of standard accessories Product name Specifications Quantity Remarks CE connector (DDK) CE05-6A22-22SD-D-BSS Power connector /JL04V connector (JAE) /JL04V-6A22-22SE-EB-R CE connector (DDK) CE3057-12A-1-D Waterproof cable clamp /JL04V connector (JAE) /JL04-2022CK(14)-R Signal connector 1 With a clamp hood Ｄ-sub 15pin Signal connector 2 Ｄ-sub 25pin With a clamp hood...

  • Page 36: How To Hoist Using Crane

    3.3.1 How to hoist using crane Never get under this machine This machine may fall or topple if a forcible operation is performed or if the equipment is not sufficiently maintained. Never get under this machine. Use a crane or other cargo-handling equipment Give instructions to lift and transfer this machine using a crane or other cargo- handling equipment securely with the four eyebolts on the top of this machine when unpacking or lifting it.

  • Page 37: How To Transport Using Pallet Truck

    3.3.2 How to transport using pallet truck Do not transport this machine with the adjusters raised When transporting this machine via pallet truck, lower the four adjusters. If you carry this machine without the adjusters attached to the pallet, the machine may topple, causing injury or damage.

  • Page 38: Installation

    Earthquake resistance has been examined based on the requirements of the 1997 Edition of the United States Union Building Code (UBC). For the overturning moment, horizontal load and center-of-gravity position, refer to "Table 6: Earthquake resistance assessment." ULVAC. Inc. Components Div. Table 6 Earthquake resistance assessments Date: July, 2023...
  • Page 39 YO２2-1105AK-DI-003-03...

  • Page 40: Piping And Wiring

    ● When connecting the pipe, remove the storage flange. At the time of shipment from the factory of the MS series, a storage flange, inlet port mesh, and desiccants are attached to the inlet flange section. When connecting the pipe, remove the storage flange and also the desiccants.

  • Page 41: Dedicated Silencer (Separate Packaging)

    3.5.2 Dedicated silencer (separate packaging) Notice Install the dedicated silencer horizontally. If the dedicated silencer is installed on a sloped floor or if the adjuster is unbalanced, it may cause noise or malfunction. Do leak test on the entire system after assembling the piping. If a leak occurs, process gas may leak from the pump and pose a danger to humans.

  • Page 42: Cooling Water Piping

    3.5.3 Cooling water piping Notice Use appropriate joints The cooling water port of this machine is Rc 3/8. Connect appropriate joints to the cooling water piping. Do not confuse between inlet cooling water port and the outlet cooling water port. Notice Items to comply with in the use of cooling water piping Comply with the items described below for cooling water and piping.
  • Page 43 Pump may malfunction if continue to operate the pump when the flow rate of cooling water is under the specified amount. Please ensure the specified flow rate. ● It is recommended to use water with fewer impurities (e.g. industrial water; refer to the table below) for cooling water.

  • Page 44: Purge Gas

    3.5.4 Purge gas This machine has a purge gas introduction mechanism. If the target gas contains condensable gas and moisture, liquid may collect in the final stage of the pump. Therefore, use purge gas to prevent the gas from liquefying and accumulating inside the pump body. In addition, for explosive/flammable/combustion-supporting gas, dilute it with purge gas to the extent that the danger is eliminated.

  • Page 45: Drain

    ⚫ Adjust the flow rate after starting the pump. Referring to the above for flow rate and pressure setting conditions. ⚫ Nitrogen pressure varies depending on the amount used. Once the usage is adjusted, readjust the secondary pressure again to the specified value of 0.02~0.10 MPa. Figure 22 Purge gas supply pressure and flow rate (for reference) 3.5.5 Drain This machine is equipped with a drain valve in the exhaust piping to prevent the liquid condensed on the...

  • Page 46: Electric Wiring

    3.6 Electric Wiring 3.6.1 Electric wiring Electric wiring must be carried out by qualified personnel Electric wiring must be carried out by qualified personnel. Before installing the wiring, turn off the primary ground-fault interrupter. Before installing the wiring, turn off the primary ground-fault interrupter. Never leave the voltage applied during the work.
  • Page 47 frequency, use one with a sensed current of 200 mA or more. ● This device is a Group 1, Class A device as defined in EN55011. This means that this device does not generate or intentionally use radio frequency energy. In addition, all facilities other than those directly connected to the low-voltage power supply network that supplies power to domestic buildings and buildings used for domestic purposes.

  • Page 48: Wiring For Remote Control

    3.6.2 Wiring for remote control Wiring must be installed by qualified personnel. Electric wiring must be carried out by qualified personnel. Before installing the wiring, turn off the primary ground-fault interrupter. Before installing the wiring, turn off the primary ground-fault interrupter. Never leave the voltage applied during the work.
  • Page 49 ■ Signal connector 1 pin assignment (15pin) Table 11 Signal connector 1 pin assignment Pin assignment Item Specifications OPEN ： Stop DRP Start CLOSE: Operation ＊２ MBP Start CLOSE: Operation OPEN： Stop DRP _Start Confirmation CLOSE: Operating OPEN: Stopped ＊２ MBP Start Confirmation CLOSE: Operating OPEN: Stopped...
  • Page 50 ■ Signal connector 2 pin assignment (25pin) Table 13 Signal connector 2 pin assignment Pin assignment Item Specifications Alarm Reset CLOSE: Reset OPEN: Normal ECO Mode CLOSE: ECO Mode OPEN: Normal Operation ＊ CLOSE: Normal OPEN: External Interlock Stop External Interlock N2 Valve CLOSE: Operating (Valve Close) OPEN: Stopped...
  • Page 51 ＊１：[Abnormality: Open/Close] can be changed by setting the controller. ＊2：This function is only available for option. Table14 Signal connector 2 specifications Connector type D-sub 25-pin female Applicable connector type D-sub 25-pin male AWG ＃ 22 Applicable electric wire size * The fitting screw size of the connector is M2.6. Figure 21 I/O block diagram for signal wiring YO２2-1105AK-DI-003-03...
  • Page 52 Signal connector 1_Pin No. 3/9: DRP Start Confirmation This terminal indicates that each pump has started normally. The timing of signal is sent can be changed. (*Refer to Figure 22 Time chart for each start confirmation signal setting) Signal connector 2_Pin No. 2/14: ECO Mode The rotation speed can be controlled by “ECO mode operation selection”...
  • Page 53 Start confirmation, READY confirmation signal time chart When 「Set Mode１」⇒「Start Confirmation」⇒「１」 Pump start signal （ＩＮＰＵＴ） Rated rotation Motor rotation speed Sends a start confirmation signal when the rated rotation speed is Start confirmation signal （ＯＵＴＰＵＴ） When the rated rotation speed is reached and the ＲＥＡＤＹ...

  • Page 54: Electrical Communication

    3.6.3 Electrical communication If you want to start or stop this machine remotely, attach a LAN cable to the Ethernet connector. By preparing a communication system using the communication commands described in the next section and communicating with the pump, you can start/stop the machine and check its status from a location far from the machine. Pin assignment Communication Specifications Communication...
  • Page 55 ■ Communication command List Please use ASCII code for commands. Some responses are binary. Command <CR> Data 2Byte 1Byte Figure24 Communication command Table16 List of available communication commands I ／ O Command Content Appendix Reading system status System operating status Stop command Startup instruction Read status...

  • Page 56: Operation

    4. Operation 4.1 Precautions on Operation Do not use any gas other than inability gas The pumping of toxic gas, flammable gas, combustible gas, corrosive gas, explosive gas and particle gas, may damage this machine and hazardous. Furthermore, the chemical reaction of remaining gases and/or generated particle and gases may cause the explosion, not only during operation but also after stop operation.
  • Page 57 Use water with fewer impurities for cooling water It is recommended to use water with fewer impurities (e.g. industrial water; refer to the table below) for cooling water of this machine. In the cooling water system of this machine, water scale, such as calcium carbonate, settles on depending on the water quality, which may reduce the cooling water flow rate.
  • Page 58 ⚫ Nitrogen pressure varies depending on the amount used. Once the usage is adjusted, readjust the secondary pressure to the specified value of 0.02 to 0.10 MPa. Figure25 Purge gas supply pressure and flow rate (for reference) YO２2-1105AK-DI-003-03...

  • Page 59: Preparation For Operation

    4.2 Preparation for Operation 4.2.1 Pre-operation check Before operating this machine, reconfirm the following. 1． Make sure that the cooling water pipe, power connector, and signal connector are connected. 2． Open the cooling water valve and check that there is no cooling water leakage. 3．...
  • Page 60 LOCAL/REMOTE switching operation time chart during operation For LOCAL operation (REMOTE I/O start OFF) REMOTE I/O cannot be started in LOCAL state. If the DRP start signal is not input at REMOTE I/O during pump operation Switching from LOCAL to REMOTE will safely stop the pump. For LOCAL operation (REMOTE I/O start ON) If the DRP activation signal is input at REMOTE I/O, Even if you switch from LOCAL to REMOTE while the pump is running, the pump will...

  • Page 61: How To Start/Stop

    4.3 How to Start/Stop Please limit the frequency of turning on/off the power supply to once Notice every 30 minutes. Frequently turning the power supply side MC on and off may cause the inverter used inside to malfunction. From the viewpoint of the lifespan of the relay contacts and electrolytic capacitors inside the inverter, please turn on/off the power supply side MC no more than once every 30 minutes.

  • Page 62: Monitor Display

    4.4 Monitor Display 4.4.1 How to operate monitor display This machine is equipped with multiple sensors, and you can check the status of each on the display. If you want to check the status of each pump, follow the steps below on the controller. １．...

  • Page 63: State History

    ＊1：This function is only supported in H specification. ＊2：This function is only available as an option. ＊3：This function is only available for exhaust set. 4.4.2 State history A history of up to 100 pump operations/stops/alarms/warnings is recorded. To view your driving history, follow the steps below on the controller. Press once on the status monitor screen, and "...
  • Page 64 bto select the parameter setting value. Press to confirm parameter changes. once to return to the status monitor screen. Table18 『Setting Mode 1』 list of setting items managed Display name Setting value Supplement 『 Startup confirmation 』 1(def.) / 2 Set the startup confirmation method (1/2).

  • Page 65: Setting Mode 2

    warning is issued. (A contact/B contact) Option N Sets the warning contact output when a 『 Contact_OP N2_warning 』 A(def.) / B flow rate warning is triggered. (A contact/B contact) 『 Contact exhaust pressure Set the warning contact output when an exhaust A(def.) / B warning 』...

  • Page 66: Setting Item List

    4.5.3 Setting item list Please refer to the following for the initial parameters of 『Setting Mode 2』 for each model. Table20 『Setting Mode 2』 setting items Alarm Upper/Lower Warning Alarm Monitoring range setting value limit alarm time time Display name Lower limit From 5 seconds after N2 purge gas...
  • Page 67 upper limit 0 °C From 5 seconds after Exhaust pipe ready 0 °C operation until operation stops temperature Heater temperature control 0 °C upper limit 0 °C From 5 seconds after Optional ready 0 °C operation until operation stops temperature Heater temperature control 0 °C Optional valve None...

  • Page 68: Maintenance And Inspection

    If this pump is stored for a long period of time without being operated (at least six months), trouble may occur when the pump is operated due to rusting. If the pump has not been used for a long period of time, request an inspection from your local ULVAC service center before using the pump.

  • Page 69: Overhaul

    Note that when performing an overhaul, it is necessary to replace at least the parts described in "Appendix: Major Replacement Parts." For overhauls, contact your local ULVAC Service center. When requesting overhaul, maintenance, repair, or other work, fill out the Declaration of Contamination attached to this document and submit it to the service center.

  • Page 70: Troubleshooting

    Supply power. 4.2.1 The power cannot Wrong connector wiring Install wiring correctly. 3.6.1 be turned on. Electric leakage inside this Contact to ULVAC service center. machine No electricity is supplied. Supply power. 4.2.1 Nothing appears on the controller display. Faulty instrumentation Contact to ULVAC service center.

  • Page 71: Alarm Status And Measures

    The panel generates Contact to ULVAC service center. vibration noise. Change to a thicker pipe. Even if the gas is introduced in a normal operation, Exhaust noise resonant sound may generate by the connected pipes resonance. The pump generates unusual noise.
  • Page 72 →ULVAC technician repair Instrumentation equipment Contact service center failure →ULVAC technician repair Environmental temperature Please lower environmental is high. temperature. Exhaust pressure is high. Clean the exhaust piping. Abnormal EX.PRESS. HIGH (＞0.13MPa) (non-return valve) pressure rise in ALARM Exhausting reactive gases.

  • Page 73: Inverter Alarm Code List

    Measures Reference Motor failure Contact to ULVAC service center. Unable to rotate due to foreign matters. ➡ Contact to ULVAC service center. Increased back pressure. ➡ Clean and wash the piping on the exhaust side of 3.5.1 the pump. Pump overload Damage to bearing.
  • Page 74 The cooling water piping is clogged, or impurities are flow rate mixed in the cooling water. 3.5.3 ➡ Clean the piping. Leakage from the cooling water piping ➡ If it is in this machine, Contact to ULVAC service center. Indication Alarm Name Status DINV/MINV Motor overload The motor overload protection is activated.
  • Page 75 The inverter overload protection is activated. Code:000C__ALARM Causes Measures Reference Unable to rotate due to foreign matters. ➡ Contact to ULVAC service center. Increased back pressure. ➡ Clean and wash the piping on the exhaust side of 3.5.1 the pump. Pump overload Damage to bearing.
  • Page 76 Check the power supply voltage. of the input power supply. 3.6.1 ➡ Take measures to stabilize the power supply. Phase voltage imbalance Contact to ULVAC service center. Inverter failure Indication Alarm Name Status An open-phase occurred on the inverter output...
  • Page 77 No cooling water flow Cool this machine once and then flush it with water. 3.5.3 Pump overload Contact to ULVAC service center. Faulty ventilation fan Contact to ULVAC service center. Ambient temperature is out of Operate at an appropriate ambient temperature.

  • Page 78: How To Restart The Pump After An Alarm

    6.3 How to Restart the Pump after an Alarm ■ Resetting an alarm If the controller displays an alarm, restart the pump after eliminating the cause of the alarm. Upon restarting the pump, reset the alarm using any of the following methods. Procedure after an alarm occurs How to reset the alarm After eliminating the cause of the alarm,...

  • Page 79: Specifications

    7. Specifications 7.1 Performance Specifications Table 23 Normal specifications list Model MS120A-E MS1200A-E Maximum Pumping / hr ※ speed Atmospheric pressure ≦0.6 ≦0.1 Ultimate pressure 3-phase 200-240±10% 50／60Hz Power-supply voltage (selection) At ultimate Approximate pressure power Under maximum consumption load Motor capacity >4.0 Amount of cooling water...

  • Page 80: External Dimensions

    7.2 External Dimensions MS120A-E Figure32 External dimensions of MS120A-E MS1200A-E Figure33 External dimensions of MS1200A-E YO２2-1105AK-DI-003-03...

  • Page 81: Appendix

    Appendix Major Replacement Parts The list of parts to be replaced through an overhaul is shown below: The replacement period depends on the part. In addition, the recommended replacement cycle shown in the table below is given for reference only. It depends on your usage and environment. Table 24 Major replacement parts Category Parts Name...

  • Page 82: For Emc Directive

    For EMC Directive In order to comply with the EMC Directive, the following cable specifications must be prepared: Table 25 Interfaces（cables） Interface(s): Max. Cable Length, Shielding Cable Classification AC Mains 3m, Un-shielded AC Power Line Control Cable I/O 3m, Shielded Signal and DC Power Line Controller 3m, Shielded...
  • Page 83 When connecting two devices Pump address [192.168.1.1] [192.168.1.2] When connecting n devices Pump address [192.168.1.1] [192.168.1.2] [192.168.1.n] YO２2-1105AK-DI-003-03...

  • Page 84: Communication Command Details

    b.2 Communication command details ■ Communication command list Please use ASCII code for commands. Some responses are binary. Command <CR> Data 2Byte 1Byte Figure29. Communication command b.2.1 System’s start/stop status readout(A0) ●outputs the following status in ASCII code. "０"：Stopped "２"：Emergency stop "３"：Interlocking "４"：Alarm occurring "５"：Starting...

  • Page 85: Status Readout(A3)

    b.2.4 Status readout(A3) ▲outputs the following bit status as a binary value. bit0：DRP startup confirmation bit1：Multiple alarms occur bit2：Remote bit3：Warning bit4：Alarm bit5：0 bit6：Multiple warnings occur bit7：0 bit8：MBP startup confirmation bit9：EMO status confirmation bit10：N2 warning bit11：OP N2 warning bit12：Exhaust pressure warning bit13：Energy saving operation bit14：READY YO２2-1105AK-DI-003-03...

  • Page 86: Mbp Starts(A4)

    b.2.5 MBP starts(A4) Only 2 of ”MBP RUN selection” （ 0:MBP interlocking start ＜ def.＞ /1:MBP keep stopping/2:MBP individual start） in setting mode 1 is valid. b.2.6 Valve’s readout(A5) ▲outputs the following bit status as a binary value. bit0：Manual bit1：SV1 on（N2 gas valve） bit2：...

  • Page 87: Operation Display's Readout (B1)

    b.2.9 Operation display’s readout (B1) ●●represents the sensor (ASCII code) you want to readout. (Reference Table 1) ■■■■represents the sensor reading value (ASCII code) (Reference Table 1) Ex)”B101” →”B1010100”(N2 purge gas flow rate 10.0SLM) Table 1 Sensor number table for B1 command ●●is ASCII code （...
  • Page 88 〇〇 represents the history number No. （”00”～”99”）in ASCII code. ”ｙｙｍｍｄｄｈｈｍｍｓｓ“ represents the year, month, day, hour, minute, and second in ASCII code. ｙｙ（year）："０１”～”９９" ｍｍ（month）："０１”～”１２" ｄｄ（day）："０１”～”３１" ｈｈ（hour）："００”～”２３" ｍｍ（minute）："００”～”５９" ｓｓ（second）："００”～”５９" △△ represents an abnormal state using an ASCII code. ”００”：Others ”０１”：Warning ”０２”：Alarm □□...

  • Page 89: Warning's Readout (B3)

    ” ００００ ” ～ ” ９９９９ ” １℃ " １３ " ：ＤＲＰ temperature ” ００００ ” ～ ” ９９９９ ” " １４ " ：ＭＢＰ temperature １℃ ” ００００ ” ～ ” ９９９９ ” １℃ " １５ " ： Exhaust pipe temperature ”...

  • Page 90: Operation Record's Readout (B8)

    b.2.13 Operation record’s readout (B8) 〇〇〇 is ASCII code。 ”０００”～”９９９”：History No.（”００” is the latest data） ▲Ｎ２：Ｎ２ purge gas flow rate data （4byte、binary value、1SLM unit） ▲ＯＰＮ２：ＯＰ Ｎ２ purge gas flow rate data （4byte、binary value、1SLM unit） ▲ＣＷ：Cooling water flow rate data （4byte、binary value、1L/min unit） ▲ＰＡ：Exhaust pressure data （4byte、binary value、1MPa unit）...

  • Page 91: Current Status's Readout (B9)

    ▲ＥＲ：Error flag （2byte、binary value、0：None 1：Warning 2：Alarm 4：System error） ▲Ａ３：Ａ３ command response data （2byte、binary value、A3 command response data） △ＹＭＤ：Date data （6byte、BCD value）※Example ２００２０３（February 3, 2020） △ＨＭＳ：Date data （6byte、BCD value）※Example ２００２０３（13:19:45） ▲Reservation 3: Reservation 3 data （2byte、binary value、fixed at 0） ▲Ａ０：Ａ０ command response data （2byte、binary value、A0 command response data） ▲ＲＬ：Remote/Local （2byte、binary value、0：Local 1：Remote）...

  • Page 92: Operation Record-2'S Readout (Ba)

    b.2.15 Operation record-2’s readout (BA) 〇〇〇 is ASCII code。 ”０００”～”９９９”：History No.（”００” is the latest data） ▲ＤＩＶＤ：ＤＲＰ_ＩＮＶ heat radiation FIN temperature data （2byte、binary value、1℃ unit） ▲ＭＩＶＤ：ＭＢＰ_ＩＮＶ heat radiation FIN temperature data （2byte、binary value、1℃ unit） ▲ＤＩＶＷ：ＤＲＰ_ＩＮＶ minor failure code （2byte、binary value） ▲ＭＩＶＷ：ＭＢＰ_ＩＮＶ minor failure code （2byte、binary value） ▲ＤＩＶＥ：ＤＲＰ_ＩＮＶ...

  • Page 93: Ip Address Setting(C8)

    ▲ＭＩＶＯ：ＭＢＰ_ＩＮＶ abnormality heat radiation FIN temperature data （2byte、binary value、1℃ unit） ▲ＤＩＶＴ：ＤＲＰ_ＩＮＶ cumulative operating time （4byte、binary value、1h unit） ▲ＭＩＶＴ：MBＰ_ＩＮＶ cumulative operating time （4byte、binary value、1h unit） b.2.16 IP ADDRESS setting(C8) 〇〇〇．△△△．□□□．◇◇◇ is ASCII code（ＩＰ ＡＤＤＲＥＳＳ 〇〇〇．△△△．□□□．◇◇◇） 〇〇〇："０００"～"２５５”、initial setting”１９２” △△△："０００"～"２５５”、initial setting”１６８” □□□："０００"～"２５５”、initial setting”００１” ◇◇◇："０００"～"２５５”、initial setting”００1”...
  • Page 94 YO２2-1105AK-DI-003-03...

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