Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 29

CRYO-U cryopump instruction manual
®
the dew-point (Refer to "Appendix F Dew Point Temperature"). Use an air conditioner
to control temperature and humidity to prevent condensation.
◆Thermometer
・ CRYO METER MBS C-3 / MBS-3
・ Hydrogen Vapor Pressure Gauge
・ K thermocouple
◆Accessory Flange(C-type)
４－φ４．５ hole
◆Accessory Flange (UVG-40)
４－φ１０(等配)
Charged Pressure ：0.35±0.02MPaG at room temp.
Electromotive Force：Approximate 0mV at 20℃
ULVAC CRYOGENICS INCORPORATED
7
1.25
O ring ＡＳ５６８－０２０
10
2.8
Ｏリング Ｖ５５
1-3