Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 100

Revision History
Date Revision No.
2006-05-23 2006.05
2007-05-28 2007MY01
2012-09-18 2012SR02
2013JE03
2013-06-14
2014-01-06 2014JA04
2014FY05
2014-02-21
2017-11-13 2017NR06
2022-04-07 2022AL07
First edition
Added an item to be maintained.
Full-fledged revision.
Cover: Export control policy has been revised.
"SERVICE NETWORK" has been revised.
Cover: Export control policy has been revised.
"Introduction" and "SERVICE NETWORK" have been
revised.
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
"1. Cryopump Description"
"1.3 Environmental Requirements" has been added.
"8. Maintenance" has been revised.
"Appendix F Dew Condensation" has been added.
"SERVICE NETWORK" has been revised.
"Safety Instructions" has been revised.
ULVAC CRYOGENICS INCORPORATED
Contents
R-1