Ulvac CRYOPUMP CRYO-U 18H Manuals

Manuals and User Guides for Ulvac CRYOPUMP CRYO-U 18H. We have 1 Ulvac CRYOPUMP CRYO-U 18H manual available for free PDF download: Instruction Manual

Ulvac CRYOPUMP CRYO-U 18H Instruction Manual

Ulvac CRYOPUMP CRYO-U 18H Instruction Manual (101 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.26 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Cryopump System
    27
  - Specifications
    28
  - Environmental Requirements
    28
- Cryo-U
  28
  - Environmental Specifications
    28
  - External Drawing of CRYO-U
    30
  - Major Components
    31
SECTION 2 Inspection

32
SECTION 3 Quick Installation

34
- Quick Installation
  34
- Quick Installation Process Flow
  35
SECTION 4 Installation

36
- Auxiliary Equipments Required
  36
  - Cryopump
    36
- Example of CRYO-U
  37
  - Cryopump Vacuum System
    37
  - Installation
    37
- Mounting the Cryopump to the Vacuum System
  38
- Connecting Roughing Pump
  40
- Connecting Purge Gas Line
  40
- Connecting Exhaust Pipe
  41
- Connecting Cooling Water Pipe
  42
- Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
  42
- Connecting the Cryopump to the Compressor Unit
  42
- Connecting Remote Wiring
  43
- Connecting Electrical Cables
  43
- Connecting Flexible Hoses
  44
- Prior to Startup
  46
- Rough Pumping
  46
- Pressure Buildup Test
  47
- Startup and Cooldown
  47
- Operation
  47
- Rough Pumping
  47
- Normal Operation
  48
- Crossover
  49
- Shutdown Procedures
  51
- Handling of Hazardous Materials
  51
SECTION 6 Regeneration

52
SECTION 8 Maintenance

64
- Scheduled and Unscheduled Maintenance
  64
- Consumables
  66
- Cleaning the Cryopump
  67
- Charging Helium Gas
  68
- Charging Helium Gas
  70
- Helium Circuit Decontamination
  71
- Disconnecting Flexible Hose
  72
- Connecting Flexible Hoses
  76
  - Troubleshooting
    78
  - Flexible Hose
    86
  - Conversion of Thermometer Readings
    88
  - Principle of Cryopump Operation
    90
Appendices

78
Service Network

98

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