Table of Contents
Advertisement
3 PRODUCT DESCRIPTION
3.7.8
Aperture-specific parameters – SUPERSCAN IV-30
3.7.8.1
Mechanical specifications
Mirror substrate
Input aperture [mm]
Beam displacement [mm]
Weight without objective [kg]
Dimension (L x W x H) [mm]
1) AXIALSCAN variation, additional output plate for protective window.
3.7.8.2
Dynamic behaviour
Mirror substrate
Tuning
1
Processing speed at 30 V [rad/s]
Processing speed at 48 V [rad/s]
Positioning speed at 30 V [rad/s]
Positioning speed at 48 V [rad/s]
Tracking error [ms]
Step response time at 1 % of full scale [ms]
5
Position noise (RMS) [µrad]
1) VC - Optimized tuning for a wide range of applications with emphasis on processing speed.
FV - Optimized tuning for the best combination of high dynamic performance and high speed.
2) Calculation of the speed in the working field: Focal length F-Theta lens × speed.
Example: Deflection unit with F-Theta lens f = 254 mm, speed 30 rad/s
=> 254/1000 × 30 = 7.6 m/s.
3) Calculation of acceleration time approx. 1.8 × tracking error.
4) Calculation of acceleration time approx. 2.0 × tracking error.
5) Controlled to 1/5,000 of full scale.
© 2022 RAYLASE GmbH SUPERSCAN IV
QU - Fused silica
30
35.4
approx. 5.5/ approx. 12 (Type stainless steel "S")
203 × 159 × 150/ 160.5
QU - Fused silica
VC
30
50
2
30
50
2
0.48
3
1.2
< 3.2
MN105-en / v1.0.12
SI - Silicon
SC - Silicon carbide
36.0
36.0
1
SI - Silicon
SC - Silicon carbide
VC
35
40
55
65
35
40
55
65
0.43
3
0.30
4
1.0
0.8
FV
30
50
30
50
0.24
3
0.65
25
Advertisement
Table of Contents
