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3 PRODUCT DESCRIPTION
3.7.7
Aperture-specific parameters – SUPERSCAN IV-20
3.7.7.1
Mechanical specifications
Mirror substrate
Input aperture [mm]
Beam displacement [mm]
Weight without objective [kg]
Dimension (L x W x H) [mm]
1) AXIALSCAN variation, additional output plate for protective window.
3.7.7.2
Dynamic behaviour
Mirror substrate
Tuning
1
Processing speed at 30 V [rad/s]
Processing speed at 48 V [rad/s]
Positioning speed at 30 V [rad/s]
Positioning speed at 48 V [rad/s]
Tracking error [ms]
Step response time at 1 % of full scale [ms]
6
Position noise (RMS) [µrad]
1) VC - Optimized tuning for a wide range of applications with emphasis on processing speed.
2) Calculation of the speed in the working field: Focal length F-Theta lens × speed.
Example: Deflection unit with F-Theta lens f = 254 mm, speed 30 rad/s
=> 254/1000 × 30 = 7.6 m/s.
3) Calculation of acceleration time approx. 1.9 × tracking error.
4) Calculation of acceleration time approx. 2.0 × tracking error.
5) Calculation of acceleration time approx. 3.0 × tracking error.
6) Controlled to 1/5,000 of full scale.
© 2022 RAYLASE GmbH SUPERSCAN IV
QU - Fused silica
20
26.0
approx. 5.5
203 × 159 × 150/ 160.5
QU - Fused silica
VC
45
50
2
45
50
2
3
0.28
0.70
< 4.5
MN105-en / v1.0.12
SI - Silicon
1
SI - Silicon
45
60
45
60
3
0.25
4
0.62
SC - Silicon carbide
SC - Silicon carbide
VC
W
50
-
75
200
50
-
75
200
0.20
3
0.40
5
0.50
1.20
24
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